초정밀 스테이지의 반복정밀도 분석 및 보정 = Analysis and compensation of Repeatability for Ultra-precision Stage

다국어 초록 (Multilingual Abstract)

The refractive index of the laser interferometer is compensated using the simultaneously measured variations of room temperature and humidity in the method. In order to investigate the limit of compensation, the stationary test against two fixed reflectors mounted on the zerodur plate is performed firstly. From the experiment, it is confirmed that the measuring error of the laser interferometer can be improved from 0.12㎛ to 0.17㎛ by the application of the method. Secondly, for the verification of the compensating effect, it is applied to estimate the positioning accuracy of an ultra precision aerostatic stage. Two times of the refractive index compensation are performed to acquire the positioning error of the stage from the initially measured data, that is, to the initially measured positioning error and to the measured positioning error profile after the NC compensation. Although the positioning error of anaerostatic stage cannot be clarified perfectly, it is known that by the compensation method, the measuring error by the laser interferometer can be improved to within 0.15μm. English abstract here.

목차 (Table of Contents)

• ABSTRACT
• 1. 서론
• 2. 실험장치의 구성
• 3. 초정밀 스테이지 반복정밀도 분석
• 4. 레이저간섭계의 측정오차 보정
• 5. 굴절률 보정에 의한 반복정밀도
• 6. 결론
• 참고문헌