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Electrical Activation of Boron in Si Film Using Excimer Laser Annealing
Takashi Noguchi,Masateru Sato,Tomoyuki Miyahira,Kenji Kawai,Toshiharu Suzuki 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.1
After UV (ultra-violet) pulsed ELA (excimer laser annealing) for highly-boron doped Si films, the conductivity and the correlated crystallinity in the lm were evaluated by comparing them with the case of SPC (solid phase crystallization) in a furnace chamber at the temperature below 650 ℃. The sheet resistance decreases drastically with improving crystallinity by performing ELA. By optimizing the ELA conditions, ecient solidied activation after melting occurs and the Si film with a 50 nm thickness shows an extremely low sheet resistance of 50 ohm/□ at a dose of 5 × 10<SUP>15</SUP> cm<SUP>-2</SUP>. The analytical result from the Hall measurement suggests that the drastic activation after ELA is due to the high carrier concentration, which relates to the higher crystallinity. ELA activation for heavily-impurity-incorporated Si lms is eective not only for the formation of the source and the drain or the Si gate in CMOS (complementary metal oxide semiconductor) TFTs (thin-film transistors) but also for the electrode in pin photo-sensor diodes for SoP (system on panel) and solar cell applications.
Significantly high polarization degree of the very low-albedo asteroid (152679) 1998 KU<sub>2</sub>
Kuroda, Daisuke,Ishiguro, Masateru,Watanabe, Makoto,Hasegawa, Sunao,Sekiguchi, Tomohiko,Naito, Hiroyuki,Usui, Fumihiko,Imai, Masataka,Sato, Mitsuteru,Kuramoto, Kiyoshi EDP Sciences 2018 Astronomy and astrophysics Vol.611 No.-
<P>We present a unique and significant polarimetric result regarding the near-Earth asteroid (152679) 1998 KU2, which has a very low geometric albedo. From our observations, we find that the linear polarization degrees of 1998 KU2 are 44.6 ± 0.5% in the <I>R</I>C band and 44.0 ± 0.6% in the <I>V</I> band at a solar phase angle of 81.0°. These values are the highest of any known airless body in the solar system (i.e., high-polarization comets, asteroids, and planetary satellites) at similar phase angles. This polarimetric observation is not only the first for primitive asteroids at large phase angles, but also for low-albedo (<0.1) airless bodies. Based on spectroscopic similarities and polarimetric measurements of materials that have been sorted by size in previous studies, we conjecture that 1998 KU2 has a highly microporous regolith structure comprising nano-sized carbon grains on the surface.</P>
DESIGN OF POTENT K+ CHANNEL OPENERS BY PHARMACOPHORE MODEL
Koga, Hiroshi,Ohta, Masateru,Sato, Haruhiko,Ishizawa, Takenori,Nabata, Hiroyuki 전남대학교 약품개발연구소 1996 약품개발연구지 Vol.4 No.1
A pharmacophore model which explains rationally structure-activity relationships of chemically diverse potent K+ channel openers, has been constructed. Potent benzopyran derivatives with thioamide, amide, and (N-cyano)amidine groups at the 4-position have been designed using the model.
Uniformity Improvement of the Ion Implantation System for Low Temperature Poly-Silicon TFTs
Toshiharu Suzuki,Eiji Isobe,Hirohiko Murata,Kazuya Yoshida,Kouji Inada,Masateru Sato,Tatsuo Nishihara 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.I
Performance of the an ion-implantation system for low-temperature poly-Si TFT was improved to meet various requirements for fabrication of high-quality LCD and OLED displays. With the unique inductively coupled plasma ion source, the deviation of ion beam current density was reduced to less than 3 %; 1 over 730 × 920 mm substrate. The “mini”-uniformity in a display panel was also improved by optimizing the ion beam extraction electrodes.
High efficiency ester condensation using hydrophobic zeolite membranes
Tomoya Inoue,Yuta Nemoto,Takako Nagase,Yasuhisa Hasegawa,Yoshimichi Kiyozumi,Koichi Sato,Masateru Nishioka,Satoshi Hamakawa,Toshikazu Nishide,Fujio Mizukami 한국화학공학회 2008 Korean Journal of Chemical Engineering Vol.25 No.3
We successfully developed zeolite membranes with hydrophilic character, by choosing appropriate zeolites in terms of hydrophilicity and high acid tolerance. We evaluated thus developed membranes by their pervaporation (PV) performance, dehydration from acidic organic solvent. The zeolite membranes we developed, based on merlinoite (MER), chabazite (CHA) or phillipsite (PHI), are shown to exhibit stable dehydration performance, respectively. We successfully applied the membranes to the selective removal of water in an ester condensation reaction starting from a stoichiometric mixture of a carboxylic acid and an alcohol. The availability of pervaporation-assisted ester condensation reaction was validated by various kinds of combinations of carboxylic acid and alcohols, which implies the general availability of pervaporation-assisted process intensification by zeolite membranes.