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Crystallization of a-Si Films with Smooth Surfaces by Using Blue Multi-Laser Diode Annealing
Tatsuya Okada,Kouya Sugihara,Satoshi Chinen,Takashi Noguchi 한국물리학회 2015 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.66 No.8
Crystallization of ∼50-nm-thick amorphous Si (a-Si) with a smooth surface was achieved by using Blue Multi-Laser Diode Annealing (BLDA). The a-Si films were deposited by using RF sputtering with Ne gas or by using plasma enhanced chemical vapor deposition (PE-CVD) and were annealed by using BLDA with CW scanning. After the films had been annealed a relatively low laser power below 4 W, the root-mean-square (RMS) roughness deduced from the atomic force microscopy (AFM) results for the surfaces of the Si films was slightly increased, but smoothness was within 3 nm despite the conditions under which the films had been crystallized. BLDA has a potential to realize next-generation poly-Si thin film transistors (TFTs).
A Proposal on Support for Reading of Novels Using Question Answering Technology
Satoru Okada,Tatsuya Arakawa 제어로봇시스템학회 2013 제어로봇시스템학회 국제학술대회 논문집 Vol.2013 No.10
In recent years, readings on text files become popular. We can use full-text search while we read text-files. However, full-text search has some weak points for supporting readings. We propose to introduce question-answering to readings of novels on text-files to avoid these problems and make a comfortable support system for readings of novels. We also propose several additional functions such as “Who? Function” and “Spoiler preventer”. We checked the act of our system with various examples to confirm that our system works correctly in actual reading scenes. We also examined the computational complexity of the system theoretically and experimentally, and found our proposed method does not take a long time so that the user will not feel unpleasant.
Low-temperature poly Si TFTs via BLDA for a Ne-sputtered Si film using sputtered gate SiO2
Takashi Noguchi,Tatsuya Okada 한국정보디스플레이학회 2018 Journal of information display Vol.19 No.4
Amorphous SiO2 and amorphous Si films were deposited on glass using radio frequency (RF) sputtering, and were subsequently poly-crystallized using blue-laser diode annealing (BLDA) scanned by a CWbeam. Ne, which has a smaller atomic radius than Ar, was used for the sputtering of the Si film. For the gate insulator, a small amount of O2 gas diluted with Ar was flown during the sputtering to optimize the SiO2 film with a low leakage current. A simple TFT structure with a metal source and drain (S/D) was adopted to realize a low-temperature process with a low fabrication cost. Furthermore, to confirm the effectiveness of the sputtered gate oxide, a poly-Si TFT adopting a Si film deposited using plasma-enhanced chemical vapor deposition (PE CVD) for the channel was fabricated and was compared with the TFT with a sputtered Si film for the channel. Reasonable Vg-Id characteristics were obtained for both poly-Si TFTs. The TFT structure with a metal S/D formed through a low-temperature sputtering-based process is expected to be applied to Si TFTs on an arbitrary flexible panel.
Junya Yamamoto,Tatsuya Mori,Mami Hiramatsu,Yoko AKIYAMA,Hidehiko Okada,Noriyuki Hirota,Hideki Matsuura,Seitoku Namba,Tomokazu Sekine,Fumihito Mishima,Sigehiro Nishijima 한국초전도.저온공학회 2018 한국초전도저온공학회논문지 Vol.20 No.2
Removal of iron oxide scale from feed-water in thermal power plant can improve power generation efficiency. We have proposed a novel scale removal system utilizing High Gradient Magnetic Separation (HGMS). This system can be applied to high temperature and pressure area. We have conducted the lab-scale model experiments using φ50 mm filters and it demonstrated high removal efficiency in HGMS, but scale-up of the system is required toward practical use. In this study, we conducted a large scale mock-up HGMS experiment. We used the superconducting solenoidal magnet with φ400 mm bore and demonstrated that our HGMS system can achieve sufficient scale removal capacity that is required to introduce into both off-line and on-line system.
Low-resistance phosphorus-doped Si films through blue laser diode annealing
Takashi Noguchi,Tatsuya Okada 한국정보디스플레이학회 2014 Journal of information display Vol.15 No.1
The effect of activated annealing on Si films using a new semiconductor blue laser was studied for application to the thin-film transistor (TFT) system on a panel. As a result of the blue laser diode annealing (BLDA) of the continuous-wave (CW) scanning mode at 500 mm/s for 50-nm-thick heavily phosphorus-doped Si films, drastic crystallization occurred while maintaining the surface’s smoothness. By irradiating the laser power between 5 and 8 W for chemical vapor deposition (CVD) films, the grain size was successively controlled by forming micrograins to large grains as well as to anisotropic long crystal grains. Correspondingly, the resistivity decreased depending on the increase in the electron mobility while the high carrier concentration values were retained for the various grained structures. The dopant activation rate was estimated to be 100% in the Si network in spite of the polycrystalline phase. The heavily doped Si film is expected to be applied to electrodes in high-performance TFTs as an advanced low-temperature polysilicon (LTPS) process on glass or flexible plastic sheets.
