Rapid Thermal Annealing Treatment of Electroplated Cu Films

Hanseung Lee,Dukryel Kwon,Hyunah Park,Hyoun Woo Kim,Chongmu Lee,Jaegab Lee 한국물리학회 2003 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.43 No.51

Cu seed layers for copper electroplating were deposited by magnetron sputtering on silicon wafers using TaN as diusion barriers between the seed layer and silicon. The Cu seed layer was cleaned with a H2 plasma prior to electroplating the copper lm, and the eects of the H2 plasma pretreatment were investigated. After thin copper lms were grown by electrodeposition on the copper seed layers which had been cleaned with the H2 plasma, they were then subjected to i) vacuum annealing, ii) rapid thermal annealing (RTA) and iii) rapid thermal nitriding (RTN) at various temperatures over dierent periods of time. X-ray diraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), and resistivity measurements were done to ascertain the optimum heat treatment conditions for obtaining lms with minimum resistivity and with smooth, predominantly (111)-oriented surfaces. The as-deposited lm had a resistivity of 6.3 -cm and a relatively small intensity ratio of the (111) to the (200) peak. With heat treatment, the resistivity decreased and the (111) peak became dominant. In addition, the surface smoothness of the copper lm was improved. The optimal condition (with a resistivity of 1.98 -cm) is suggested to be rapid thermal nitriding at 400 C.

정적연소기내 Hythane의 연소 및 배출 가스 특성에 관한 실험적 연구

이한승(Hanseung Lee),이성욱(Seangwock Lee),문성은(Seungeun Moon),김성대(Sungdae Kim),이영철(Youngchul Lee),조용석(Yongseok Cho),백두성(Doosung Baik),김창기(Changgi Kim) 한국자동차공학회 2009 한국자동차공학회 학술대회 및 전시회 Vol.2009 No.11

Finding an alternative fuel and solving the environmental pollution are the main targets for the future internal combustion engines. Hythane(Hydrogen-Methane) as a fuel is now considered as one of the alternative fuels due to its low pollutant emissions and high burning rate. An experimental study was carried out to obtain the fundamental data about the combustion and emission characteristics of pre-mixed hydrogen and methane in a Constant Volume Chamber(CVC) with various fractions of hydrogen?methane blends. A pre-mixed chamber was used to obtain a good mixture of the above gas. Exhaust emissions were measured using Horiba exhaust gas analyzer, for various fraction of hydrogen?methane blends. The results showed that the rapid combustion duration was shortened and rate of heat release increases as hydrogen fraction in fuel blends ratio was increased. Moreover, the maximum mean gas temperature and the maximum rate of pressure rises also increases. These phenomena were attributed to the burning velocity which increases exponentially with the increase of hydrogen fraction in fuel blends. Exhaust HC and CO2 concentration decreased while NOx emission increased with the increase of the hydrogen fraction in fuel blends. The knowledge from this experiment will facilitate the application of hydrogen along with Methane as a fuel to the current fossil hydrocarbon based economy and for the strict emission regulations in internal combustion engines.

A 16-bit adiabatic macro blocks with supply clock generator for micro-power RISC datapath

Hanseung Lee,Inho Na,Chanho Lee,Yong Moon 대한전자공학회 2002 ITC-CSCC :International Technical Conference on Ci Vol.2002 No.7

Isolation Circuits Based on Metamaterial Transmission Lines for Multiplexers

Hanseung Lee,Tatsuo Itoh 한국전자파학회JEES 2013 Journal of Electromagnetic Engineering and Science Vol.13 No.3

Multiplexers based on isolation circuits made of metamaterial lines are proposed and studied. The new approach provides unique advantageous features beneficial to system designer. For instance, there is no need to modify the filters used in multiplexers. Also, the design process is straightforward. In this paper, two types of multiplexers based on metamaterial isolation circuits are presented, and their operation concepts are explained. Also, theories and design process of isolation circuits are presented to help readers design and fabricate proposed multiplexers. For verifying the concepts, two types of triplexers and two types of quadruplexers are designed and fabricated. All filters used in the multiplexers are commercial surface acoustic wave filters. The measured results are well matched with the simulation results.

Chloride-Binding Capacity of Portland Cement Paste Blended with Synthesized CA₂ (CaO·2Al₂O₃)

Lee, Yunsu,Kim, Mingyun,Chen, Zhengxin,Lee, Hanseung,Lim, Seungmin Hindawi Publishing Corporation 2018 Advances In Materials Science And Engineering Vol.2018 No.1

<P>A chloride-binding capacity is the major factor to mitigate the ingress of chloride into concrete. This paper presents the chloride-binding capacity of Portland cement paste containing synthesized CA2 (CaO·2Al2O3). The CA2 was synthesized in the high-temperature furnace and characterized by X-ray diffraction for inspecting the purity. The synthesized CA2 was substituted for Portland cement by 0%, 5%, and 10% by weight, and the NaCl solution was used as an internal chloride, which is assumed as a total chloride. The chloride-binding capacity of cement paste was calculated from a water-soluble chloride extraction method by the application of the Langmuir isotherm equation. And the hydration products were analyzed using X-ray diffraction and thermogravimetric analysis. We demonstrate that the CA2 increases an AFm phase in the Portland cement system, and the incorporation of CA2 consequently enhances the chloride-binding capacity of cement paste samples.</P>

자율 주차 시스템의 직각 주차를 위한 조향 제어 알고리즘

이한승(Hanseung Lee),김동욱(Dongwook Kim),이경수(Kyongsu Yi) 한국자동차공학회 2011 한국자동차공학회 부문종합 학술대회 Vol.2011 No.5

This paper describes a steering control algorithm of autonomous parking vehicle for perpendicular parking. The proposed control algorithm consists of a desired path generation, a path tracking controller and steering angle decision. The desired path is generated by consisting of arcs and lines when starting point and target point are given. A path tracking controller is designed based on linear quadratic optimal control method using 2 DOF bicycle model. The path tracking controller determines a front steering angle in order to track the desired path determined by the path generation algorithm while vehicle moves forward to approach to parking space. Parking space and updated target point is defined by using sonar sensors when vehicle approaches to parking space. Steering control algorithm calculates a front steering angle in order to enter parking space backward and determines feedback steering angle when collision is predicted by sonar sensor data. The performance of proposed control algorithm has been verified using computer simulations.

