Design and Fabrication of a MEMS-based Multi-sensor with Three Integrated Functions

은덕수,공대영,신장규,이종현,유인식 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.3

This paper presents a novel multi-sensor with three integrated functions. The multi-sensor has been designed so that the piezoresistive sensor can perceive external vibrations and the capacitive proximity sensor can perceive capacitance changes. In addition, the photodiode sensor can perceive light that has been introduced into the unit by a tamper reaction. A multi-sensor is fabricated on a silicon-on-insulator (SOI) wafer by using tetra-methyl ammonium hydroxide (TMAH) etching, a doping process, a, low-pressure chemical vapor deposition (LPCVD) process, and a micro-machining technique. If the multi-sensor is built into a single-unit system in order to perceive external tampering, the system unit may be configured to give an alarm only when more than two sensors among the three are activated. However, in the case of a mobile unit that always moves, the multi-sensor might be constructed without the piezoresistive sensor so that the proximity sensor and the photodiode sensor can perceive external tampering. Each sensor of the multi-sensor, which is formed independently on a chip, can detect different tampering from the outside. As a result, more reliable protection of the information of a system and a mobile unit can be achieved. This paper presents a novel multi-sensor with three integrated functions. The multi-sensor has been designed so that the piezoresistive sensor can perceive external vibrations and the capacitive proximity sensor can perceive capacitance changes. In addition, the photodiode sensor can perceive light that has been introduced into the unit by a tamper reaction. A multi-sensor is fabricated on a silicon-on-insulator (SOI) wafer by using tetra-methyl ammonium hydroxide (TMAH) etching, a doping process, a, low-pressure chemical vapor deposition (LPCVD) process, and a micro-machining technique. If the multi-sensor is built into a single-unit system in order to perceive external tampering, the system unit may be configured to give an alarm only when more than two sensors among the three are activated. However, in the case of a mobile unit that always moves, the multi-sensor might be constructed without the piezoresistive sensor so that the proximity sensor and the photodiode sensor can perceive external tampering. Each sensor of the multi-sensor, which is formed independently on a chip, can detect different tampering from the outside. As a result, more reliable protection of the information of a system and a mobile unit can be achieved.

방송통신기술연구원 설립방안

은덕수 한국정부학회 2012 한국정부학회 학술발표논문집 Vol.2012 No.12

지속가능한 디자인 방법론으로서 풍수(風水, Feng-Shui)이론에 대한 고찰

은덕수,최성호 한국디자인지식학회 2010 디자인지식저널 Vol.16 No.-

최근 국내에도 급변하는 환경문제에 대한 자각을 통해 국가차원에서 친환경 정책과 투자를 아끼지 않고 있다. 이러한 환경에 대한 관심은 그린디자인, 에코디자인, 지속가능한 디자인 등 다양한 양상으로 디자인 분야에도 확대되어 가고 있다. 본 연구는 디자인에 있어서 지속가능성의 개념을 토대로 공간디자인에 있어서 풍수가 가진 긍정적 측면을 다루어 보았다. 연구는 지속가능성의 개념으로부터 디자인의 연관성을 살펴보고, 지속가능디자인의 프로세스와 한계점, 그리고 풍수가 가진 지속가능성의 개념을 밝히어, 공간디자인 측면에있어서 풍수의 역할과 가치를조명하여 결론에 이르고 있다. 연구의 결과를 요약하면, 디자인에 있어서 지속가능성은 궁극적으로 모두에게 이 세계가 존재하는 방식 자체를 함께 고민하고 해결을 위해 동참할 때에야 지속가능한 환경 조성이 가능할 수 있다는 것을 알 수 있었고, 모두의 시각과 인식의 전환이 필요하다는 것으로 나타났다. 풍수는 이러한 상황에서 우리 사회구성원의 사고체계의 변화를 유도할 수 있으며, 공간디자인의 측면에서 풍수의 개념은 인간-공간-환경 측면에서 유익한 방법론으로 제시될 수 있음을밝혔다.

