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산화제 및 연마제 첨가를 통한 Nickel CMP 특성 개선 연구
최권우,김남훈,서용진,이우선,Choi, Gwon-Woo,Kim, Nam-Hoon,Seo, Yong-Jin,Lee, Woo-Sun 한국전기전자재료학회 2005 전기전자재료학회논문지 Vol.18 No.7
Chemical mechanical polishing (CMP) of Ni was performed by the various ratios of four kinds of oxidizers and an addition of alumina powders as an abrasive in each slurry with the different oxidizers. Moreover, the interaction between the Ni and the each oxidizer was discussed by potentiodynamic polarization measurement, in order to compare the effects of Ni-CMP and electrochemical characteristics on the Ni with the different oxidizers. As an experimental result, the removal rate of Ni reached a maximum at 1 $vol\%$ of $H_2O_2$. Also the removal rates of Ni increased with the audition of alumina abrasives in each slurry. The potentiodynamic polarization of Ni under dynamic condition showed a significant difference in electrochemical behavior by addition of $H_2O_2$ in solutions. Ni showed the perfect passivation behavior in solution without $H_2O_2$ under potentiodynamic polarization condition, while active dissolution dominates in solution with the addition of $H_2O_2$. The results indicate that the surface chemistry and electrochemical characteristics of Ni play an important role in controlling the polishing behavior of Ni.
최권우,김남훈,서용진,이우선,Choi, Gwon-Woo,Kim, Nam-Hoon,Seo, Yong-Jin,Lee, Woo-Sun 한국전기전자재료학회 2005 전기전자재료학회논문지 Vol.18 No.4
Chemical mechanical polishing(CMP) performances can be optimized by several process parameters such as equipment and consumables (pad, backing film and slurry). Pad properties are important in determining removal rate and planarization ability of a CMP process. It is investigated the performance of oxide CMP process using commercial silica slurry after the pad conditioning temperature was varied. Conditioning process with the high temperature made the slurry be unrestricted to flow and be hold, which made the removal rate of oxide film increase. The pad became softer and flexible as the conditioning temperature increases. Then the softer pad provided the better surface planarity of oxide film without defect.
최권우,이우선,서용진 한국물리학회 2009 THE JOURNAL OF THE KOREAN PHYSICAL SOCIETY Vol.54 No.4
The interface between the electrodes and the organic layers in organic light emitting diodes (OLEDs) has been reported as playing an important role in influencing their electrical and lumi- nescent properties. Indium tin oxide (ITO) is commonly used as the anode material. The ITO thin film has been deposited on glass substrate by radio-frequency (RF) magnetron sputtering and it has been used as an anode contact to fabricate an OLED device. The OLED devices with an ITO/MEH-PPV/Al configuration were fabricated by using both thermal evaporation and spin coat- ing. We investigated the electrical, structural and optical properties of the ITO thin lm by using an atomic force microscope, a field-emission scanning electron microscope and an ultraviolet-visible spectrophotometer. The interface property between ITO thin film and MEH-PPV were improved as the surface of the ITO thin film become smoothes and photoluminescence intensity was increased in the 680 nm range. The interface between the electrodes and the organic layers in organic light emitting diodes (OLEDs) has been reported as playing an important role in influencing their electrical and lumi- nescent properties. Indium tin oxide (ITO) is commonly used as the anode material. The ITO thin film has been deposited on glass substrate by radio-frequency (RF) magnetron sputtering and it has been used as an anode contact to fabricate an OLED device. The OLED devices with an ITO/MEH-PPV/Al configuration were fabricated by using both thermal evaporation and spin coat- ing. We investigated the electrical, structural and optical properties of the ITO thin lm by using an atomic force microscope, a field-emission scanning electron microscope and an ultraviolet-visible spectrophotometer. The interface property between ITO thin film and MEH-PPV were improved as the surface of the ITO thin film become smoothes and photoluminescence intensity was increased in the 680 nm range.