한계 선회 가속시 스티어링 복원성 원리 분석과 보상 로직 개발

이한승(Hanseung Lee),정대석(Daesuk Jung),이재길(Jaekil Lee) 한국자동차공학회 2017 한국자동차공학회 학술대회 및 전시회 Vol.2017 No.11

This paper describes steering returnability by analyzing forces applied to kingpin axis in limit cornering condition. The steering returnability is related to force applied to kingpin axis. These forces could be classified by its source: Tire force and Steering force. The tire force is the force generated from tire such as longitudinal, lateral, vertical force, and self-aligning torque. The steering force consists of friction force and assist force. These forces are vectorized by suspension geometry and calculated with respect to kingpin axis. The simulation results are correlated with measurement data and verifies that steering returnability is formulated by tire forces and steering forces. This study proposes new steering control logic at limit driving condition This logic is verified by simulation model to check performance and confirmed in various test conditions for robustness..

수동변속기 구동계 클렁크 연구

이한승(Hanseung Lee),이창호(Changho Lee),이정근(Jungkeun Rhee) 한국자동차공학회 2013 한국자동차공학회 학술대회 및 전시회 Vol.2013 No.11

Nowadays, high efficient and low emission vehicle was developed due to the depletion of petroleum resources and solving the environmental pollution in the automotive industry. In addition to that, the quiet and comfortable vehicle has developed for deflecting customers concerns about NVH(noise, vibration, harshness). Shuffle mode is one of the common phenomena of the vehicle driveline NVH. Also, the vehicle shuffle can influence driveline clunk with manual transmission. The aim of this study is to reduce driveline clunk with the several influence factors. The moment of inertia of flywheel, gear ratios and characteristics of clutch disc are the key influencing parameters for driveline shuffle and clunk. In this paper, torsional vibration of driveline system has been simulated using AMESim program and experimented in a front wheel drive, manual transmission vehicle. The simulation result was compared with the test data. Based on the above simulation and test results, the optimal driveline system could be determined with robust NVH performance enablers when integrated into vehicle in early design stage of the vehicle.

애커만 경향이 차량 핸들링 성능에 미치는 영향 고찰

이한승(Hanseung Lee),김종민(Jongmin Kim),박수보(Soobo Park) 한국자동차공학회 2014 한국자동차공학회 학술대회 및 전시회 Vol.2014 No.11

This paper descries design parameters of Ackerman steering geometry influencing on vehicle handling performances. It is assumed that the Ackerman steering geometry should be designed by considering tire characteristics especially regarding lateral force and these design parameters are related to a performance limit, response, and traceability. The test design plan consists of three conditions: turning concentric circle test, step steer test, and double lane changes. These test conditions follow ISO or test standard of Hyundai Motor Company. The influence of the proposed assumption has been verified by using computer simulation.

Folded Reflectarray를 이용한 고이득 94 ㎓ 모노펄스 안테나

이한승(Hanseung Lee),채희덕(Heeduck Chae),전종훈(Jonghoon Chun),남상욱(Sangwook Nam) 한국전자파학회 2008 한국전자파학회논문지 Vol.19 No.1

본 논문은 94 ㎓를 중심 주파수로 하며, 모노펄스 형식의 추적 레이다 시스템에 사용되는 folded reflectarray 안테나를 제안한다. 추적 레이다는 대부분 목표물로부터 반사되어 돌아온 반사 신호들을 비교하여 목표물을 찾으며, 모노펄스 형식에서는 이러한 신호들의 비교를 동시에 수행한다. 본 논문에서 제안한 모노펄스 형식의 folded reflectarray 안테나는 polarizing grid, reflectarray, 다중 모드 feed horn, 그리고 도파관으로 제작된 comparator로 이루어져 있다. 제작된 안테나는 다중 모드 feed horn과 comparator의 모노펄스 급전부에 의해 sum 모드, azimuth 모드, 그리고 elevation 모드, 이렇게 세 개의 방사 패턴 형식을 나타낼 수 있다. 측정 결과, sum 패턴에서는 36 ㏈, azimuth 패턴에서는 33.5 ㏈, 그리고 elevation 패턴에서는 27.2 ㏈의 이득을 확인할 수 있었다. This paper proposes a high-gain monopulse antenna using the folded reflectarray for a monopulse target-tracking radar systems designed at the center frequency of 94 ㎓. In target-tracking radar systems, the angle of arrival of the incoming wave is determined by comparing the signal received on two or more non-coincident antenna patterns. This is the physical basis of most target-tracking techniques and the comparison is made simultaneously in a monopulse radar systems. In this paper, the antenna consists of polarizing grid, reflectarray, multimode feed horn, and comparator implemented by waveguide. The antenna is able to have three radiation patterns by using the monopulse feed systems assembled by multimode feed horn and comparator. The antenna demonstrates maximum gains 36 ㏈, 33.5 ㏈ and 27.2 ㏈ at sum mode, azimuth mode, and elevation mode respectively.