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RISS 인기검색어
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- 저자 : 하성도(Sungdo Ha) (검색결과 37 건)
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하성도(Sungdo Ha) Korean Society for Precision Engineering 1996 한국정밀공학회지 Vol.13 No.3
In off-line process optimization, process parameters are controlled such that the process is robust against changes in equipment conditions and incoming materials. The off-line methods, however, are not effective when the changes are so large that process parameters need to be adjusted. On-line control can respond to such large changes, but process uniformity has not been controlled on-line due to the difficulties in modeling. This paper is aimed at developing a new on-line control methodology where the uniformity is controlled effectively. The process variability is categorized based on the physical considerations, and the process parameters are classified considering their effects on the categorized process variabilities. On-line control is performed with the properly selected process parameters so that robustness may not be degraded. The developed methodology is applied to the single wafer plasma etching processes, which resulted in both higher within-a-wafer uniformity and compensation of the incoming material non-uniformity.
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하성도(Sungdo Ha),김경환(Kyunghwan Kim),송용억(Yong-Ak Song),박태권(Taekwon Park),김창희(Changhee Kim) Korean Society for Precision Engineering 1998 한국정밀공학회지 Vol.15 No.12
LOM (Laminated Object Manufacturing) process is one of rapid prototyping processes, where shapes are formed by accumulating cross sections of laser-cut paper. The process expects wide popularity since it is simple and the material is familiar to conventional mockup makers. However the dimensional accuracy of LOM parts is not so good as that of traditional wooden mockups, since the stack of adhesive-spread papers causes significant dimensional error. Also it is unclear how the other unknown environmental effects cause the errors as well. In this work the dimensional errors of LOM parts are measured and analysed. Experiments with test parts were performed in order to see the effects of part shape, moist, and sealer on dimensional variations. The characteristic of the paper is also analysed. Re-heating LOM parts, which is shown to have the effect of recovering dimensional changes, is applied to an example part.
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