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Uniformity Improvement of the Ion Implantation System for Low Temperature Poly-Silicon TFTs
Toshiharu Suzuki,Eiji Isobe,Hirohiko Murata,Kazuya Yoshida,Kouji Inada,Masateru Sato,Tatsuo Nishihara 한국물리학회 2006 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.48 No.I
Performance of the an ion-implantation system for low-temperature poly-Si TFT was improved to meet various requirements for fabrication of high-quality LCD and OLED displays. With the unique inductively coupled plasma ion source, the deviation of ion beam current density was reduced to less than 3 %; 1 over 730 × 920 mm substrate. The “mini”-uniformity in a display panel was also improved by optimizing the ion beam extraction electrodes.
Tomita, Takeo,Kim, Seung-Young,Teramoto, Kazuya,Meguro, Ayuko,Ozaki, Taro,Yoshida, Ayako,Motoyoshi, Yudai,Mori, Naoki,Ishigami, Ken,Watanabe, Hidenori,Nishiyama, Makoto,Kuzuyama, Tomohisa AMERICAN CHEMICAL SOCIETY 2017 ACS CHEMICAL BIOLOGY Vol.12 No.6
<P>The diterpene cyclase CotB2 catalyzes the cyclization of geranylgeranyl diphosphate (GGPP) to the tricyclic cyclooctat-9-en-7-ol, which is characterized by a 5-8-5-fused ring skeleton. We have previously proposed a cyclization cascade involving a unique carbon-carbon bond rearrangement combined with multiple hydride shifts, all occurring at a single active site. Here, we report the first high-resolution X-ray crystal structure of CotB2 with bound substrate analog geranylgeranyl thiodiphosphate (GGSPP). In the GGSPP-bound form, GGSPP folds into a unique S-shaped conformation that probably reflects the substrate-bound state prior to ionization of the substrate GGPP. The folded framework of GGSPP is surrounded by hydrophobic residues and several aromatic and asparagine residues that are well-positioned to stabilize a series of reactive carbocation intermediates through a combination of cation−π and dipole charge interactions. The combined crystal structures and mutagenesis-based biochemical assays provide a structural basis for exquisite control of ring formation and stereochemistry during CotB2 catalysis.</P> [FIG OMISSION]</BR>