디아릴에텐 광이성질화 모델 검증 및 거시적 변형에 대한 고찰

김무영(Muyoung Kim),윤정훈(Jung-Hoon Yun),조맹효(Maenghyo Cho) 대한기계학회 2014 대한기계학회 춘추학술대회 Vol.2014 No.11

Diarylethene is a photo-responsive crystal which responds to ultraviolet and visible light irradiation. Because of its unique characteristics, it has received a great amount of interests in various fields (; actuator, opto-electronic device, etc.) for decades. However, there is a gap between the current research and practical industrial application. We established a new methodology to simulate the photo-response of diarylethene which can be a fundamental study to bridge the gap. Quantum-mechanical modeling with density matrix formalism, and density functional theory calculation are used to simulate the photo-response, and the proposed methodology is validated by comparing the pump-probe experiment. We also discussed the effect of unimolecular geometry change stimulated by photo-response to the macroscopic shape change of the diarylethene crystal.

DFT를 이용한 디아릴에텐 단분자의 광반응 경로 전산모사

김무영(Muyoung Kim),윤정훈(Jung-Hoon Yoon),조맹효(Maenghyo Cho) 대한기계학회 2013 대한기계학회 춘추학술대회 Vol.2013 No.12

Diarylethene is one of the promising photo responsive deforming materials, which can be used in various fields of applications due to their thermal stability, fatigue resistance, and high sensitivity. As the photo responsive reaction of diarylethene unimolecule is directly changing crystal structure of the diarylethene, knowing optical reaction of a diarylethene molecule is crucial factor in predicting its geometrical change. For this reason, the present study mainly focuses on its goal in understanding photo-response quantum path of diarylethene unimolecule by performing DFT-based simulations. We develop diarylethene molecule model, and find conical intersection which is the unknown state in photo-response quantum path in this paper.

EUV 리소그래피의 감광제 패터닝 공정에 대한 전산모사

김무영(Muyoung Kim),문정환(Junghwan Moon),최준명(Joonmyung Choi),이병훈(Byunghoon Lee),정창영(Changyoung Jeong),조맹효(Maenghyo Cho) 대한기계학회 2018 대한기계학회 춘추학술대회 Vol.2018 No.4

기계 부품 신뢰도 예측 시 NSWC 적용 방안

김재황(Jaehwang Kim),권기상(Gisang Kwon),김성환(Sunghwan Kim),김무영(Muyoung Kim) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.4

방위산업에서 신뢰도 예측 시 기계부품의 경우 대부분 NPRD에서 제시한 데이터를 적용하여 분석하였다. NPRD는 기계부품들의 카테고리 별로 실제 고장 데이터를 수집하여 평균 고장률을 제시한다. NPRD 내에 동일한 기계부품도 다양한 신뢰도 데이터가 존재하며 다양한 출처로부터 수집된 데이터다 보니 데이터의 편차도 큰 편이다. NPRD 적용 시 분석자가 최대한 유사한 항목으로 선정하지만 실제 기계부품에 가해지는 스트레스를 제대로 반영하지 못하는 경우가 있다. 전자부품의 신뢰도 예측 시 주로 사용하는 MIL-HDBK-217F는 전자부품에 인가되는 스트레스(환경/온도/Operationg Power 등)를 분석하여 신뢰도 예측시에 적용한다. 기계부품 역시 부품의 환경, 재료 특성들을 고려하여 신뢰도 예측 공식을 제시하는 NSWC Handbook of Reliability Prediction Procedures for Mechanical Equipment의 적용을 검토해야한다. 그래서 기계부품의 신뢰도 예측 시 부품에 가해지는 스트레스를 반영할 수 있어야 한다. 본 발표에서는 기계부품 중 베어링 신뢰도 예측 시 NPRD 적용 대비 NSWC 적용 시 장점과 한계점을 파악하고 적절한 적용 방안을 제안하고자 한다. When predicting reliability in the defense industry, most of the mechanical parts were analyzed by using NPRD. NPRD presents the average failure rate by collecting actual failure data for each category of mechanical parts. The same mechanical components within NPRD have various reliability data. The data is highly variance because it is data collected from various sources. When applying NPRD, analysts select similar items as much as possible, but it does not reflect proper stress on actual mechanical components. MIL-HDBK-217F, which is mainly used to predict the reliability of electronic components, analyzes the stress applied to electronic components and applies it to predict reliability. Mechanical components should also consider the application of the NSWC Handbook of Reliability Prediction Procedures for Mechanical Equipment, which presents a reliability prediction formula considering the environment and material properties of the components. Therefore, the reliability prediction of mechanical components should reflect the stress on the components. In this presentation, when predicting the reliability of bearings, the advantages and limitations of NSWC application compared to NPRD application are identified, and an appropriate application is proposed.

