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홍진수(Chinsoo Hong),김창교(Chang-Kyo Kim),이병욱(Byoung-Wook Lee),이명래(Myoung-Rae Lee) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.4
The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-Wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this limited one a LGP with nanometer-patterned grating is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. On the basis of simulation results the LGP with nanometer-patterned grating is fabricated and its optical properties such as angular intensity distribution and CIE color coordinates are characterized. The angles of transmitted light are nearly the same as the results expected from the generalized Snell"s law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened grating shows the enhancement of transmitted intensity distribution up to 4.9 times.
홍진수(ChinSoo Hong),김창교(Chang-Kyo Kim),이병욱(Byoung-Wook Lee),김경래(Kyoung-Rae Kim) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.6
The LGP with nanometer structures resulted in enhancement of optical efficiency. Its fundamental mechanism is to recycle the polarized light via one round-trip through QWP(Quarter-wave Plate) but the maximum efficiency to reach with this method is limited up to 2. To get the larger efficiency than this a LGP with 1D PC( one-dimensional photonic crystal) nanometer-patterned on its top and bottom surfaces is suggested. For its optimum design the computer simulation is performed and suggests a grating that the spatial frequency between adjacent patterns is 500nm, its height 250nm, duty cycle 50%, and its cross section is rectangular. The angles of transmitted light are nearly the same as the results expected from the generalized Snell’s law. Thus the Mathematica code, developed in this experiment, will be applied to designing the optimized LGP. The LGP with nanometer-patterened 1D PC LGP on its both surfces shows the enhancement of transmitted intensity distribution up to 5.7 times.
전처리공정이알루미늄얌극산화법에의해제조된규칙적인나노급미세기공의형성에미치는영향
이재홍,이병욱,김창교,홍진수,Lee Jae-Hong,Lee Byung-Wook,Kim ChangKyo,Hong Chinsoo 대한전기학회 2005 전기학회논문지C Vol.54 No.6
Nano-sizedporearrayswerepreparedbytheself-organizationprocessesoftheanodicoxidationusingthealuminumplatewith99.999$\%$purity.Sincethealuminumplatehasaroughsurface,thealuminumplateof1mmthicknesswasanodizedafterthepre-treatmentsofpressing,mechanicalpolishing,thermaloxidation,chemicalpolishing,andelectrochemicalpolishing.Thediameterofthenano-sizedporesandthethicknessofbarrierlayercanbecontrolledbyappliedvoltage.Thethicknessofaluminamembranecanalsobecontrolledbytheanodizingcurrent.Thenano-sizedporeswithdiameterof60$\~$120nm,thedistancebetweenthenearestporesof30$\~$60nm,andthethicknessof6$\~$7Wwereobtainedbytheanodicoxidationprocess.Theporewideningprocesswasemployedforobtainingtheone-channelwithflatsurfacebecausetheporesofthealuminamembranepreparedbythefixedvoltagemethodshowsthestructureoftwo-channelwithroughsurface.
김창교(Kim Chang Kyo),홍진수(Hong Chinsoo),이의식(Lee Eui Sik),박성훈(Park Sung Hoon) 한국산학기술학회 2005 한국산학기술학회 학술대회 Vol.- No.-
나노미터 크기의 임의형상 패턴을 형성하기 위해서 새로운 프리어 변환 리소그래피법을 개발하였다. 나노미터급 리소그래피에서 자외선과 엑스레이 같은 전자기파가 나노미터 크기로 형상을 새긴 마스크 위에 조사되면 회절현상이 발생하여 불명확한 패턴을 얻게 된다. 극자외선을 사용하지 않고도 상대적으로 긴 파장의 레이저빔을 특수하게 제작된 마스크를 통해 볼록렌즈에 조사할 경우에 프리어 평면이라 알려진 평면위에 나노미터 크기의 패턴을 형성할 수 있다는 것을 증명하였다. 이 방법은 매우 단순한 장치로 구성할 수 있다는 장점을 가질 수 있다.
