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Improvement of photoresist removal efficiency in ozonated water cleaning system
Jonghyuck Lee,Kibyung Park,임상우 한국공업화학회 2008 Journal of Industrial and Engineering Chemistry Vol.14 No.1
Ozonated water cleaning systems are used to remove photoresist and organic contaminants on silicon wafers and natural organic matter and bacteria in drinking water. In this paper, the effects of O3 concentration, the system of ozonated water vapor, and substrate temperature on the removal efficiency of photoresist were investigated. A 11.59 kcal/mol of activation energy was obtained for the reaction between aqueous O3 and I-line photoresist. Increasing the process temperature increases the reaction rate of aqueous O3 and photoresist, but reduces the solubility of O3 in water for O3-injected system. Therefore, it is important to deliver aqueous O3 to the wafer surface effectively. The removal rate of photoresist has been accelerated by controlling formation of a boundary layer as well as the temperature of the ozonated water and O3 solubility. When water vapor was generated with O3 and sprayed through a nozzle, the highest removal rate of photoresist, 221 nm/min, was obtained. From the results observed in this study, it is concluded that it is important to have a fast uniform boundary layer formation, a thin boundary layer, and production of high concentrations of O3 in the chamber in order to improve the removal efficiency of photoresist in the ozonated water system. # 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
Yonughwan Lee,Jonghyuck Lee,Yonggun Shul,임상우 한국공업화학회 2008 Journal of Industrial and Engineering Chemistry Vol.14 No.1
In this study, the mechanism of vertically aligned porous silicon formation was examined. Silicon wafers with various resistivities and electrolytes containing different HF concentrations were used to explain porous silicon formation by the reaction at the silicon/electrolyte interface. Total pore volume increased proportionally to the current applied and anodization time. As the concentration of HF increased, pore depth and total pore volume formed in silicon anodization increased, then decreased beyond the optimum point. At a given applied current, total pore volume formed by anodization increased with an increase in resistivity of silicon wafer, but then decreased. From the mechanism of silicon etching and schematic isoetch contour of silicon suggested in this study, it is concluded that the formation of porous silicon is determined by an accumulation of F near the silicon/electrolyte interface in silicon anodization. # 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
메탄-산소 가스다이내믹 점화기 토치에 대한 수치해석 연구
이종혁(Jonghyuck Lee),서성현(Seonghyeon Seo),강상훈(Sang Hun Kang) 한국추진공학회 2018 한국추진공학회 학술대회논문집 Vol.2018 No.5
본 연구에서는 가스다이내믹 공진 점화(GIS : Gas-dynamic Ignition System)에 의해 가열된 점화기로 메탄-산소 혼합물이 유입하면서 발생되는 점화 현상을 연구하였다. 단순한 형상의 점화기를 설계 변화를 주어 점화 가능여부를 관찰하였고, 점화가 일어난 후에 연소실 내부의 온도, 물성치, Reaction 변화를 확인하였다. In this study, we studied the ignition phenomena caused by the contact of methane-oxygen compounds with the igniter heated by Gas-Dynamic Ignition System(GIS). Simple shapes made design changes to the igniter to monitor for ignition availability, and after the ignition occurred, the temperature, property values and reaction inside the combustion chamber were identified.
Photocatalytic Properties of TiO₂ Coatings Prepared by Cold Spray Process
Jonghyuck Han(한종혁),Soo Wohn Lee(이수완) 한국표면공학회 2005 한국표면공학회 학술발표회 초록집 Vol.2005 No.-
Four different coatings deposited using cold spray process were studied with two different powder agglomerating techniques (spray dry and evaporated powder) and using TiO₂ nano-sized powders with and without a l0wt% addition of ZnO. Characterization was performed by SEM, XRD and roughness test. Also the photocatalytic effect of the coatings was evaluated. Although the change of powder preparation techniques and the addition of ZnO into TiO₂ did not show appreciable variations in the surface morphology and Anatase phase transformation, it did show influence on the surface roughness of the coatings, the highest roughness being found in the coatings made by spray powder prepared method. Regarding the photocatalytic effect it was observed that the using of spray dry coating and the addition of ZnO are promoters of purification at higher rates.
김종혁(Jonghyuck Kim),윤숙영(Sukyoung Yun),이대주(Daeju Lee) 한국문화융합학회 2023 문화와 융합 Vol.45 No.10
본 연구는 정원 활동 프로그램이 우울 및 스트레스를 지각하고 있는 노인의 정서적 변화에 미치는 효과를 검증하고자 실시하였다. 연구설계는 실험군과 대조군 사전·사후 측정 설계를 이용하여 2022년 9월5일부터 10월 31일까지 주 2회, 회기당 3시간, 총 16회기 정원 활동 프로그램을 수행하였다. 연구대상은 우울 및 스트레스를 지각하고 있는 노인으로 80명을 모집하여 중도 탈락 및 평가에 참여하지 않은19명을 제외하고 실험군 37명, 대조군 25명을 최종 분석하였다. 프로그램의 효과 측정은 자기 보고식심리검사(불안, 스트레스, 외로움, 우울, 마음챙김, 삶의 만족도, 활력)를 실험군과 대조군에 진행하였다. 연구 결과로는 대상자의 마음챙김, 삶의 만족도, 활력이 유의하게 증가하여 정원 활동 프로그램 후 정서적 안정이 나타났다고 할 수 있고, 우울, 불안, 스트레스 등이 유의하게 감소하여 부정적인 정서가 감소되었다고 할 수 있었다. This study was conducted to verify the effect of garden activity programs on emotional changes in the elderly who perceive depression and stress. Using the pre- and posteasurement design of the experimental and control groups, the garden activity programs were carried out twice a week, 3 hours per session, for a total of 16 sessions, from September 5 to October 31, 2022, The subjects of the study were 80 elderly people who were aware of depression and stress, and 37 people in the experimental group and 25 in the control group were finally analyzed, excluding 19 people who did not participate in the dropout and evaluation. Self-reporting psychological tests(anxiety, stress, loneliness, depression, mindfulness, life satisfaction, and vitality) were conducted in the experimental and control groups. As a result of the study, it can be said that the subject's mindfulness, life satisfaction, and vitality increased significantly, resulting in emotional stability after the garden activity program, and negative emotions decreased significantly.