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MEMS 부품 제조를 위한 나노 리소그래피 공정의 3차원 분자동력학 해석
김영석,이승섭,나경환,손현성,김진,Kim, Young-Suk,Lee, Seung-Sub,Na, Kyoung-Hoan,Son, Hyun-Sung,Kim, Jin 대한기계학회 2003 大韓機械學會論文集A Vol.27 No.10
The atomic force microscopy (AFM) based lithographic technique has been used directly to machine material surface and fabricate nano components in MEMS (micro electro mechanical system). In this paper, three-dimensional molecular dynamics (MD) simulations have been conducted to evaluate the characteristic of deformation process at atomistic scale for nano-lithography process. Effects of specific combinations of crystal orientations and cutting directions on the nature of atomistic deformation were investigated. The interatomic force between diamond tool and workpiece of copper material was assumed to be derived from the Morse potential function. The variation of tool geometry and cutting depth was also evaluated and the effect on machinability was investigated. The result of the simulation shows that crystal plane and cutting direction significantly influenced the variation of the cutting forces and the nature of deformation ahead of the tool as well as the surface deformation of the machined surface.
최석우(Seog ou Choi),나경환(Kyoung Hoan Na),임성주(Seong joo Lim),김인호(In Ho Kim),우영만(Young Man Woo),정순철(Soon Chul Jung) 한국자동차공학회 2004 한국자동차공학회 춘 추계 학술대회 논문집 Vol.- No.-
ITR(Inner Tie Rod) is one of the core parts in an automobile steering system. The front wheels are connected to the steering system, which are controlled by steering wheel through the ITR. Improvement of assembling ITR is needed for drivers' satisfaction. Therefore, the parameters influencing the rotational torque were studied and analyzed. The useful results can be obtained, and could be applied to manufacture ITR. Through these manufacturing technologies, high quality ITR have been manufactured with high productivity.
김현철(Hyun-Cheol KIM),손충근(Chung-Geun SON),나경환(Kyoung-Hoan NA) 대한기계학회 2007 대한기계학회 춘추학술대회 Vol.2007 No.5
지식기반경제시대는 과학기술 혁신과 창조적 능력이 국가성장을 좌우함. 세계적으로 이종 기술간의 융합을 통한 신시장 창출이라는 뉴 패러다임이 등장하고 있으며, 우리나라도 현재 처한 넛크랙트 위기를 돌파할 수 있는 창조형 연구 전략의 수립이 절실함. 원천융합기술은 기술의 성격상 와해적이며 블루오션 신시장 창출가능이 높으며, 따라서, 향후 미래 신산업 및 신시장 창출을 위해서는 기초원천 및 미래태동 기술에 부합하는 사업발굴이 필요한 상황임. 이에 본 기획연구에서는 미래유망 파이오니어사업의 개념, 주요특징, 파이오니어사업에서 추구하는 원천융합기술의 제반환경, 사업성 분석 및 과학기술적 기대성과와 경제사회적 파급효과 등을 조사/분석하고자함.
무잔류 응력상태 결정을 통한 표면 잔류응력장 평가에의 레이저 간섭계 적용
김동원(Dong-Won Kim),이낙규(Nak-Kyu Lee),최태훈(Tae-Hoon Choi),나경환(Kyoung-Hoan Na),권동일(Dongil Kwon) 대한기계학회 2003 대한기계학회 춘추학술대회 Vol.2003 No.4
The total relaxed stress in annealing and the thermal strain/stress were obtained from the identification of<br/> the residual stress-free state using electronic speckle pattern interferometry (ESPI). The residual stress fields<br/> in case of both single and film/substrate systems were modeled using the thermo-elastic theory and the<br/> relationship between relaxed stresses and displacements. We mapped the surface residual stress fields on the<br/> indented bulk Cu and the 0.5 ㎛Au film by ESPI. In indented Cu, the normal and shear residual stress are<br/> distributed over -1.7 GPa to 700 MPa and -800 GPa to 600 MPa respectively around the indented point and in<br/> deposited Au film on Si wafer, the tensile residual stress is uniformly distributed on the Au film from 500<br/> MPa to 800 MPa. Also we measured the residual stress by the x-ray diffractometer (XRD) for the verification<br/> of above residual stress results by ESPI.