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홍원표(W. P. Hong),최병열(B. Y. Choi),강은구(E. G. Kang),이석우(S. W. Lee),최헌종(H. Z. Choi) 대한기계학회 2009 大韓機械學會論文集A Vol.33 No.3
FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In the paper, we studied the FIB-Sputtering rate according to mold materials. And surface roughness characteristics had been analysed for micro or nano mold fabrication. Si wafer, Glassy Carbon, STAVAX and DLC that have been normally considered as good micro or nano mold materials were used in the study.
홍원표(W. P. Hong),최병열(B. Y. Choi),강은구(E. G. Kang),이석우(S. W. Lee),최헌종(H. Z. Choi) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
FIB has been commonly used as a very powerful tool in the semiconductor industry. It is mainly used for mask repair, device correction, failure analysis and IC error correction, etc. Currently, FIB is not being applied to the fabrication of the micro and nano-structured mold, because of low productivity. And also sputtering rate has been required to fabricate 3D shape. In this paper, we studied the FIB-Sputtering rate according to mold materials. As well, surface roughness characteristics were analyzed for micro and nano mold fabrication. The micro Si wafer, GC (Glassy Carbon), STAVAX, and DLC that have been normally considered as good micro or nano mold materials were used in this study. The experiment object of waveguide mold is also applied to the DLC material.
최영재(Y. J. Choi),신정훈(J. H. Shin),홍원표(W. P. Hong),이석우(S. W. Lee),최헌종(H. Z. Choi) 대한기계학회 2008 대한기계학회 춘추학술대회 Vol.2008 No.5
Dynamically changing customer demands request manufacturers to make quality products with cheaper prices and shorter delivery. To survive in the global market, the manufacturing industry of today needs to be equipped with advanced technologies including IT as well as substantial infrastructure. Under this situation, we found that collaboration is the right answer for manufacturers to survive by strengthening relations between companies instead of competing against each other. For facilitating collaboration among Korean SMEs, we performed i-Manufacturing project from 2005. Through this project, we applied IT into the conventional manufacturing industry by developing business models and collaboration systems. In this paper, we introduce collaborative production management model and system including shop floor control.