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이차범,이선규 대한기계학회 2013 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.27 No.1
Recently, in accordance with the increasing market demand for ultraprecision technology, a high precision multi-degree-of-freedom displacement measurement technology has become important for industrial applications such as the field of manufacturing and inspection because those physical quantities, linear and angular displacements, are key parameters for keeping and improving quality control of a production system. A number of instruments capable of precise multi-degree-of-freedom measurements have been built and some novel techniques have been introduced. The current state-of-art techniques for multi-degree-of-freedom motion error measurement in a linear stage using laser encoder-implemented system are reviewed. First, we summarize the basic principles behind the measurement technology of the motion error in a stage and simple encoder system. Next, the basic design principles of practical laser encoder system are discussed using the experience of past and existing cases to refer to the important points and the major scientific results. The current trends in the field are significantly discussed, including the novel techniques under construction and advanced technologies. Lastly, the future of multi-functional laser encoder-implemented system, highlighting the kinds of new science upcoming in the next few years, is discussed.
이차범,이선규,김규하 한국정밀공학회 2012 International Journal of Precision Engineering and Vol.13 No.9
An uncertainty analysis of grating interferometry in six degree-of-freedom (DOF) motion error measurements in a linear stage is presented. Six-DOF refers to the translational and rotational motion of a rigid body in a three-dimensional space. The optical measurement method and sensor were constructed and applied to the ballscrew-driven stage for validation. With a single traversal of the stage along the X direction, the optical sensor measured the motion in high resolution along each axis: less than 0.03 arcsec, 20 nm, and 0.4 nm for the rotational, Y and Z directions, and X direction, respectively. A laser interferometer and autocollimator were used for comparison. In conjunction with a performance evaluation for the proposed optical sensor, the measurement uncertainty (k=1) was estimated from the error sources, which included installation error, optics error, electronics error, environmental effects, and motion-induced error (with the exception of the driving axis). Under a given experimental condition, the environmentalerror is a major error source for the X direction, the optics error strongly affects the Y and Z directions, and environmental effects affect the three rotational directions. Furthermore, the motion error in the high precision stage is less sensitive to the measurement error, but it has to be taken into account in case of a general-purpose stage.
Sawtooth 회절 격자 가공을 위한 FAB 에칭과 다이아몬드 Scribing 방법
이차범(ChaBum Lee),주재영(JaeYoung Joo),강진호(JinHo Kang),이선규(Sun-Kyu Lee) 한국정밀공학회 2008 한국정밀공학회 학술발표대회 논문집 Vol.2008 No.11월
본 논문에서는 Fast atom beam (FAB) 에칭 방법을 이용하여 실리콘 기판위에 주기 0.6 ~ 1.5 ㎛ 를 갖는 반사형 회절광학 소자를 고전적인 스칼라 방식의 해석 방법과 벡터 방식의 해석 방법 (RCWA, Rigorous Coupled Wave Analysis)으로 높은 회절 효율을 얻기 위해 회절 격자 구조 해석을 통해서 해석된 결과와 동일하게 미세 영역에서의 가공 방법에 대한 연구를 수행하였다. 비대칭형 Sawtooth 회절 격자에 대한 광학적 특성과 구조적 특성을 미세 구조에서 TE(Transverse to Electric)와 TM(Transverse to Magnetic) 편광의 입사광이 반사되었을 때 1 차 회절 효율이 최대가 되도록 위상 매칭을 통해서 구해냈고, 그 해석 결과를 바탕으로 실리콘 기판을 일정 각도에 기울여 FAB 에칭함으로서 정밀하고, 신속하게 가공이 가능함을 보였다. 입사 파장에 비해 짧은 주기를 갖는 회절 소자는 해석 결과와 동일하게 0%의 회절 특성을 보였고, 입사 파장보다 큰 주기를 갖는 회절 소자 또한 해석 결과와 동일한 결과를 나타냈다. 코팅 기술과 함께 고효율의 회절 소자를 정확하고, 쉽게 얻어 낼 수 있음이 확인되었다. 또한 다이아몬드 공구를 이용하여 초정밀 가공으로 서브마이크로 영역의 Sawtooth 회절 격자의 가공이 가능함을 확인하였다.
돈(豚) Parakeratosis의 발생례(發生例)에 대하여
이현범,박청규,이희석,이차수,Lee, Hyun Beom,Park, Cheong Kyu,Lee, Hi Suk,Lee, Cha Soo 대한수의학회 1979 大韓獸醫學會誌 Vol.19 No.2
The authors encountered 78 cases of pig from two swine herds with severe dermatitis, which had been fed with commercial rations. Main clinical signs were hard crust formation or erythema and papules on the skin and retarted growth. The skin lesions were visible on the limb joints in all cases. In some cases, however, crusts occurred on the tail, perineum, hip, ear, back, or neck. In one case the entire body surface was covered with thick crust. No mites were detected on the microscopic examination of skin scrapings. Histological examination of biopsies skin specimens taken from the lesions revealed typical parakeratotic changes: the cornified layer of epidermis was irregularly inreased in thickness and contained numerous nuclei. The provision of dietary supplementation with zinc sulfate and soybean oil for 10 days showed marked curative effect.
박윤기,주재영,이차범,이선규 한국정밀공학회 2013 International Journal of Precision Engineering and Vol.14 No.6
This paper presents the design and fabrication of a light emitting diode-based light guide plate to realize the diffuser sheet-less applications for an indoor lighting. The diffuser sheet has been used for distributing the luminous intensity in uniform over the target n area, but it leads to light loss and production cost. Here, a diffuser sheet-less LGP with high luminous efficiency and high spatial uniformity was designed by a Monte-Carlo ray tracing method and fabricated by an ultraprecision machining. Simulation results showed that the U-groove LGP has great potential to get rid of the diffuser sheet: efficiency of 70.5% (lm/lm) and uniform luminous intensity distribution of 145 at a viewing angle (C = 0) and 120 at a viewing angle (C = 90), respectively. From the measurement results, it agreed with the simulation results. Thus, it was confirmed that the proposed LGP shows a good performance in terms of efficiency and a wide luminous intensity distribution, and a possibility to substitute for a diffuser-based illumination system.