전자빔 리소그래피를 이용한 주사기법에 따른 패턴형상 조정

오세규,김승재,김동환,박근,장동영,Oh, Se-Kyu,Kim, Seoung-Jae,Kim, Dong-Hwan,Park, Keun,Jang, Dong-Young 한국생산제조학회 2009 한국생산제조학회지 Vol.25 No.2

To aim at obtaining a correct and fine small pattern by an electron beam lithography several conditions and methods affecting a real pattern shape needs to be investigated. A micro/nano sized pattern shape is sometimes dependent on the scanning method. In this work, four types of scanning methods are implemented and their characteristics are investigated. For a $11\times11um$ pattern, a Zigzag scanning method proves a precise pattern generation. The other ways such as SEM scanning and swirl in-out scanning method result in some distorted pattern shape. It is proved that abrupt change in the pattern generation limits to obtaining a fine and small pattern.

전자빔 리소그래피에서의 근접효과 보정을 이용한 패턴 제작에 관한 연구

오세규,김동환,김승재,Oh, Se-Kyu,Kim, Dong-Hwan,Kim, Seung-Jae 한국반도체디스플레이기술학회 2009 반도체디스플레이기술학회지 Vol.8 No.2

This study describes the electron beam lithography pattern fabrication using the proximity effect correction. When electron beam exposes into electron beam resist, the beam tends to spread inside the substance (forward scattering). And the electron beam reflected from substrate spreads again (back scattering). These two effects influence to distribution of the energy and give rise to a proximity effect while a small pattern is generated. In this article, an electron energy distribution is modeled using Gaussian shaped beam distribution and those parameters in the model are computed to solidify the model. The proximity effect is analyzed through simulations and appropriate corrections to reducing the proximity effect are suggested. It is found that the proximate effect can be reduced by adopting schemes of dose adjustment, and the optimal dose is determined through simulations. The proposed corrected proximity effect correction is proved by experiments.

전자빔 리소그래피를 이용한 주사기법에 따른 패턴형상 조정

오세규(Se Kyu Oh),김승재(Seoung Jae Kim),김동환(Dong Hwan Kim),박근(Keun Park),장동영(Dong Young Jang) 한국생산제조학회 2009 한국생산제조학회지 Vol.18 No.6

SEM 에서 2 차 전자 신호의 주파수 분석을 통한 필터 설계

정광오(Kwang Oh Jeong),김승재(Seung Jae Kim),오세규(Se Kyu Oh),김동환(Dong Hwan Kim) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.11

In scanning electron microscope (SEM), secondary electrons emitted from the specimen are converted to electrical signal. This signal needs to be amplified and converted into digital signal by AD converter. Amplifying the signal will be accompanied by undesirable noise signal which is also amplified, which deteriorates the image quality. If the frequency analysis between secondary electron signal and noise signal will be implemented, a corresponding software processing or a filter design will be beneficial to reducing noise. In this article, frequency analysis and filter design are introduced, resulting in enhanced SEM image quality.

3 점을 이용한 이동 무대의 S 곡선 경로 설계

정광오(Kwang oh Jung),오세규(Se Kyu Oh),김동환(Dong Hwan Kim) 대한기계학회 2011 大韓機械學會論文集A Vol.35 No.1

이동 무대의 곡선 주행에 있어서 정확한 곡선경로와 양쪽 바퀴의 속도프로파일이 필요하다. 본 논문에서 이동을 할 3 점의 위치 정보를 이용하여 곡선경로 생성하는 방법을 제안 한다. 설계된 곡선경로와 속도 프로파일을 이용하여 이동무대의 궤적을 시뮬레이션 하였고 이에 따라 결과와 3 점의 위치 정보와 비교하여 곡선 경로와 바퀴 속도 프로파일을 보정하는 방법을 제안하였다. 이동무대 하드웨어를 구현 후 곡선 주행실험을 하였고 설계된 곡선경로와 이동무대의 실제궤적을 비교 분석 하였다. An exact curved path has to be fixed and velocity profile for travelling on the curved path is required by a moving stage. In this study, we decide the curved path on the basis of the information on three point locations. The path of the moving stage is traced by simulating the designed curve path and the velocity profile, and the results are compared with the given three points to determine how closely the moving stage follows the given path. Further, we propose a method to calibrate a curved path and velocity profile. The proposed moving paths were evaluated by performing experiments. Finally, the designed curved path and the actual path were compared.