도시경관 개선을 위한 옥외광고물 가이드라인에 관한 연구 - 인천광역시를 중심으로 -

은덕수,최성호 한국디자인지식학회 2009 디자인지식저널 Vol.12 No.-

서울과 인천 등 대도시와 지방자치단체는 도시경관의 개선 차원에서 옥외광고물의 종합적인 관리와 개선방안을 제시하고 있다. 그러나 공공디자인기본계획 내용에 포함된 옥외광고물가이드라인은 법령에 의한 옥외광고물 관리체계의 틀을 응용하여 해당지역을 세분화하고 규제정도를 달리 적용하는 방법을 취하는 수준에서 크게 벗어나지 않는다. 본 연구는 옥외광고물가이드라인의 정의와 목표 등 개념적 논의와 함께 국내 및 국외 가이드라인의 기능과 역할에 대한 평가와 분석을 통하여, 공공디자인 기본계획에서 다루고 있는 가이드라인의 내용과 활용방안에 대해서 종합적으로 점검하고자하였다. 정보체계로서 옥외광고물가이드라인은 옥외광고물과 공공시각매체를 도시정보체계의 통합적 차원에서 문제를 파악하고 접근해야 하며, 가이드라인의 이용주체인 시민, 공무원, 관련업체, 공공디자인전문가에 의해 다양한 방식으로 원활하게 활용될 수 있어야 한다. 또한 옥외광고물가이드라인은 디자인가이드라인으로서 구체적 계획과 표현에 대한 부분을 포함해야 하며, 도시경관특성을 종합적으로 감안해야 한다. 가이드라인 제시 외에도 교육과 홍보, 사업지원 등 다양한 방식의 접근이 필요하며, 중장기적인 관점에서 단계별 목표와 실행계획을 가지고 추진해야 함을 결론으로 제시하였다.

Photoresist Spray Coating for Resist Film Performance of Deep Silicon Cavities

은덕수,석창길,Chang-Taeg Seo,Do-Wok Kim,유인식,이종현,배영호 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.50 No.6

In this paper, we describe a new method for resist performance with a photoresist spray coating system. The system consists of a high-temperature rotational chuck, an ultrasonic spray nozzle module, an angle control module, and a nozzle moving module. The spray coating system utilizes several parameters, including solid content, dispensed volume, the scanning speed of the spray nozzle, and the wafer dimensions. In order to prepare samples for photoresist spray coating, the process starts with a thermal oxidation at a thickness of 1000 \AA. Silicon oxide is used as a masking layer for anisotropic wet etching, 50 $\mu$m and 100 $\mu$m in depth. Photoresist spray coating consumes much less photoresist than conventional spin coating, and the resist uniformity of the deep cavities is more efficient.

Micro-Biochemical Reactor with Integrated Pt Heater/Sensor: Fabrication and Analysis

은덕수,이장현,공성호,최평,신장규,이종현 한국물리학회 2007 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.50 No.3

In this paper, two different types of micro-biochemical reactors, one on a silicon substrate and the other on a glass substrate, which are encapsulated by an upside down glass wafer that contains a cavity, are proposed. The reactors were fabricated by micro-blasting, wet etching, and polymer bonding. The main objective of this research was to develop a micro-biochemical reactor that could achieve rapid thermal cycling and real-time temperature measurements without calibration and that would consume less power. Steady-state temperature-distribution simulations for the two kinds of chambers, a glass-silicon bonded chip and glass-glass bonded chip, were carried out using finite element analyse (FEA). The temperature uniformity and gradient, regarding the effects of the Pt heater inside each chamber, were investigated. The results clearly demonstrated the effectiveness of glass in blocking the dissipation of heat to the substrate. The power consumption of the two kinds of chambers, glass-silicon bonded chip and glass-glass bonded chip, were measured and compared to that of a conventional chip. In particular, the power consumption of the glass-silicon bonded chip was reduced by 39 \%, 33 \%, and 31 \% for annealing (55 $^\circ$C), extension (72 $^\circ$C), and denaturation (94 $^\circ$C), respectively. These results show that the micro-biochemical reactor, realized by using a glass-glass bonded chip can perform real-time temperature sensing without calibration and rapid thermal cycling while using less power.