최권우 ( Kwon Woo-Choi ),노지훈 ( Ji-hun Noh ),손현욱 ( Hyun-uk Son ),김민수 ( Min-su Kim ) 한국정보처리학회 2021 한국정보처리학회 학술대회논문집 Vol.28 No.2
대형마트 혹은 일반 마트에서 물건을 구매할 때 지금까지 얼마치의 물건을 담았는지 소비자들은 알기 어렵다. 그리고 여러 사람들이 많은 물건을 한 번에 구매하기 때문에 계산대에서 길게 늘어진 줄을 보고 최대한 사람이 적은 곳을 찾은 경험은 다들 있을 것이다. 그러한 점에서 최근 조금씩 늘어나는 무인 계산대에서 아이디어를 얻어 쇼핑을 할 때 끌고 다니는 카트에서 계산과정을 처리해 계산시간을 줄이고자 했다. 그러하여 카트에서 물건을 인식할 수 있어야 하며 인식한 물건의 가격 및 정보 등을 저장하고 있어야한다. 그래서 카트에 바코드를 인식할 수 있는 리더기와 가격정보를 보여주는 스크린을 설치하였으며 계산대에 가서 저장했던 정보를 한 번에 처리기위해 QR 코드를 사용하였다. 스크린에 QR 코드를 띄우고 계산대에서 QR 코드를 찍으면 가격정보를 알 수 있고 그 자리에서 계산까지 가능하며 원하는 소비자는 본인의 휴대폰에 설치된 가계부에서도 QR 코드를 찍어서 구매한 물건들의 가격과 자세한 구매목록을 쉽게 저장할 수 있다. 기존 가계부에서는 구매목록을 하나하나 적어야 하기 때문에 귀찮을 수 있지만 이러한 방법을 통하면 기존방식보다 훨씬 편리할 것이라 생각했다.
최권우(Kwon-Woo CHOI),김기주(Kee-Joo KIM) 대한기계학회 2021 대한기계학회 춘추학술대회 Vol.2021 No.06
수많은 모바일 로봇들은 특정 장애물, 험한 지형으로 인하여 진입을 못 하거나 목표지점에 도착하는 데 드는 시간이 오래 걸리는 로봇들이 많다. 보스턴 다이나믹스에서 개발한 Sand Flea은 4개의 바퀴를 달고 연소식 피스톤을 장착하여 지상으로 피스톤을 발사해 최고 점프 높이는 30ft(9.14m)입니다. Sand Flea 로봇의 무게는 5kg에 달하며 크기는 330mm x 457mm x 152mm이다. 저는 Sand Flea보다 더 작고 무게가 가벼우며 새로운 공압 액추에이터를 갖춘 이륜 점프 로봇을 연구 중이다. 무게와 크기를 줄인 만큼 로봇의 내구성을 높이기 위해 설계 중이며, 공압 액추에이터의 크기도 작게 만들어 설계 및 해석 중이다. 크기가 작은 공압 액추에이터를 사용했음에도 로봇의 최고 점프 높이 목표는 33ft(10m)이며, 이륜 점프 로봇의 최고 목표 무게는 2.5kg이다. 로봇이 점프하여 지상으로 추락 시 바퀴와 바디에 심한 충격으로 인하여 내부 구조가 부서질 수 있으므로 여러 구조를 설계하고 해석을 통해 여러 모델들과 충격 강도, 굽힘강도를 비교하였다. Many mobile robots are unable to enter due to specific obstacles and rough terrain, or many robots take a long time to reach the target point. The Sand Flea, developed by Boston Dynamics, has four wheels and a combustion piston that fires the piston to the ground, with a maximum jump height of 30ft (9.14m). The Sand Flea robot weighs 5kg and measures 330mm x 457mm x 152mm. I am working on a two-wheeled jump robot that is smaller and lighter than Sand Flea and has a new pneumatic actuator. It is being designed to increase the durability of the robot by reducing its weight and size, and designing and analyzing the size of the pneumatic actuator by making it smaller. Despite the use of a small-sized pneumatic actuator, the robot's maximum jump height is 33ft (10m), and the two-wheeled jump robot's maximum target weight is 2.5kg. When the robot jumps and falls to the ground, the internal structure may be broken due to severe impact on the wheel and body, so various structures were designed and analyzed to compare impact strength and bending strength with various models.