http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
RF 스위치 적용을 위한 박막 PZT 엑추에이터의 d<SUB>31</SUB> 구동과 d<SUB>33</SUB> 구동 특성 비교
신민재(M. J. Shin),서영호(Y. H. Seo),최두선(D-S. Choi),황경현(K-H. Hwang) 한국정밀공학회 2006 한국정밀공학회 학술발표대회 논문집 Vol.2006 No.5월
In this work, we present the comparison between d<SUB>31</SUB> and d<SUB>33</SUB> mode characterization using the PZT micro-actuator for large displacement. The PZT micro-actuator consisted of Si, PZT, and Pt layer on SOI wafer. The electrode shapes were laminated and interdigitated for d<SUB>31</SUB> and d<SUB>33</SUB> mode, respectively. In order to characterize the actuation mode, we measured the displacement using laser interferometer. The maximum displacement of d<SUB>31</SUB> mode was 12.2㎛ at 10V, the actuation characterization of d<SUB>31</SUB> was better than that of d<SUB>33</SUB> mode. We estimated that displacement of d<SUB>33</SUB> mode would be larger than that of d<SUB>31</SUB> above 30V.