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자외선 피코초 레이저를 이용한 Low-k 웨이퍼 인그레이빙 특성에 관한 연구
문성욱,배한성,홍윤석,남기중,곽노흥,Moon, Seong-Wook,Bae, Han-Seong,Hong, Yun-Suk,Nam, Gi-Jung,Kwak, No-Heung 한국반도체디스플레이기술학회 2007 반도체디스플레이기술학회지 Vol.6 No.1
Low-k wafer engraving process has been investigated by using UV pico-second laser with high repetition rate. Wavelength and repetition rate of laser used in this study are 355 nm and 80 MHz, respectively. Main parameters of low-k wafer engraving processes are laser power, work speed, assist gas flow, and protective coating to eliminate debris. Results show that engraving qualities of low-k layer by using a laser with UV pico-second pulse width and high repetition rate had better kerf edge and higher work speed, compared to one by conventional laser with nano-second pulse width and low repletion rate in the range of kHz. Assist gas and protective coating to eliminate debris gave effects on the quality of engraving edge. Total engraving width and depth are obtained less than $20\;{\mu}m$ and $10\;{\mu}m$ at more than 500 mm/sec work speed, respectively. We believe that engraving method by using UV pico-second laser with high repetition rate is useful one to give high work speed in laser material process.
문성욱(Seong-Wook Moon),박영원(Young-Won Park),남기중(Gi-jung Nam) 한국레이저가공학회 2007 한국레이저가공학회 학술대회 논문집 Vol.2007 No.-
In this paper laser micro machining system design process for commercialization is suggested. The constructed system design process is properly adjusted for laser micro machining area after tailoring engine process of system engineering process such as requirement analysis, functional analysis and allocation, system synthesis and system optimization process. In the current laser machining system design, system components and specifications are determined on the basis of experimental experience which a laser is being used in machining some materials as well as the current machining and research trend. In this paper, however, systematic process is suggested in addition to experimental experience, which the laser and system components and their specifications are decided in the process of definition of functional requirements and engine design variables of system to satisfy the customer"s requirements.
파이버 공초점법을 이용한 레이저 빔 자동 초점 제어 장치에 관한 연구
문성욱(Seong-wook Moon),김종배(Sun-hum King),김선흠(Jong-bae Kim),배한성(Han-seong Bae),남기중(Gi-jung Nam) 한국레이저가공학회 2006 한국레이저가공학회지 Vol.9 No.3
??Auto focusing system to find optimized focal position of laser beam used for material process has been investigated by using fiber confocal method. Wavelength of laser diode (LD) and diameter of single-mode fiber are 780㎚ and 5.3㎛, respectively. Intensity distributions of beam reflected from the surface of mirror and silicon bare wafer have been observed in a gaussian form. Experimental results show that focal position obtained by LD is shifted from one observed from surface scribed by laser about 80㎛. It is due to the difference of wavelength and each divergence of between LD and laser used for material process. It is confirmed that auto focusing control system through position calibration has operated steadily.
시스템적 접근을 통한 레이저 미세가공 설계 프로세스 개발에 관한 연구
문성욱(Seong-wook Moon),박영원(Young-won Park),남기중(Gi-jung Nam) 한국레이저가공학회 2007 한국레이저가공학회지 Vol.10 No.3
In this paper laser micromachining system design process for commercialization is suggested. The constructed system design process is properly adjusted for laser micromachining area after tailoring engine process of system engineering process such as requirement analysis, functional analysis and allocation, system synthesis and system optimization process. In the current laser machining system design, system components and specifications are determined on the basis of experimental experience which a laser is being used in machining some materials as well as the current machining and research trend. In this paper, however, systematic process is suggested in addition to experimental experience, which the laser and system components and their specifications are decided in the process of definition of functional requirements and engine design variables of system to satisfy the customer"s requirements.
뒤통수밑근 근막이완기법이 전방머리자세 환자의 머리척추각과 상부 목 굽힘 각도에 미치는 영향
장예은(Ye-Eun Jang),전지형(Ji-Hyeong Jeon),문성욱(Seong-Wook Moon),서해니(Hae-Ni Seo),유일영(Il-Young Yu) 한국임상움직임치료학회 2023 한국임상움직임치료학회지 Vol.3 No.2
Background Forward head posture (FHP) is a representative disease of modern society, and it is closely related to the suboccipital muscle. However, there is little study that suboccipital myofascial release af-fect on the cranio-vertebral angle (CVA) and upper cervical flexion angle. Objectives The purpose of this study is to investigate the immediate effect of suboccipital myofascial release on the CVA and upper cervical flexion angle in patients with FHP Methods The subjects were 19 patients with FHP. The CVA and upper cervical flexion angle were measured before and after applying a 15-minute myofascial release to the suboccipital muscles. The CVA and upper cervical flexion angle were assessed using the Kinovea program. The difference before and after myofascial release was analyzed using a paired t-test. Results As a result of applying myofascial release on suboccipital muscles for 15 minutes to patients with a forward heard posture, there was a significant increase in the CVA and the upper cervical flexion angle (p < 0.05). Conclusions Myofascial release on suboccipital muscles is an effective treatment method for improv-ing FHP and restoring upper cervical movement in patients with FHP.