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이의복,박영욱,황인성,김선중,차정호,이호준,이종흔,주병권,Lee, Eui-Bok,Park, Young-Wook,Hwang, In-Sung,Kim, Sun-Jung,Cha, Jun-Gho,Lee, Ho-Jun,Lee, Jong-Heun,Ju, Byeong-Kwon 한국전기전자학회 2009 전기전자학회논문지 Vol.13 No.4
본 연구에서는 졸겔법으로 ZnO, 수열합성법으로 $SnO_2$ 나노분말을 제조하고 이들 나노분말에 Pd, Ru 등의 촉매를 첨가하였다. MEMS 기술로 제작된 히터 및 전극 구조 위에 나노 감지 분말을 도포하여 CO and $NO_2$ 가스 센서를 제작하였다. 0.1 wt% Pd 도핑된 $SnO_2$ 가스센서와 Ru 도핑된 ZnO 가스 센서는 각각 CO 30 ppm, $NO_2$ 1 ppm의 낮은 농도에서도 높은 감지 특성을 보였다. In this study, nanopower ZnO and $SnO_2$ as sensing materials were prepared by hydrazine and hydrothermal routes, respectively, and were doped with Pd, Ru catalyst. The CO and $NO_2$ sensors were fabricated by coating of sensing materials on the MEMS-based structure with electrodes and heaters. The 0.1 wt% Pd doped $SnO_2$ sensor and Ru doped ZnO sensor showed the high sensor response to CO 30 ppm and $NO_2$ 1 ppm, respectively. The sensor signal was stable. This can be used for the detection of pollutant gases emitted from gasoline engine.
박정호,이의복,주병권,Park, Jung-Ho,Lee, Eui-Bok,Lau, Vincent,Ju, Byeong-Kwon 한국전기전자재료학회 2011 전기전자재료학회논문지 Vol.24 No.8
An engine oil sensor based on multiwall carbon nanotubes was fabricated with screen printing method. Since carbon nanotubes are generally intertwined, dispersion of the carbon nanotubes in the binding agent (ethyl cellulose, a-terpineol, frit) is a key factor for large yield of engine oil sensor. By conventional dispersion method, a hand-mill method, the maximum yield was 80% at most. However, we used the hand ultrasonic, in order to increase the yield of the sensors. As a results, our engine oil sensor fabricated by the screen printing method shows excellent yield rate of 97%, when we dispersed a paste by the hand ultrasonic method.