3점을 이용한 이동 무대의 S 곡선 경로 설계

정광오(Kwang oh Jung),오세규(Se Kyu Oh),김동환(Dong Hwan Kim) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.6

이동 무대의 곡선 주행에 있어서 정확한 곡선경로와 양쪽 바퀴의 속도프로파일이 필요하다. 본 논문에서 이동을 할 3 점의 위치 정보를 이용하여 곡선경로 생성하는 방법을 제안 한다. 설계된 곡선경로와 속도 프로파일을 이용하여 이동무대의 궤적을 시물레이션 하였고 이에 따라 결과와 3 점의 위치 정보와 비교하여 곡선 경로와 바퀴 속도 프로파일을 보정하는 방법을 제안하였다. 이동무대 하드웨어를 구현 후 곡선 주행 실험을 하였고 설계된 곡선경로와 이동무대의 실제궤적을 비교 분석하였다. Moving stage needs exact curve path and velocity profile of both wheels in order to drive the curve. This work proposes how to design a curve path by three point location information. The trace of moving stage is simulated by designed curve path and velocity profile. Accordingly, results are compared with the three point location information. And work proposes how to calibrate a curve path and velocity profile. The moving stage hardware was implemented and proved by experiments. Also, designed curve path and the robot of actual trajectory were analyzed.

집속 전자 빔 장치에서 스캔 주파수에 따른 실시간 디지털 필터 설계에 관한 연구

김승재(Seung Jae Kim),오세규(Se Kyu Oh),양경선(Kyung Sun Yang),정광오(Kwang Oh Jung),김동환(Dong Hwan Kim) 대한기계학회 2011 大韓機械學會論文集A Vol.35 No.5

열 전자 방출 형 전자 빔 장치에서 영상을 획득하기 위해서는 텅스텐 필라멘트에서 발생한 전자빔을 스캔 할 장치가 필요하다. 이때, 스캔 되는 주파수에 따라서 시료 표면에서 튀어 나오는 2차 전자신호에 대하여 잡음 성분의 발생이 다르게 나타난다. 본 연구에서는 잡음 성분 제거를 위한 필터설계를 위해서 2 차 전자신호에 대한 실시간 주파수 분석을 통해 신호와 잡음 성분을 구분했다. 그리고 부동 소수점 연산이 가능한 DSP 에서 디지털 필터 설계를 통하여 신호대비 잡음 성분 제거를 통하여 고배율로 획득한 전자현미경의 영상의 질을 향상 시켰다. To acquire images in a thermionic-scanning electron-beam system, a scanning unit is needed to control the electron beam emitted from the tungsten filament source. In scanning the electron beam on the solid surface, the signalto-noise ratio depends on the scanning frequency. We used a digital filter to reduce noise by analyzing the real-time frequency of a secondary electron signal. The noise and the true image signal were well separated. We designed the digital filter via a DSP floating-point operation, and the noise elimination resulted in enhanced image quality in a highresolution mode.

집속 전자빔 장치에서 스캔 주파수에 따른 실시간 디지털 필터 설계에 관한 연구

김승재(Seung Jae Kim),오세규(Kyu Se Oh),양경선(Kyung Sun Yang),정광오(Kwang Oh Jung),김동환(Dong Hwan Kim) 대한기계학회 2010 대한기계학회 춘추학술대회 Vol.2010 No.6

열 전자 방출형 전자빔 장치에서 영상을 획득하기 위해서는 소스원에서 발생한 전자빔을 조사할 장치가 필요하다. 이때, 조사되는 주파수에 따라서 시료 표면에서 튀어 나오는 2 차 전자신호대비 잡음 성분의 발생이 다르게 나타난다. 잡음 성분 최소를 위한 필터 설계를 위해서 2 차 전자신호에 대한 실시간 주파수 분석을 통해 신호와 잡음 성분을 구분했고, 부동 소수점 연산이 가능한 DSP 에서 디지털 필터를 설계 하였다. 본 논문에서는 신호대비 잡음 성분 제거에 따른 높은 해상도로 획득한 영상의 질을 향상 시킬 수 있었다. In order to acquire the image in thermionic scanning electron beam system, the scanning unit is need to control the electron probe emitted from source. When scanning the electron beam on the solid surface, the signal to noise ratio responses differently to the scanning frequency. With the filter design contributing to reducing noise, noise and signal were well separated by real time frequency analysis of secondary electron signal. Digital filter was designed by the DSP floating point operation. In this paper, elimination of signal to noise ratio resulted in improving the image quality in high resolution image mode.

