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오영련(Young Ryun Oh),김윤재(Yun Jae Kim),남현석(Hyun Suk Nam),박웅기(Ung Gi Park),이학주(Hak Joo Lee),김정엽(Jung Yub Kim),박준협(Jun Hyub Park) 대한기계학회 2012 大韓機械學會論文集A Vol.36 No.8
마이크로 프로브 팁의 설계는 매우 복잡하고 많은 비용이 든다. 이 논문에서는 새로운 타입의 프로브 팁을 유한요소해석을 이용하여 설계하였다. 유한요소해석을 이용하여 설계를 함으로써 복잡한 설계과정을 단순화 할 수 있다. 우선, 기존 프로브 팁의 실험 결과를 이용하여 유한요소해석기법을 검증하였다. 기존 프로브 팁의 물성은 100 ㎛ 의 압축 길이시 12.5 gf 의 접촉하중이 측정되었다. 본 연구에서는 새로운 타입의 프로브 팁을 제안하였다. 새로 설계된 프로브 팁의 재료는 NiCo 이며 프로브 팁의 물성은 100 ㎛ 의 압축 길이시 1~2 gf 의 접촉하중을 나타내었다. The design process of a micro-probe tip is very complicated and expensive. To avoid these problems, in this study, we used element (FE) analysis. To simplify design process . A new pre-probe tip (cobra-needle type) made of Ni and Co was designed by FE analysis. Experimental results were compared with those obtained by FE analysis to verify the reliability of the analysis. The contact force and over drive were respectively found to be 12.5 gf(Contact Force) and 100 ㎛(Over drive). We propose the new designed probe tip. Material of new designed probe tip is NiCo. Values of Property are 1~2 gf(Contact Force) and 100 μ㎛(Over drive).
신명수(Myung-soo Shin),박준협(Jun-hyub Park),서정윤(Jeong-yun Seo) 대한기계학회 2009 대한기계학회 춘추학술대회 Vol.2009 No.5
The Probe Card is a test component which is to classify the good semiconductor chips before and after the packaging. The yield of semiconductor product can be improved by analysis of probe test information. An micro-probe tip must be manufactured using thin film to evaluate integrity of the semiconductor with narrow distance between pads. An electric break down of natural oxide film on metal contact, which is known as fritting, is a factor to decrease the performance of probe card. Therefore, a force over 5 gf is necessary to make good contact to electrodes. In addition, the probe tip has the life of more than 200,000 cycles, and the over drive above 50um to contact all pads, simultaneously. In this study, fatigue tests were performed for micro probe tip of BeCu to validate reliability of the probe. The fatigue test of load control with 5㎐ frequency was performed, in ambient environment. The fatigue cycles were compression-compression with mean stress, at stress ratio, R=0.l.
초소형 고밀도 정보저장장치를 위한 고종횡비의 팁을 갖는 정전 구동형 폴리 실리콘 프로브 어레이 개발
전종업(Jong Up Jeon),이창수(Chang-Soo Lee),최재준(Jae-Joon Choi),민동기(Dong-Ki Min),전동렬(Dongryeol Jeon) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.6
In this study, a probe array has been developed for use in a data storage device that is based on scanning probe microscope (SPM) and MEMS technology. When recording data bits by poling the PZT thin layer and reading them by sensing its piezoresponse, commercial probes of which the tip heights are typically shorter than 3㎛ raise a problem due to the electrostatic forces occurring between the probe body and the bottom electrode of a medium. In order to reduce this undesirable effect, a poly-silicon probe with a high aspect-ratio tip was fabricated using a molding technique. poly-silicon probes fabricated by the molding technique have several features. The tip can be protected during the subsequent fabrication processes and have a high aspect ratio. The tip radius can be as small as 15 ㎚ because sharpening oxidation process is allowed. To drive the probe, electrostatic actuation mechanism was employed since the fabrication process and driving/sensing circuit is very simple. The natural frequency and DC sensitivity of a fabricated probe were measured to be 18.75 ㎑ and 16.7 ㎚/V, respectively. The step response characteristic was investigated as well. Overshoot behavior in the probe movement was hardly observed because of large squeeze film air damping forces. Therefore, the probe fabricated in this study is considered to be very useful in probe-based data storages since it can stably approach toward the medium and be more robust against external shock.
축류회전차에서 팁간극의 변화를 고려한 유동특성에 관한 연구
이명호 한국마린엔지니어링학회 2002 한국마린엔지니어링학회지 Vol.26 No.3
The tip leakage flow passing through the clearance between rotor blade tip and casing shroud has been known to occupy an important portion of the rotor overall loss. In this study, flow characteristics in axial flow rotors with different tip clearances is investigated by experimental and numerical methods. The experimental study was carried out to measure static pressure and velocity profiles at the real rotating test rig. The axial flow rotors used for the experiments have ten blades and three different rotor diameter. The tip clearance heights are 1mm, 3mm, and 4.5mm. Measurements were done using spherical type five-hole probe by non-nulling method. The numerical study was carried out to calculate pressure distributions and velocity vectors at the same condition as the experiments in the flow fields of axial flow rotors using Phoenics code.
윤여환(Yeo-Hwan Yoon),박준기(June-Ki Park),한창수(Chang-Soo Han) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.12
This paper reports on the development of carbon nanotube tip modified with focused ion beam (FIB). We used an electric field which causes dielectrophoresis, to align and deposit CNTs on a metal-coated canning Probe Microscope (SPM) tip. Using the CNT attached SPM tip, we have obtained an enhanced resolution and wear property compared to that from the bare silicon tip through the scanning of the surface of the bio materials. The carbon nanotube tip was aligned toward the source of the ion beam allowing their orientation to be changed at precise angles. By this technique, metal coated carbon nanotube tips that are several micrometer in length are prepared for SPM.