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HFCVD 증착 온도 변화에 따른 단결정 다이아몬드 표면 형상 및 성장률 변화
권진욱,김민수,장태환,배문기,김성우,김태규,Gwon, J.U.,Kim, M.S.,Jang, T.H.,Bae, M.K.,Kim, S.W.,Kim, T.G. 한국열처리공학회 2021 熱處理工學會誌 Vol.34 No.5
Following Silicon Carbide, single crystal diamond continues to attract attention as a next-generation semiconductor substrate material. In addition to excellent physical properties, large area and productivity are very important for semiconductor substrate materials. Research on the increase in area and productivity of single crystal diamonds has been carried out using various devices such as HPHT (High Pressure High Temperature) and MPECVD (Microwave Plasma Enhanced Chemical Vapor Deposition). We hit the limits of growth rate and internal defects. However, HFCVD (Hot Filament Chemical Vapor Deposition) can be replaced due to the previous problem. In this study, HFCVD confirmed the distance between the substrate and the filament, the accompanying growth rate, the surface shape, and the Raman shift of the substrate after vapor deposition according to the vapor deposition temperature change. As a result, it was confirmed that the difference in the growth rate of the single crystal substrate due to the change in the vapor deposition temperature was gained up to 5 times, and that as the vapor deposition temperature increased, a large amount of polycrystalline diamond tended to be generated on the surface.
자동차 Differential gear case 불평형 교정을 위한 balancing 장치설계 및 측정에 관한 연구
장태환,권진욱,엄지현,김정아,김태규,Jang, T.H.,Gwon, J.U.,Eum, J.H.,Kim, J.A.,Kim, T.G. 한국열처리공학회 2020 熱處理工學會誌 Vol.33 No.6
A vehicle's differential gear is a device designed to allow the vehicle's outer wheels to turn faster than the inner wheels when turning on a curve. The differential gear case is the main component of the differential gear system, which is composed of ring gear, pinion gear and side gear, and is fastened by pinion shaft pins. The differential gear case rotates when the vehicle is running, so balancing calibration is very important. In this study, a balancing machine that can diagnose and correct the differential gear case and mass imbalance of various rotating bodies was designed. The differential gear case was rotated at high speed to accurately diagnose the location and value of the unbalanced mass, and it was designed to be balanced and corrected by removing the unbalanced mass by drilling. After calibration, it was confirmed that the unbalanced value of all the measured samples was reduced to less than 180g.mm, and the unbalance reduction ratio was improved to 60~70%.
Differential gear case와 피니언 샤프트 체결을 위한 핀 압입 장치설계 및 측정에 관한 연구
장태환 ( T. H. Jang ),권진욱 ( J. U. Gwon ),엄지현 ( J. H. Eum ),김정아 ( J. A. Kim ),김태규 ( T. G. Kim ) 한국열처리공학회 2021 熱處理工學會誌 Vol.34 No.1
The differential gear system is a device designed to distribute the driving force of both vehicle wheels and control the rotational speed when the vehicle turns on a curve. The differential device consists of a differential gear case, a ring gear, and a pressure ring. A differential pinion gear and side gear are mounted on the differential pinion shaft inside the differential gear case. In this study, a pin press-fitting device that mounts the pinier gear and side gear to the differential pinion shaft in the differential gear case was designed, and a jig device for pin press-fitting using servo press was developed. In addition, by precisely measuring the pin press-in load and press-in distance according to the pin hole diameter of the differential gear shaft, the optimization of the pin pressin process was established. (Received January 7, 2021; Revised January 14, 2021; Accepted January 18, 2021)