Fabrication of a Micro-filter Using Porous layer on Type-(110) Silicon

은덕수,정종현,공대영,신장규,이종현 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.55 No.3

This paper outlines the fabrication of a micro-filter by using a porous layer that could be made with an anode reaction of (110) silicon to expand the width of the pores and to decrease the width of the walls. The channeling effect that (110) silicon can produce may structurally improve porosity. The anodic-reaction solution was a mixture of 10 wt% HF. After an anode reaction, a (110)-silicon sample was divided into top and bottom in order to produce porous layers. The porous layer was divided into an anodic oxidation film and a minute porous layer: the top consisted of a vertical layer while the bottom had a horizontal layer. The porous layer on the bottom was filled with minute pores in a macro pore, the wall, and the minute porous layer was divided by anodic oxide film. The sample was immersed in a 10-wt% NaOH solution for approximately 20 seconds. In order to reduce the damage to the porous layers, we etched the backside of the substrate using reactive ion etching (RIE). The micro-filter was produced, and an inlet for the supply of specimens to the filter was made of silicon hose as well as polydimethylsiloxane (PDMS). The micro-filter may likely be applicable to Lab-on-a-chip systems and micro total analysis systems that can analyze materials to be reacted and measured. This paper outlines the fabrication of a micro-filter by using a porous layer that could be made with an anode reaction of (110) silicon to expand the width of the pores and to decrease the width of the walls. The channeling effect that (110) silicon can produce may structurally improve porosity. The anodic-reaction solution was a mixture of 10 wt% HF. After an anode reaction, a (110)-silicon sample was divided into top and bottom in order to produce porous layers. The porous layer was divided into an anodic oxidation film and a minute porous layer: the top consisted of a vertical layer while the bottom had a horizontal layer. The porous layer on the bottom was filled with minute pores in a macro pore, the wall, and the minute porous layer was divided by anodic oxide film. The sample was immersed in a 10-wt% NaOH solution for approximately 20 seconds. In order to reduce the damage to the porous layers, we etched the backside of the substrate using reactive ion etching (RIE). The micro-filter was produced, and an inlet for the supply of specimens to the filter was made of silicon hose as well as polydimethylsiloxane (PDMS). The micro-filter may likely be applicable to Lab-on-a-chip systems and micro total analysis systems that can analyze materials to be reacted and measured.

Fabrication of 3-Dimensional Coaxial Cable for RF-MEMS Application

은덕수,Jang-Hyun Lee,이종현,공성호,김영민 한국물리학회 2004 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.45 No.3

This paper presents the fabrication of a 3-dimensional coaxial cable with a thick oxidized porous silicon (OPS) for RF-MEMS application. The structure was fabricated by hydro uoric acid, nitric acid, acetic acid (HNA) etching, followed by OPS processing, electroplating and photoresist (PR) re ow. The fabricated devices are expected to improve the characteristics of insertion loss and transmission line dispersion. The return loss of Cu coaxial cable on OPS layer is -35.73 dB at 13 GHz and the insertion loss of Cu coaxial cable on OPS layer is -0.17 dB at 5.5 GHz. Therefore, the fabricated devices are expected to improve the characteristics of insertion loss and transmission-line dispersion. Furthermore, the cable can possibly be used as a micro-size coaxial cable.

