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Uniformity Improvement of the Ion Implantation System for Low Temperature Poly-Silicon TFTs
Toshiharu Suzuki,Eiji Isobe,Hirohiko Murata,Kazuya Yoshida,Kouji Inada,Masateru Sato,Tatsuo Nishihara 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.I
Performance of the an ion-implantation system for low-temperature poly-Si TFT was improved to meet various requirements for fabrication of high-quality LCD and OLED displays. With the unique inductively coupled plasma ion source, the deviation of ion beam current density was reduced to less than 3 %; 1 over 730 × 920 mm substrate. The “mini”-uniformity in a display panel was also improved by optimizing the ion beam extraction electrodes.
백수연,강수진,Toshiharu Suzuki,Masasuke Yoshida,Toshimichi Fujiwara,Hideo Akutsu 한국자기공명학회 2013 Journal of the Korean Magnetic Resonance Society Vol.17 No.2
ATP synthase produces ATP, a major energy source for metabolic processes in organisms, from ADP and inorganic phosphate in cellular membranes. ATP synthase is known as a rotary motor, in which the c-subunit ring functions as a rotor. In this work, we have tried to develop a more general preparation procedure of thermophilic Foc-ring (TFoc-ring) for NMR measurements. The expression of TFoF1 is easily affected by various experimental conditions such as temperature, shape and size of a flask, a volume of medium, and shaking rate of an incubator. Accordingly, we have tried to optimize the expression conditions of TFoF1. TFoc-rings were purified from TFoF1 according to a reported method. We modified purification procedures to improve purity and yield of TFoc. On top of them, we found a new combination of detergents for the purification at anion-exchange column chromatography. To examine the effect of lipid environments on the structure, the TFoc-rings were reconstituted into two kinds of lipid bilayers, namely, saturated and unsaturated lipid ones. Then, we have compared characteristics of the TFoc-ring structures in these membranes with solid-state NMR
Crystallization of Silicon Films of Submicron Thickness by Blue-Multi-Laser-Diode Annealing
Jean de Dieu Mugiraneza,Katsuya Shirai,Toshiharu Suzuki,Tatsuya Okada,Takashi Noguchi,Hideki Matsushima,Takao Hashimoto,Yoshiaki Ogino,Eiji Sahota 한국물리학회 2012 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.60 No.1
Blue-Multi-Laser-Diode Annealing (BLDA) was performed in the continuous wave (CW) mode on Si films as thick as 0.5 μm and 1 μm deposited by rf sputtering. As a result of controlling the laser power from 4.0 to 4.8 W, a whole Si layer of 0.5 μm in thickness was completely crystallized and consisted of a columnar structure of fine grains beneath a partially melted Si surface owing to the high temperature gradient along the depth in the Si layer. After additional hydrogenation in a furnace ambient, the ratio of the photo/dark current under AM1.5 illumination distinctly improved to 6 times higher than that of as-deposited condition. The BLDA is expected to be applied to thin-film solar cells and/or to thin film transistor (TFT) photo-sensor systems on panels as a new low-temperature poly-silicon (LTPS) fabrication technique.
Bak, Suyeon,Kang, Su-Jin,Suzuki, Toshiharu,Yoshida, Masasuke,Fujiwara, Toshimichi,Akutsu, Hideo Korean Magnetic Resonance Society 2013 Journal of the Korean Magnetic Resonance Society Vol.17 No.2
ATP synthase produces ATP, a major energy source for metabolic processes in organisms, from ADP and inorganic phosphate in cellular membranes. ATP synthase is known as a rotary motor, in which the c-subunit ring functions as a rotor. In this work, we have tried to develop a more general preparation procedure of thermophilic $F_oc$-ring ($TF_oc$-ring) for NMR measurements. The expression of $TF_oF_1$ is easily affected by various experimental conditions such as temperature, shape and size of a flask, a volume of medium, and shaking rate of an incubator. Accordingly, we have tried to optimize the expression conditions of $TF_oF_1$. $TF_oc$-rings were purified from $TF_oF_1$ according to a reported method. We modified purification procedures to improve purity and yield of $TF_oc$. On top of them, we found a new combination of detergents for the purification at anion-exchange column chromatography. To examine the effect of lipid environments on the structure, the $TF_oc$-rings were reconstituted into two kinds of lipid bilayers, namely, saturated and unsaturated lipid ones. Then, we have compared characteristics of the $TF_oc$-ring structures in these membranes with solid-state NMR.
Electrical Activation of Boron in Si Film Using Excimer Laser Annealing
Takashi Noguchi,Masateru Sato,Tomoyuki Miyahira,Kenji Kawai,Toshiharu Suzuki 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.1
After UV (ultra-violet) pulsed ELA (excimer laser annealing) for highly-boron doped Si films, the conductivity and the correlated crystallinity in the lm were evaluated by comparing them with the case of SPC (solid phase crystallization) in a furnace chamber at the temperature below 650 ℃. The sheet resistance decreases drastically with improving crystallinity by performing ELA. By optimizing the ELA conditions, ecient solidied activation after melting occurs and the Si film with a 50 nm thickness shows an extremely low sheet resistance of 50 ohm/□ at a dose of 5 × 10<SUP>15</SUP> cm<SUP>-2</SUP>. The analytical result from the Hall measurement suggests that the drastic activation after ELA is due to the high carrier concentration, which relates to the higher crystallinity. ELA activation for heavily-impurity-incorporated Si lms is eective not only for the formation of the source and the drain or the Si gate in CMOS (complementary metal oxide semiconductor) TFTs (thin-film transistors) but also for the electrode in pin photo-sensor diodes for SoP (system on panel) and solar cell applications.