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초정밀 가공기를 위한 다극자석 선형 모터와 초정밀 스테이지 설계
김기현,이문구,김동민,권대갑,조형석 한국공작기계학회 2003 한국공작기계학회 춘계학술대회논문집 Vol.2003 No.-
본 논문은 초정밀 가공기에 적용 가능한 6자유도의 운동이 가능한 초정밀 스테이지의 설계를 기술한다. 본 초정밀 스테이지는 특히, 광학을 이용한 가공기와 절삭력이 작은 가공기에 적합하다. 스테이지는 장행정·단행정 스테이지로 구성된 이중 서보를 채택한다. 장행정 스테이지는 초정밀 운동에 방해가 되는 운동을 줄이며 높은 효율을 갖는 다극 자석 배열을 이용한 선형모터를 사용한다. 그리고 단행정 스테이지는 장행정 스테이지와의 기계적 결합에 의한 구조적 영향성을 없애는 개념을 적용할 수 있는 보이스 코일 모터을 이용한다. 그리고 각 구동부는 최상의 성능을 유지할 수 있도록 최적설계를 수행한다.
Design and Optimization of Long Stroke Planar Motion Maglev Stage using Copper Strip Array
Woo, Siwoong,Gweon, Dae-Gab Korean Society for Precision Engineering 2015 International Journal of Precision Engineering and Vol.16 No.3
The main purpose of this proposed maglev stage is to transport a 450 mm wafer in a vacuum environment. To realize a long stroke and a large size mover, a stator was designed using a copper strip array. The mover contains a halbach magnet array and the fixture part has characteristics of low weight and high structural bandwidth for fast response. Since the relationship between the design variables and the system performance is complicated, an optimization procedure was used to obtain optimal design variables. Based on the optimization solution, detailed design was performed and the system's stability was checked by several simulations. Finally, the proposed maglev system was manufactured.
Modeling and Control of a Four Mount Active Micro-vibration Isolation System
Banik, Rahul,Gweon, Dae-Gab The Korean Society Of Semiconductor Display Techno 2006 반도체디스플레이기술학회지 Vol.5 No.4
Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.
An Education Model of a Nano-Positioning System for Mechanical Engineers
Dong-Yeon Lee,Dae-Gab Gweon 대한기계학회 2006 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.20 No.10
The increasing use of nano-positioners in a wide variety of laboratory and industrial applications has created a need for nano-mechatronics education in all engineering disciplines. The subject of nano-mechatronics is broad and interdisciplinary. This article focuses on the way nano-mechatronics is taught in department of mechanical engineering at Korea Advanced Institute of Science and Technology (KAIST). As one model of nano-positioning systems, design and experimental methodology is presented in this article. For design phase, the stiffness and resonant frequencies are found analytically and verified by using a commercial finite element analysis program. Next, for experimental phase, various tests are performed to access the performances of the designed nano-positioner, for example, sine-tracking, multi-step response and travel-range check etc. Finally, the definition of "separation frequency" is described and some comments are discussed.
A Stage Based on Voice Coil Motor with High Speed and Long Range for Laser Micro/Nano Fabrication
Kim, Ki Hyun,Gweon, Dae Gab,Jung, Hyun Soo,Lee, Soo Hun,Hong, Min Sung,Lee, Moon G. Trans Tech Publications, Ltd. 2007 Key Engineering Materials Vol.345-346 No.-
<P>Design of design of X-Y-Theta fine stage using VCM (voice coil motor) is presented in this paper. This fine stage is combined with linear DC motor. Long range, high speed and high precision of the stage is obtained by using dual servo control for laser micro/nano machining. A novel structure of VCM for the fine stage is proposed. The fine stage can have 3 DOF(X-Y-Theta) motion by four VCM actuators which are located on the same plane. The X-Y-Theta fine stage is designed to have high acceleration for high throughput. Based on the design, the stage is fabricated. The designed stage has the acceleration of 5m/s2 with 45kg total mass. In addition, this actuator is feedback controlled using HP laser interferometer. The reaction force between the coarse and fine stage of the dual servo is compensated by force compensator.</P>
Kim, Hyun-Jun,Gweon, Dae-Gab,Kim, Hyun-Chul 한국정밀공학회 2012 International Journal of Precision Engineering and Vol.13 No.11
The non-destructive, non-contact measurement techniques of displacement and defect using laser speckle interferometry have the advantages of sensitivity, non-destructiveness and real-time measurement. ESPI (Electronic Speckle Pattern Interferometry) and Shearography are representative techniques using laser speckle interferometry. Both of them have been studied independently owing to physically different nature of optics and been tried to apply to the industrial field from 1970. But it is yet to be succeeded for the system volume and operation hardship. This paper presents the integrated system that can observe in-plane, out-of-plane displacement and defect on the surface using ESPI and Shearography. It is anticipated to apply this system usefully to the non-contact metrological field. And qualitative comparison shows acceptable agreement of experiments performed by this integrated system with the strain gauge.
Accurate Measurement of the Out-of-plane Motion of a Tip-scanning Atomic Force Microscope
Dong-Yean Lee,Dae-Gab Gweon 한국정밀공학회 2009 International Journal of Precision Engineering and Vol.10 No.1
A tip-scanning atomic force microscope (AFM) can be used as a highly accurate height-measuring instrument for large samples, such as liquid crystal displays, To accurately measure the flatness or surface roughness of large samples, the xy-scanner-induced out-of-plane motion must be known to discriminate scanner artifacts from the measured AFM images, As the topographic signals of AFM measurements contain the hysteresis of the z-scanner piezoelectric actuators, actual movements of the z-scanner were measured using a z-axis sensor glued to the actuator, The actual out-of-plane motion of the xy-scanner was found to be less than 1 ㎚ for a 50-㎛ scan.