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주사 전자 현미경에서 전자빔 프르브 생성을 위한 하드웨어 설계
임선종,이찬홍 한국공작기계학회 2007 한국공작기계학회 추계학술대회논문집 Vol.2007 No.-
Electron probe refers to the focused electron beam at the specimen. It generates the various image signals. Image of SEM is dependent upon the beam parameters: electron-probe size, electron-probe-current and electron probe convergence angle. In this paper, we presented hardware design for generation of electron probe.
Simple Analysis of the Properties of Condenser Lens 1 in SEM
임선종 한국생산제조학회 2010 한국생산제조학회지 Vol.19 No.5
It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens 1 in our column. These results will be utilized in developing a simulation program for electron optics.
주사 전자현미경에서 집속 렌즈를 이용한 프르브 전류의 차단
임선종,이찬홍 한국공작기계학회 2008 한국공작기계학회 추계학술대회논문집 Vol.2008 No.-
Beam blanker containing blank plate intercepts probe current by drawing electron beam. It is suitable for a variety of pattern process because of its responsibility. But it changes electron beam path. Condenser lens controls focal length by currents. The focal length is the distance along the optic axis from the point where an electron first changes direction to the point where the electron crosses the axis. Increasing the strength of the condenser lens decreases both the final probe size and the amount of current in the final probe. In this paper, we implement the beam blank function using the focal length of condenser lens without beam blanker.
Simple Analysis of the Properties of Condenser Lens 1 in SEM
임선종,Lim, Sun-Jong The Korean Society of Manufacturing Technology Eng 2010 한국공작기계학회지 Vol.19 No.5
It is quite complex to draw the geometry of electron trajectories in electron optics because such trajectories have various aberrations that cannot be easily calculated. However, if we need to know roughly the geometry, the focal length and the principal planes in order to understand the properties of column, a simple numerical solution can be a useful method. We are developing the electron beam machining system based on SEM. In this paper, we show rough geometry, focal length and principal planes by a numerical solution for electron lens I in our column. These results will be utilized in developing a simulation program for electron optics.
임선종,Lim, Sun Jong 한국레이저가공학회 2015 한국레이저가공학회지 Vol.18 No.3
Finishing process includes deburring, polishing and edge radiusing. It improves the surface profile of specimen and eliminates the alien substance on surface. Deburring is the elimination process for debris of edges. Polishing lubricates surfaces by rubbing or chemical treatment. There are two types for electron finishing. The one is using pulse beam. The other is using the convergent and scanning electron beam. Pulse type device appropriates the large area process. But it does not control the beam dosage. Scanning type device has advantages for dosage control and edge deburring. We design the convergence and scan type. It has magnetic lenses for convergence and scan device for scanning beam. Magnetic lenses consist of convergent and objective lens. The lenses are designed by the specification(beam size and working distance). In this paper, we evaluate the convergence performance by pattern process. Also, we analysis the results and important factors for process. The important factors for process are beam size, pressure, stage speed and vacuum. These results will be utilized into systematizing pattern shape and the factors.