풍수(風水, Feng-Shui)이론의 주거공간디자인 적용방법에 관한 분석연구

은덕수 한국공공디자인학회 2006 공공디자인학연구 Vol.1 No.2

공공디자인측면의 전광표지(VMS/ITS)디자인 개선 방향

은덕수 한국디자인리서치학회 2018 한국디자인리서치 Vol.3 No.3

VMS(Variable Message Sign) is a function of ITS(Intelligent Transport System) that provides real-time traffic information to users to facilitate traffic flow. However, the operational status of the current VMS and ITS operations does not provide excessive amounts of information in terms of information design, or increase reading time or provide efficient guidance due to unclear information boundaries. The current VMS design requires a more efficient information design support system, which creates visual discomfort by applying only the colors highlighted by the relevant regulations, and uses inconsistent or unnecessary words for writing style, keyboard, and message composition and alignment. In the view of VMS-related studies, focusing on statistical technologies on the improvement of visibility and legibility of Information elements according to user characteristics, this study sought to improve the public character of information and facility design by approaching the VMS from a Public Design perspective. This study analyzed current conditions and problems based on the research perspectives of preceding studies, presented the direction of improvement of the perceptual efficiency of the VMS from the information hierarchy, and developed a detailed approach to urban public design and facilities environment. The improvement direction presented as the result of the study was to secure verification and objectivity of the research contents by conducting a deep-seated expert interview. As a result, the total amount of information on road signs should be reduced by omitting phrases within the range of communication and using the highlighted colors within two colors in order to reduce the total amount of information. Depending on the importance of the presentation information, improvement in information hierarchy is necessary to apply different sizes of letters, words, lines, and columns, and to different colors. Further, detailed Public Design Guideline needs to be developed, including measures to integrate with national identity and other facilities. 전광표지 또는 도로전광표지로 불리는 VMS(Variable Message Sign)는 지능형교통시스템(ITS;Intelligent Transport System)의 기능구현 요소로 실시간 교통정보를 이용자에게 제공하여 원활한 교통흐름을 유도하는 기능을 가진다. 그러나 현재 운영되는 VMS와 ITS의 운영현황은 정보디자인 측면에서 과다한 정보량을 제공하거나, 정보위계가 불분명하여 판독시간을 늘리거나 효율적인 안내가 이루어지지 못한다. VMS 관련규정으로 인하여 강조색채만 적용되고 있어서 시각적 불편함을 유발하고, 서체와 자간, 메시지 구성방식과 정렬방식에도 일관성이 부족하거나 불필요한 단어가 사용되어, 보다 효율적인 정보디자인 지원체계가 필요한 상황이다. 관련연구들의 관점이 이용자의 특성에 따른 정보표출 요소들에 대한 판독과 시인성에 향상에 관한 모형이나 운영에 관한 통계적 기술에 집중되어, 본 연구는 전광표지를 공공디자인 측면에서 접근하여 정보와 시설디자인의 공공성과 기능적 향상을 도모하고자 하였다. 형태심리학측면에서 도로전광표지 정보디자인의 현황과 문제점을 분석하여, 정보지각 효율을 높이기 위한 정보량 축소관점과 정보위계를 구현한 예시사례를 제안하였으며, 도시공공디자인으로의 정체성과 시설환경 측면의 조화를 유도하기 위해 구체적인 공공디자인지침 개발방향을 제안하였다. 제시된 디자인사례를 포함한 개선방향에 대해 전문가심층인터뷰를 실시하여 연구내용에 대한 검증과 객관성을 확보하고자 하였다. 그 결과, 도로전광표지는 정보총량을 줄이기 위하여 소통가능 범위 내 에서 문구를 생략하고 강조 색채를 2색 이내 사용하는 등 정보총량을 줄이는 것이 우선되어야 하며, 표출정보의 중요도에 따라 문자와 단어/행/열의 크기를 달리하고 색상을 구분해서 적용하는 정보위계 개선이 필요하다. 또한 도로변 경관과 공공시설물로의 디자인 접근이 필요하여 지역 정체성과 기타시설물과의 통합 및 관계개선을 위한 방안이 포함된, 구체적인 공공디자인설계에 관한 유형별 상세 지침 개발이 필요하다.