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유도결합 플라즈마에 의해 식각된 PZT 박막의 식각 Damage 개선
강명구,김경태,김창일 한국전기전자재료학회 2001 전기전자재료학회논문지 Vol.14 No.7
In this work, the recovery of etching damage in the etched PZT thin film with $O_2$ annealing has been studied. The PZT thin films were etched as a function of Cl$_2$/Ar and additive CF$_4$ into Cl$_2$(80%) /Ar(20%). the etch rates of PZT thin films were 1600$\AA$/min at Cl$_2$(80%)/Ar(20%) and 1970 $\AA$/min at 30% additive Cf$_4$ into Cl$_2$(80%)/Ar(20%). In order to recover the characteristics of etched PZT thin films, the etched PZT thin films were annealed in $O_2$ atmosphere at various temperatures. From the hysteresis curves, ferroelectrical properties are improved by $O_2$ annealing process. The improvement of ferroelectric behavior is consistent with the increase of the (100) and (200) PZT phase revealed by x-ray diffraction (XRD). From x-ray photoelectron spectroscopy (XPS) analysis, intensities of Pb-O, Zr-O and Ti-O peak increase and the chemical residue peak is reduced by $O_2$ annealing. From the atomic force microscopy (AFM) images. it shows that the surface morphology of re-annealed PZT thin films after etching is improved.
DFB 레이저 다이오드를 위한 홀로그래픽 시스템을 이용한 회절격자 제작
강명구,오환술 대한전자공학회 1996 전자공학회논문지-A Vol.33 No.6
Periodic gratings for 1.55$\mu$m distributed feedback laser diode (DFB LD) have been fabricated by a holographic interference exposure system using an etalon stabilized Ar ion laser. We obtain a good development condition at developer concentration of 65% and obtain etching rate of 1000$\AA$/min at 20.deg. C by the mixed solution HBr:HNO$_{3}$:H$_{2}$O(1:1:10 in volume ratio). We obtain good first order grating with period of 2400${\AA}[\pm}2{\AA}$ at etching time of 45 sec from grating period and diffraction efficiency measurement, and SEM observation of grating fabricated on InP substrate.
해양레저스포츠시설로서 마리나 개발에 따른 지역주민의 기대감, 사회신뢰 및 공동체의식
강명구,김우성 한국스포츠사회학회 2013 한국스포츠사회학회지 Vol.26 No.3
The research was to explore local community and residents' expectation, social trust and consciousness according to marina development as the marine leisure sports facilities. For this purpose, research has been carried out targeting local residents of Jeongok port located in Jeongok-ri, Seosin-myeon, Hwaseong-si, Gyeonggi-do where the Marina development was in progress. Research was conducted as participant observation during April-September in 2012, and in-depth interviews were carried out from September 1st to 9th. Participant observation was used for community and residents' consciousness and for the in-depth interviews, area and classification analysis were taken after 1-2 times individual interviews of 11 participants selected for the study by the aid of informants who resides in Jeongok port. Area analysis and classification analysis were taken as data analysis. The result can be summarized as follows. First, the concepts of the formation in social capital, improvement of local image and revitalization of the regional economic were derived by expectation of analysing local residents' expectation, social trust and consciousness by exploring the change of community according to marina development as the marine leisure sports facilities. Second, by social trust of local resident according to marina development, conflict in interests between fisherman and marina users, demanding to civil service employees due to the dissatisfaction of local residents and distress of civil service employees by illegal acts of marina users have been identified. Third, as community spirit of local resident according to marina development, the concepts of social capital formation, sense of belonging and mutual influence changes in consciousness were drown up. 본 연구는 해양레저스포츠시설로서 마리나 개발을 통해 변화된 지역사회와 지역주민의 기대감, 사회신뢰, 공동체의식을 고찰하기 위하여 경기도 화성시 서신면 전곡항 마리나 개발 지역을 연구지역으로 설정하였다. 연구방법은 2012년 4월부터 9월까지 참여관찰을 실시하였고 9월 1일부터 9일까지 심층면담에 의해 자료를 수집하였다. 참여관찰은 마리나 개발에 따른 지역사회와 지역주민의 의식을 관찰하였고 심층면담은 전곡항에 거주하는 제보자의 도움을 받아 11명의 연구참여자를 선정하여 개인별 1-2회 면담을 실시하였다. 자료분석은 영역분석과 분류분석을 실시하였다. 내용을 요약하면 다음과 같다. 첫째, 해양레저스포츠시설로서 마리나 개발에 따른 지역사회 변화의 탐색에서 도출된 지역주민의 기대감, 사회신뢰, 공동체의식을 분석한 결과 기대감에서는 사회간접자본형성, 지역이미지 개선, 지역 경제 활성화 등의 개념이 도출되었다. 둘째, 마리나 개발에 따른 지역주민의 사회신뢰에서는 어민과 마리나 이용자 간의 갈등, 지역주민의 불만족 해결을 위한 바람, 마리나 이용자의 불법행위에 대한 공무종사자의 고충 등의 개념이 도출되었다. 셋째, 마리나 개발에 따른 지역주민의 공동체의식에서는 사회자본형성, 소속감 및 상호영향의식 등의 개념이 도출되었다.