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김학용,김병창,김승우 한국광학회 2001 한국광학회지 Vol.12 No.4
A Fizeau interferometer without beam splitter was constructed. Single-mode optical fiber was used as a spherical wave source and the face of fiber end was polished and coated to be a reflecting surface. The reflecting surface was angled so that interference fringe could be detected by CCD camera. Beam splitter in front of a spherical wave source could distort the wave front and that was one of the component error sources. With the proposed configuration there was no need to place beam splitter in the system. Improvement of phase measuring accuracy was evaluated quantitatively by comparing the result of this setup with that of a conventional Fizeau interferometer. Wave front of the angled end-face optical fiber source was also measured to verify its sphericity by PS/PDI (Phase Shifting/Point Diffraction Interferometer). The principle of this technique was presented and the experimental results and its applications were discussed. ussed.