Promoter effects of adeno-associated viral vector for transgeneexpression in the cochlea in vivo
Yuhe Liu,Takashi Okada,Tatsuya Nomoto,Xiaomei Ke,Akihiro Kume,Keiya Ozawa,Shuifang Xiao 생화학분자생물학회 2007 Experimental and molecular medicine Vol.39 No.2
The aims of this study were to evaluate the expression of enhanced green fluor escent protein (EGFP) driven by 6 different promoters, including cytomegalovirus IE enhancer and chicken βactin promoter (CAG), cytomegalovirus promoter (CMV), neuron-specific enolase promoter (NSE), myosin 7A promoter (Myo), elongation factor 1α promoter (EF-1α), and Rous sarcoma virus promoter (RSV), and assess the dose in the cochlea. Serotype 1 adeno-associated virus (AAV1) vectors with various constructs were transduced into the cochl eae, and the level of EGFP expression was examined. We found the highest EGFP expression in the inner hair cells and other cochlear cells when CAG promoter was used. The CMV and NSE promoter drove the higher EGFP expression, but only a marginal activity was ob-served in EF-1α promoter driven constructs. RSV promoter failed to drive the EGFP expression. Myo promoter driven EGFP was exclusively expressed in the inner hair cells of the cochlea. When driven by CAG promoter, reporter gene expression was detected in inner hair cells at a dose as low as 3 107 genome copies, and continued to increase in a dose- dependent manner. Our data showed that individual expression in the cochlear cells. Our results might provide important information with regard to the role of promoters in regulating transgene expression and for the proper design of vectors for gene expression and gene therapy.
Takuya Ashitomi,Taisei Harada,Tatsuya Okada,Takashi Noguchi,Osamu Nishikata,Atsushi Ota 한국정보디스플레이학회 2017 Journal of information display Vol.18 No.4
Proposed in this study and fabricated on a glass substrate without adopting impurity doping were p-channel polycrystalline silicon (Si) thin-film transistors (TFTs) with a metal source/drain (S/D) electrode. The amorphous 50-nm-thick Si films deposited on a glass substrate via plasma-enhanced chemical vapor deposition were polycrystallized using blue laser diode annealing. Gold (Au), a highwork- function metal, was evaporated for the S/D electrode directly onto the Si channel layer. As a result of the TFT formation, the typical Id–Vg characteristics of the p-channel TFT were successfully obtained. In addition, after hydrogenation at 200°C, the drain current drastically increased. The 14 cm2/Vs effective field effect hole mobility was deduced at the drain voltage of −1V.
Yamamoto, Junya,Mori, Tatsuya,Hiramatsu, Mami,Akiyama, Yoko,Okada, Hidehiko,Hirota, Noriyuki,Matsuura, Hideki,Namba, Seitoku,Sekine, Tomokazu,Mishima, Fumihito,Nishijim, Sigehiro The Korea Institute of Applied Superconductivity a 2018 한국초전도저온공학회논문지 Vol.20 No.2
Removal of iron oxide scale from feed-water in thermal power plant can improve power generation efficiency. We have proposed a novel scale removal system utilizing High Gradient Magnetic Separation (HGMS). This system can be applied to high temperature and pressure area. We have conducted the lab-scale model experiments using ${\varphi}50mm$ filters and it demonstrated high removal efficiency in HGMS, but scale-up of the system is required toward practical use. In this study, we conducted a large scale mock-up HGMS experiment. We used the superconducting solenoidal magnet with ${\varphi}400mm$ bore and demonstrated that our HGMS system can achieve sufficient scale removal capacity that is required to introduce into both off-line and on-line system.
Low-temperature poly-Si TFTs of metal source and drain using blue-laser-diode annealing (BLDA)
Kouya Sugihara,Kiyoharu Shimoda,Tatsuya Okada,Takashi Noguchi 한국정보디스플레이학회 2017 Journal of information display Vol.18 No.4
Blue-laser-diode annealing (BLDA) in the continuous wavemodewas performed for sputtered silicon (Si) films. Polycrystalline silicon (poly-Si) thin-film transistors (TFTs) were fabricated on a glass substrate. For the source and drain formation, titanium (Ti) was evaporated to make the metal directly contact the channel Si film without adopting n+ doping. The improvement of the drain current was confirmed after hydrogen annealing at 400°C, and the typical poly-Si TFT characteristic with 50 cm2/Vs deduced effective carrier mobility was successfully observed. As the low-cost TFT fabrication without ion implantation becomes feasible, the low-temperature fabrication of poly-Si TFTs using BLDA is expected.
Yoko Akiyama,Suqin Li,Koshiro Akiyama,Tatsuya Mori,Hidehiko Okada,Noriyuki Hirota,Tsuyoshi Yamaji,Hideki Matsuura,Seitoku Namba,Tomokazu Sekine,Fumihito Mishima,Shigehiro Nishijima 한국초전도저온공학회 2021 초전도와 저온공학 Vol.23 No.3
The reduction of carbon dioxide emissions becomes a global issue, the main source of carbon dioxide emissions in the Asian region is the energy conversion sector, especially coal-fired power plants. We are working to develop technologies that will at least limit the increase in carbon dioxide emissions from the thermal power plants as one way to reduce carbon dioxide emissions. Our research aims to reduce carbon dioxide emissions by removing iron oxide scale from the feedwater system of thermal power plants using a superconducting high-gradient magnetic separation (HGMS) system, thereby reducing the loss of power generation efficiency. In this paper, the background of thermal power plants in Asia is outlined, followed by a case study of the introduction of a chemical cleaning line at an actual thermal power plant in Japan, and the possibility of introducing it into the thermal power plants in China based on the results.