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- 저자 : 서준기 ( Joonki Suh ) (검색결과 3 건)
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Tellurium 기반 휘발성 문턱 스위칭 및 고집적 메모리용 선택소자 응용 연구
김승환,김창환,허남욱,서준기,Seunghwan Kim,Changhwan Kim,Namwook Hur,Joonki Suh 한국전기전자재료학회 2023 전기전자재료학회논문지 Vol.36 No.6
High-density crossbar arrays based on storage class memory (SCM) are ideally suited to handle an exponential increase in data storage and processing as a central hardware unit in the era of AI-based technologies. To achieve this, selector devices are required to be co-integrated with SCM to address the sneak-path current issue that indispensably arises in such crossbar-type architecture. In this perspective, we first summarize the current state of tellurium-based threshold-switching devices and recent advances in the material, processing, and device aspects. We thoroughly review the physicochemical properties of elemental tellurium (Te) and representative binary tellurides, their tailored deposition techniques, and operating mechanisms when implemented in two-terminal threshold switching devices. Lastly, we discuss the promising research direction of Te-based selectors and possible issues that need to be considered in advance.
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장민규(Mingyu Jang),Swati Singh(Swati Singh ),서준기(Joonki Suh) 한국세라믹학회 2023 세라미스트 Vol.26 No.1
Understanding thermal energy transport of crystalline materials, often highly dependent on their crystalline directions, is crucial for energy harvesting and thermal management applications. In this sense, anisotropy in thermal conductivity (κ), which is the unique characteristic of two-dimensional (2D) materials involving graphene and transition metal dichalcogenides (TMDs), has been attracting tremendous attention in terms of fundamental science and application-driven technology aspects. This distinctive heat transport behavior of 2D van der Waals (vdW) materials generally originates from their intrinsic crystal structures and associated lattice vibrations. Here, we thoroughly review and summarize the anisotropic thermal conductivity in 2D vdW crystals in two different categories: 1) in-plane vs. out-of-plane and 2) between two different in-plane directions. In addition, we introduce a range of thermal conductivity measurement techniques that can be employed for 2D vdW materials provided with their working principles, advantages, and limitations. Beyond their intrinsic anisotropic ratio, we conclude with perspectives on the extrinsic modulations of thermal conductivities, thereby maximizing it toward effective thermal management.
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반도체 탄소 중립을 위한 친환경 가스 기반 식각 공정 연구
주정아 ( Jeonga Ju ),박진구 ( Jinkoo Park ),서준기 ( Joonki Suh ),정홍식 ( Hongsik Jeong ) 한국전기전자재료학회 2023 전기전자재료학회논문지 Vol.36 No.2
Currently, semiconductor manufacturing industry heavily relies on a wide range of high global warming potential (GWP) gases, particularly during etching and cleaning processes, and their use and relevant carbon emissions are subject to global rules and regulations for achieving carbon neutrality by 2050. To replace high GWP gases in near future, dry etching using alternative low GWP gases is thus being under intense investigations. In this review, we report a current status and recent progress of the relevant research activities on dry etching processes using a low GWP gas. First, we review the concept of GWP itself and then introduce the difference between high and low GWP gases. Although most of the studies have concentrated on potentially replaceable additive gases such as C<sub>4</sub>F<sub>8</sub>, an ultimate solution with a lower GWP for main etching gases including CF<sub>4</sub> should be developed; therefore, we provide our own perspective in this regard. Finally, we summarize the advanced dry etch process research with low GWP gases and list up several issues to be considered in future research.
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