주거 공간의 유비쿼터스 기술 적용에 관한 연구

한승훈(Han Seung-Hoon),오세규(Oh Se-Kyu) 한국태양에너지학회 2007 한국태양에너지학회 논문집 Vol.27 No.4

It is essential to investigate the structure and the main characteristic of Home USN (Ubiquitous Sensor Network) technologies in built ubiquitous environment while designing future residential space. For this study, three different housing types have been selected to implement ubiquitous technologies for residential space; those are regular, elderly, and single residence units. It is certain that efficiency of ubiquitous home design is improved if main components of each specific housing type are analyzed precisely in digital way and design models are prepared accordingly. Ubiquitous technology, in conclusion, has to be applied not only with systematical mechanism or electronic setting but in human-centered atmosphere as well, keeping with deep consideration for bio-housing service factors in eco-friendly surrounding; we call this Ubiquitous Humanism.

한국피아노교수법학회논문집 : 협동학습 모형을 적용한 활동중심의 음악수업 지도방안

김우식 ( Woo Shik Kim ),오세규 ( Se Kyu Oh ) 한국피아노교수법학회 2011 음악교수법연구 Vol.7 No.-

본 연구의 목적은 초등 음악수업이 이루어지는 교실 현장에서 쉽게 활용할 수 있으며 최근 들어 그 효용성과 효과성이 입증되고 있는 협동학습의 모형을 이론적인 근거로 하여 제7차 초등학교 음악과 교육과정의 지도내용을 중심으로 개정되는 정신을 반영, 각 모형별로 활용 가능한 예시적 지도안을 구안하여 활동중심으로 구성되어야 하는 음악교육이 현장에서 내실 있게 이루어지기 위한 대안을 마련해보고자 의도된 것이다. 그리하여 본 연구에서는 교과서 제재곡에 대하여, 음악교육에 적용 가능한 협동학습 모형을 제시하고 2008년 4월 28일~6월 28일 (9주)에 걸쳐 5학년 학생들을 대상으로 협동학습 모형을 적용하여 음악수업을 실시하였다. 협동학습을 수업에 적용해본 결과 여러 가지 교육적 장점이 있음을 확인할 수 있었다. Spreading rapidly as a new method for teaching-learning, cooperation learning recently is taking firm root as an alternative to invigorate the area of teaching-learning. Most of all, the reason why cooperation learning is attracting is that it draws students’ interest and is effective for their performance at school, and in addition, it is achieving a variety of educational achievements including improvements in skills for social interactions. In today’s schools, a variety of instructional approaches is required to help all students accomplish educational goals. The object of music education is for students to individually develop their inborn musical talents and creativity, express emotion and thoughts withheld through various musical activities, and furthermore improve the quality of life and become a well-rounded person that is not narrow-minded in any specific specialty. However class in schools consists of an overcrowded class with a teacher centered deliverance of textbook knowledge that take up most of the time and lessons made of an individual and competitive learning structure. Schools are supposed to teach skills including ability to think, communication ability and responsibility for problem-solving, so that students would adopt themselves in a society. Cooperative learning is therefore the most appropriate method to teach such skills. Cooperative learning is a successful teaching strategy in which small teams, each with students of different levels of ability, use a variety of learning activities to improve their understanding of a subject. Each member of a team is responsible not only for learning what is taught but also for helping teammates learn, thus creating an atmosphere of achievement. Students work through the assignment until all group members successfully understand and complete it., So cooperative learning techniques can promote student learning and academic achievement, increase student retention, enhance student satisfaction with their learning experience, help students develop skills in oral communication, develop students’ social skills, promote student self-esteem, and help to promote positive race relations. Although there is no cooperative learning model designed specifically for music subject, it was necessary to apply cooperative learning model for effective music class. Accordingly, this study analyzed the relation between activity-centered music chapters for 5th graders and cooperative learning model. Furthmore, based on the characteristics of the existing cooperative learning model, teaching plans that can be applied for music class are presented as follows: Jigsaw Ⅰ; Group Investigation(GI); Cooperative Learning for Cooperation(Co-op Co-op); Student Teams Achievement Division(STAD); Team Games Tournaments(TGT); Learning Together(LT); Teams Assisted Individualization(TAI); and Illustrative Class Model with cooperative learning structure by Kagan. As a result, it is revealed that cooperative learning in music enables to increase self-esteem and self-discipline for study and establish favorable friendship among students in the course of class learning. The teacher’s role is the most important part for success the ‘Cooperative Learning’ on music. Teachers should know the exact model and design of ‘Cooperative Learning’ so they may guide the students to participate and have positive attitude on music. This study suggests how to take ‘Cooperative Learning’ on music class by searching activity-centered music chapters and it’s model. It is wishful that the application of cooperation learning in the fields of music education would be more activated so that the expected goals of music education could be achieved. And, I believe that the on going study about the new application should be continued to achieve a better class.