나노 임프린트 리소그래피법에 의한 나노미터급 원기둥 패턴을 갖는 도광판의 제작 공정 개발
이병욱(Byoung-Wook Lee),홍진수(Chinsoo Hong),김창교(Chang Kyo Kim) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.4
PMMA light guiding plate with nano pattern was fabricated by nano imprint lithography method. A silicon mold for electroplating of nickel was fabricated by conventional photolithography process. A nickel stamp for nano imprint lithography was fabricated by electroplating process using silicon mold. The nano imprint lithography was performed on PMMA plate at 140℃ under pressure of 20kN. The nano pattern on PMMA plate was investigated using FE-SEM. It is shown that the patterns were well transferred for several steps and the nano imprint lithography method could be applied for fabricating patterns of light guiding plate.
AAO 나노기공을 나노 임프린트 리소그래피의 형틀로 이용한 PMMA 나노패턴 형성 기술
이병욱(Byoung-Wook Lee),홍진수(Chinsoo Hong),김창교(Chang Kyo Kim) 제어로봇시스템학회 2008 제어·로봇·시스템학회 논문지 Vol.14 No.5
PMMA light guiding plate with nano-sized pattern was fabricated using anodized aluminum oxide membrane as a template for nano imprint lithography. Nano-sized pore arrays were prepared by the self-organization processes of the anodic oxidation using the aluminum plate with 99.999% purity. Since the aluminum plate has a rough surface, the aluminum plate with thickness of 1mm was anodized after the pre-treatments of chemical polishing, and electrochemical polishing. The surface morphology of the alumina obtained by the first anodization process was controlled by the concentration of electrochemical solution during the first anodization. The surface morphology of the alumina was also changed according to temperature of the solution during chemical polishing performed after first anodization. The pore widening process was employed for obtaining the one-channel with flat surface and height of the channel because the pores of the alumina membrane prepared by the fixed voltage method shows the structure of two-channel with rough surface. It is shown from SPM results that the nano-sized pattern on PMMA light guiding plate fabricated by nano imprint lithography method was well transferred from that of anodized aluminum oxide template.
PMMA 기판 위에 형성된 나노미터크기의 회절격자 패턴의 도광판에의 응용해석
정재훈(Jae-Hoon Chung),김경래(Kyung-Rae Kim),신원진(Won-Jin Shin),홍진수(Chinsoo Hong),이병욱(Byoung-Wook Lee),이태성(Tae-Sung Lee),이종하(Jong-Ha Lee),이근우(Keun-Woo Lee),김창교(Chang-Kyo Kim) 대한전기학회 2007 대한전기학회 학술대회 논문집 Vol.2007 No.11
나노미터 크기의 회절격자 패턴이 형성된 도광판을 설계하기 위한 전산모사를 수행한다. 광원은 LED 4개를 사용하였으며 PMMA 도광판 재질의 파장에 따른 빛의 흡수 현상을 고려하였다. 도광판 위치에 따른 투과광선의 세기 분포, 투과광선의 투과각도 분포 및 편광에 따라 투과광선의 세기가 어떻게 달라지는지 살펴보았다.
정재훈(Jae-Hoon Chung),김웅기(Ung-Kie Kim),김경래(Kyung-Rae Kim),홍진수(Chinsoo Hong),이병욱(Byoung-Wook Lee),이종하(Jong-Ha Lee),이태성(Tae-Sung Lee),이근우(Keun-Woo Lee),김창교(Chang-Kyo Kim) 대한전기학회 2007 대한전기학회 학술대회 논문집 Vol.2007 No.11
나노미터 크기의 동심원 패턴이 형성된 도광판을 설계하기 위한 전산모사를 수행한다. 광원은 LED 1개를 사용하였으며 PMMA 도광판 재질의 파장에 따른 빛의 흡수 현상을 고려하였다. 도광판 위치에 따른 투과광선의 세기 분포, 투과광선의 투과각도 분포 및 편광에 따라 투과광선의 세기가 어떻게 달라지는지 살펴보았다.