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저압공정 중 발생하는 나노입자 실시간 측정장비에 관한 연구
나정길,조대근,최재붕,김영진,김태성,Na, Jeong-Gil,Cho, Dae-Geun,Choi, Jae-Boong,Kim, Young-Gin,Kim, Tae-Sung 한국진공학회 2007 Applied Science and Convergence Technology Vol.16 No.6
본 논문에서는 저압환경에서 실시간으로 나노입자를 측정할 수 있는 PBMS(Particle Beam Mass Spectrometer)의 개발에 대해 서술하였다. 개발된 PBMS의 교정을 위해 NaCl입자를 사용하였다. DMA(Differential Mobility Analyzer)를 통해 +1가로 하전된입자를 1 lpm 발생시켜 그 중 0.086 lpm을 PBMS 입구의 오리피스를 통해 분기하여 유입시켰다. DMA와 PBMS의 전류값을 비교하여 전송효율을 측정한 결과 입자의 크기에 따라 약 50$\sim$60%를 나타내었다. 또한 DMA에서 특정한 크기의 입자를 발생시켜 PBMS로 측정하였으며 그 결과는 입자크기별 농도분포와 잘 일치함을 확인할 수 있었다. In this paper, we discussed about the development of the PBMS(Particle Beam Mass Spectrometer) that can measure the nanoparticles on real-time in low-pressure processes. To calibrate this equipment, a DMA(Differential Mobility Analyzer) was used to generate NaCl particles which are charged to +1. Total aerosols flow rate was 1 lpm and 0.086 lpm of that was introduced into the PBMS through the pressure-reducing critical orifice. Transport efficiency through PBMS was 50$\sim$60 % compared to particle current for DMA and PBMS according to the particle size. Results of mesurements are in good agreement with size distributions obtained by DMA.
ISPM 및 PBMS를 이용한 BPSG 및 PSG CVD 공정 중발생하는 오염입자의 실시간 측정
나정길 한국입자에어로졸학회 2010 Particle and Aerosol Research Vol.6 No.3
In this study, we investigated the particle formation during the deposition of borophosphosilicate glass (BPSG) and phosphosilicate glass (PSG) films in thermal chemical vapor deposition reactor using in-situ particle monitor (ISPM)and particle beam mass spectrometer (PBMS) which installed in the reactor exhaust line. The particle current and number count are monitored at set-up, stabilize, deposition, purge and pumping process step in real-time. The particle number distribution at stabilize step was measured using PBMS and compared with SEM image data. The PBMS and SEM analysis data shows the 110 nm and 80 nm of mode diameter for BPSG and PSG process, respectively.
나정길 ( Jeong Gil Nah ) 한국신종교학회 2007 신종교연구 Vol.16 No.-
This study pronouncement has ``Daejonggyo`` and ``Cheonbugyeong``, but the space is too broad and difficult to study. So, I am going to study of only the contents of ``Cheongbugyeong`` from their birth(about 9,000 year ago). The contents of Cheonbugyeong has the greatest and longest tradition in Korean nations but only 81 letter provided for scripture. 6,000 year period that ``Baedal nation period`` disclosed the ``Nokdo letter`` for the first letter of the human beings. After 4,000 years past, they were recorded by ``Jeon Seo`` at the time of Dangun era. After the end of Silla Age, ``Go-un(Chi-won Choe) reformed those letters. In the ``Dangi-3230th``(AD 897: Jeonsa) Hyogong King of the Silla 1st year(Balhae Gyeongwang 28th year) carved this letters on the rock-wall of the Myohyang Mountain. In 1917, they sent those letters to ``Daejonggyo`` which was forming under the name of ``Dangun-gyo``. From this time, it become a valuable real public scripture. In accordance with legend and tradition, there were translated letters prepared by ``Yeon-su Gye`` in 1899. In the viewing of this facts, we are considering it must be taken into the study for important data. In addition to this, there were explanation for ``Cheonbugyeong`` in the ``analysis records of spiritual philosophy`` written by Jeon Byung-hoon(1857-1927) in 1919. At the same time, Explanation records for ``Cheonbugyeong`` were also provided by Kim Tack-young(1850-1927). In this respect, it is our very important problem to review more records in order to illustrating about true facts. ``Daejonggyo`` took long time to understand the ``Cheongbugyeong`` as scripture. And publically accepted it in June, 1975 under the decision which provided by religion meeting of the ``Daejonggyo`` platform and it has come to be continued upto this date. It is our main subject to find out true and correct explanation for the ``Cheonbugyeong`` beyond of limitation throughout our study and review.