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ALD법으로 성장한 HfO<sub>2</sub> 박막의 열처리에 따른 특성변화
이재웅,함문호,맹완주,김형준,명재민,Lee, J.W.,Ham, M.H.,Maeng, W.J.,Kim, H.,Myoung, J.M. 한국재료학회 2007 한국재료학회지 Vol.17 No.2
The effects of post-annealing of high-k $HfO_2$ thin films grown by atomic layer deposition method were investigated by the annealing treatments of $400-600^{\circ}C$. $Pt/HfO_2/p-Si\;MOS$ capacitor structures were fabricated, and then the capacitance-voltage and current-voltage characteristics were measured to analyze the electrical characteristics of dielectric layers. The X-ray diffraction analyses revealed that the $500^{\circ}C-annealed\;HfO_2$ film remained to be amorphous, and the $600^{\circ}C-annealed\;HfO_2$ film was crystallized. The annealing treatment at $500^{\circ}C$ resulted in the highest capacitance and the lowest leakage current due to the reduction of defects in the $HfO_2$ films and non-crystallization. Our results suggest that post-annealing treatments are a critical factor in improving the characteristics of gate dielectric layer.
이재웅,장종욱,Lee, Jae-Ung,Jang, Jong-Wook 한국정보통신학회 2018 한국정보통신학회논문지 Vol.22 No.12
무인이동체에 대한 연구가 지속적으로 이루어 져왔다. 현재까지 지속적인 연구의 결과 무인이동체의 상용화 소식이 들려온다. 또한, 다양한 분야에서 무인이동체를 적용해 왔다. 무인이동체를 실내에서 적용시키기 위해서도 또한, 많은 연구가 이루어져왔다. IoT전용 망인 LoRa망을 이용하여 작은 공간인 집이나 혹은 사무실 병원 에서부터 공장까지 LoRa망을 적용한 무인이동체 관제 시스템을 설치하여 무인이동체가 특수한 작업을 할 때, 더욱 효율성을 높여준다. 본 논문은 IoT전용 망인 LoRa망을 이용하여 무인이동체를 하나의 사물로 인식하고, 주변 사물과 소통을 하며 무인이동체가 실내에서 주행에 필요한 정보들을 클라우드 서버로부터 제공 받음으로써, 다양한 문제점들에 대한 해결책을 제시한다. There has been a steady study of unmanned vehicle. So far, continuous research has brought news of the commercialization of unmanned vehicle. In addition, it has been applied in a variety of fields with another industry. A lot of research has been done, too, to apply inert driving indoors. Using LoRa network, which is a network dedicated to IoT, unmanned vehicle control system that is applied to LoRa network from a small space, or from an office hospital to a factory, is installed to increase efficiency when the performs special tasks. This paper presents solutions to a variety of problems by using LoRa network, which is dedicated to IoT, to recognize an unmanned vehicle as a single object, to communicate with surrounding objects, and to receive information necessary for driving indoors from a cloud server.