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김택수(T. S. Kim),김종오(C. O. Kim),이중환(J. W. Lee),윤선진(S. J. Yun),김좌연(J. Y. Kim) 한국자기학회 1996 韓國磁氣學會誌 Vol.6 No.5
Thin films of Fe-Zr-N were fabricated by rf magnetron reactive sputtering method. The saturation magnetization and coercivity as functions of annealing temperature and partial pressure of nitrogen gas, effective permeability at high frequencies, and thermal stability were investigated. Magnetic softness was exhibited in the composition range of Fe_(72-78)Zr_(7-10)N_(15-18) which was boundary between polycrystalline and amorphous structure. These films exhibited magnetic softness with saturation magentic flux density of 1.55 T and effective permeability of about 3000 at 1 ㎒. These films also exhibited thermal stability by sustaining effective permeability of 2500 or above as the temperature was raised to 550 ℃. It is assumed that good magnetic softness is obtained because grain growth of α-Fe is prohibited due to the precipitation of ZrN nanocrystals. The grain sizes of α-Fe films were 40~50 Å and the grain sizes of ZrN nanocrystals were 10~15 Å.