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기계적으로 연마한 GaN 분말로부터 열처리 분위기를 달리한 $\beta$-$Ga_2$$O_3 나노벨트 및 나노입자의 합성
김병철,선규태,박광수,임기주,노태용,남산,성만영,김상식,Kim, Byung-Cheul,Sun, Kyu-Tae,Park, Kwang-Soo,Im, Ki-Joo,Noh, Tae-Yong,Nahm, Sahn,Sung, Man-Young,Kim, Sang-Sig 한국전기전자재료학회 2001 전기전자재료학회논문지 Vol.14 No.12
$\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles were synthesized from mechanically ground GaN powders with thermal annealing in a nitrogen atmosphere and an oxygen atmosphere, respectively. The study of field emission scanning electron microscopy (FESEM) on the microstructures of nanomaterials revealed that the nanobelts synthesized in the nitrogen atmosphere are with the range of 20~1000nm width and 10 ~100nm thickness, and that nanomaterials are nanoparticles with 20~50nm radius obtained by thermal annealing in an oxygen atmosphere. The crystal structure of the $\beta$-Ga$_2$O$_3$ nanobelts and nanoparticles was in this study investigated by X-ray diffractometer (XRD) and high-resolution transmission electron microscope (HRTEM). The formation processes of the nanobelts and nanoparticles will be discussed in this paper.