체육수업의 내적동기와 운동정서와의 관계

홍석호(Hong SukHo),김무영(Kim MuYoung) 인하대학교 스포츠과학연구소 2007 스포츠과학논문집 Vol.19 No.-

본 연구는 중학생의 체육수업에 대한 내적동기와 운동정서와의 관계를 살펴봄으로써 학습자 중심의 수업환경 조성과 효과적인 교수전략 수립을 위한 기초자료 제시를 목적으로 한다. 이를 위하여 400명의 중학생을 대상으로 체육수업에 대한 내적동기와 운동정서를 설문지 조사하여 SPSS 11.0 통계 프로그램으로 분석하였다. 중학생의 체육수업에 대한 내적동기는 남학생이 여학생보다, 고학년이 저학년보다 높게 나타났다. 운동정서도 남학생과 고학년이 체육수업에 긍정적인 정서를 갖는 것으로 나타났다. 지각된 유능감, 흥미와 즐거움, 노력과 중요성을 높게 인식할수록 운동정서에 긍정적인 영향을 미쳤으며, 긴장과 스트레스가 높을수록 운동점서에 부정적 영향을 미치고 있었다. 중학생의 체육수업에 대한 내적동기가 운동정서에 미치는 영향은 지각된 유능감과 흥미와 즐거움이 높고 긴장과 스트레스가 낮을수록 재미와 활력, 그리고 성취감을 높게 인식하는 것으로 나타났다. This research is to study the relation of Intrinsic motivation and Exercise emotion in physical education in order to provide some basic references for the design of student-centered physical education classes and the plan of effective teaching strategies. The researcher took 400 middle school student and used Intrinsic Motivation Inventory in Physical Education(IMIPE) test to measure Intrinsic motivation and used Exercise Emotion Scale(EES) test to measure Exercise emotion. The data analysis used a SPSS 11.0 for windows statistical analysis. This article has attempted to establish the main results; First, male students has high intrinsic motivation resulted from the difference of sex and upper-class student has high resulted from difference of grade. Second, male students has positive exercise emotion resulted from the difference of sex and upper-class student has. positive resulted from difference of school level. Third, perceived competence, interest enjoyment and the effort importance factor exercise emotion showed a positive correlation, On the other side outcome pressure tension factor showed a negative correlation. Fourth, as for the effects of intrinsic motivation on the exercise emotion, fun, vigor and achievement are influenced by perceived competence, interest enjoyment factor are high and pressure tension factor are loware calculated to generate information.

멀티스케일 전산모사기법을 이용한 EUV 리소그래피 공정의 포토레지스트 형상 예측

조맹효(Maenghyo Cho),김무영(Muyoung Kim),문정환(Junghwan Moon),박성우(Sungwoo Park),이병훈(Byunghoon Lee) 대한기계학회 2018 대한기계학회 춘추학술대회 Vol.2018 No.12

Fabrication of photoresist (PR) patterning of extreme ultraviolet lithography (EUVL) toward 10 nm highly relies on fundamental understanding of nanoscale heterogeneity in resist matrix. However, currently reported kinetic models are based on homogeneous volume element, and cannot predict EUVL performance variation under heterogeneous resist component distribution such as molecular agglomeration and line edge surface consisting of polymer chains. In this study, we developed multiscale model, density functional theory (DFT)-molecular dynamics (MD)-finite difference method (FDM) integration, reflecting heterogeneous spatial distribution of material ingredients by downscaling the deprotection unit into single pendant group, and it allowed to investigate photo-triggered chemical reaction in molecular level including photo acid generator (PAG) dissociation by secondary electron attachment, acid diffusioncoupled deprotection and solubility switch of individual polymer chain. To quantify deprotection reaction progress, protecting ratio was assigned to pendant group and tracked to distinguish dissoluble PR chains against developer as the process time elapsed. After wiping out the dissoluble chains, morphology of PR line pattern was predicted in sub-10 nm scale from the full description of photo-triggered chemical reaction.

퀜쳐 효과를 고려한 포토리소그래피 전산 모사 연구

이형우(Hyungwoo Lee),김무영(Muyoung Kim),박성우(Sungwoo Park),문정환(Junghwan Moon),이병훈(Byunghoon Lee),정창영(Changyoung Jeong),조맹효(Maenghyo Cho) 대한기계학회 2018 대한기계학회 춘추학술대회 Vol.2018 No.12

During photolithography process of semiconductor fabrication, photodecomposable quencher (PDQ) in chemically amplified photoresist neutralizes acid generated by secondary electron upon photo irradiation. Through this acid-base reaction, PDQ facilitates pattern quality improvement on semiconductor. In our previous study, we developed a multiscale model for 2 components system consisting of photoresist and photoacid generator. Herein, we proposed a newly developed 3 components system including PDQ to identify the effect of PDQ. The multiscale model based on density functional theory, molecular dynamics, and continuum dynamics reflects the chemical reaction including acid generation/diffusion, deprotection, quenching. By using this model, we compared pattern morphology between the two systems and confirmed effect of PDQ.