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레이저 직접묘화법을 이용한 미세패턴 전도성 향상에 관한 연구
이봉구(Bong-Gu Lee) 한국산학기술학회 2017 한국산학기술학회논문지 Vol.18 No.5
본 논문에서는 레이저 유도증착 공정을 사용하여 절연기판위에 미세패턴의 전도성 향상시켰다. 기존의 레이저 유도증착의 공정에서 발생하는 높은 레이저빔 에너지로 인하여, 미세패턴의 낮은 증착밀도, 산화와 같은 문제점이 있다. 이러한 문제점을 폴리머 코팅층을 사용하여 증착정밀도와 전도성 향상하였다. 실리콘 웨이퍼 위에 미세패턴 증착을 위해서 크롬, 구리를 사용하였다. 본 연구에서는 다중펄스 방식의 레이저 빔을 금속박막에 조사하여 절연기판(insulating substrate: SiO₂) 위에 시드 층을 형성하고, 형성된 시드 층위에 무전해 도금을 적용하여 미세패턴 및 구조물을 제작하는 복합공정기술을 개발하였다. 레이저빔의 다중 스캔방식으로 조사함으로서 레이저빔의 에너지가 증착 층의 증착밀도와 표면품위를 향상시키고, 미세전극 패턴으로 사용가능한 전기 전도성을 갖게 되었음 알 수 있었다. 레이저 직접묘화법과 무전해 도금을 적용한 복합공정을 이용하여 미세전극을 증착 한 후 비저항을 측정한 결과 도금 전 저항이 6.4Ω, 도금 후의 저항이 2.6Ω으로 미세전극패턴의 표면조직이 균일하고 증착되었다. 표면조직이 균일하고 치밀하게 증착되었기 때문에 전기 전도도가 약 3배정도 향상되었다. In this paper, the conductivity of the fine pattern is improved in the insulating substrate by laser-induced forward transfer (LIFT) process. The high laser beam energy generated in conventional laser induced deposition processes induces problems such as low deposition density and oxidation of micro-patterns. These problems were improved by using a polymer coating layer for improved deposition accuracy and conductivity. Chromium and copper were used to deposit micro-patterns on silicon wafers. A multi-pulse laser beam was irradiated on a metal thin film to form a seed layer on an insulating substrate(SiO2) and electroless plating was applied on the seed layer to form a micro-pattern and structure. Irradiating the laser beam with multiple scanning method revealed that the energy of the laser beam improved the deposition density and the surface quality of the deposition layer and that the electric conductivity can be used as the microelectrode pattern. Measuring the resistivity after depositing the microelectrode by using the laser direct drawing method and electroless plating indicated that the resistivity of the microelectrode pattern was 6.4Ω, the resistance after plating was 2.6Ω, and the surface texture of the microelectrode pattern was uniformly deposited. Because the surface texture was uniform and densely deposited, the electrical conductivity was improved about three fold.
무전해 니켈 도금을 이용한 절연기판상의 미세전도성 패턴 제조
이봉구 ( Bong Gu Lee ),문준희 ( Jun Hee Moon ) 대한금속·재료학회 2010 대한금속·재료학회지 Vol.48 No.1
Micro-conductive patterns were microfabricated on an insulating substrate (SiO2) surface by a selective electroless nickel plating process in order to investigate the formation of seed layers. To fabricate micro-conductive patterns, a thin layer of metal (Cu.Cr) was deposited in the desired micropattern using laser-induced forward transfer (LIFT). and above this layer, a second layer was plated by selective electroless plating. The LIFT process. which was carried out in multi-scan mode, was used to fabricate micro-conductive patterns via electroless nickel plating. This method helps to improve the deposition process for forming seed patterns on the insulating substrate surface and the electrical conductivity of the resulting patterns. This study analyzes the effect of seed pattern formation by LIFT and key parameters in electroless nickel plating during micro-conductive pattern fabrication. The effects of the process variables on the cross-sectional shape and surface quality of the deposited patterns are examined using field emission scanning electron microscopy (FE-SEM) and an optical microscope.
A study on automation of modal analysis of a spindle system of machine tools using ANSYS
Bong-Gu Lee(이봉구),Jin-Woo Choi(최진우) 한국산학기술학회 2015 한국산학기술학회논문지 Vol.16 No.4
본 연구에서는 범용 유한요소해석 소프트웨어인 ANSYS를 사용하여 공작기계 스핀들 시스템의 유한요소 해석 자동 화를 위해서 해석 모델을 개발하고, 그것을 툴로 구현하였다. 그 구현을 위해 EXCEL의 VBA를 사용하였으며, 이로 인해서 사용자가 툴과 상호교류할 수 있도록 그래픽 인터페이스를 개발할 수 있었고, 데이터 정렬을 위해서 EXCEL의 spreadsheet를 사용할 수 있었다. ANSYS 언어를 사용하여 코드를 개발하였으며, 이는 인터페이스에 입력된 정보를 사용하여 형상 모델을 만들고, 순차적으로 해석 모델을 만들며, 마지막으로 유한요소해석 연산을 수행한다. 모델 생성과 해석의 자동화는 최소한의 시간과 노력으로 설계 중인 스핀들 시스템의 근사 최적 설계를 발견하도록 도울 수 있을 것이다. An analytical model was developed in this study and then implemented into a tool for automation of FEA (Finite Element Analysis) of a spindle system for natural frequencies and modes in the universal FEA software, ANSYS. VBA of EXCEL was used for the implementation. It allowed graphic user interfaces (GUIs) to be developed for a user to interact with the tool and, in addition, an EXCEL spreadsheet to be used for data arrangement. A code was developed in the language of ANSYS to generate the geometric model of the spindle system, sequentially to construct the analytical model based on the information in the GUIs, and finally to perform computation for the FEA. Its automation of the model generation and analysis can help to identify a near optimal design of the spindle system under design in minimum time and efforts.
오성모,이봉구,O, Seong-Mo,Lee, Bong-Gu 대한기계학회 2000 大韓機械學會論文集A Vol.24 No.10
In contacting between surface, there is wear and the generation of wear particles. The particles contained in the lubricating oil carry detailed and important information about the condition monitoring of the machine. Therefore, This paper was undertaken for Ferrography system of wear debris generated from lubricated moving machine surface. The lubricating wear test was performed under different experimental conditions using the Falex wear test of Pin and V-Block type by Ti(C,N) coated. It was shown from the test results that wear particle concentration(WPC) ; wear severity Index(IS) and size\distribution have come out all the higher value by increases sliding friction time. By the Ferrogram a thin leaf wear debris as well as ball and plate type wear particles was observed.