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졸-침투와 감광성 직접-패턴 기술을 이용하여 스크린인쇄된 Pb(Zr,Ti)O<sub>3</sub> 후막의 하이브리드 제작
이진형,김태송,박형호,Lee, J.-H.,Kim, T.S.,Park, H.-H. 한국마이크로전자및패키징학회 2015 마이크로전자 및 패키징학회지 Vol.22 No.4
본 논문에서는 졸-침투와 직접-패턴 공정을 이용하여 향상된 압전 후막의 전기적 특성과 우수한 패터닝 특성을 동시에 만족할 수 있는 제작 방법을 제시한다. 저온(< $850^{\circ}C$) 공정 후 후막의 고밀도 및 직접-패턴의 목적을 달성하기 위해서, 감광성 티탄산 지르콘산 연 ($Pb(Zr,Ti)O_3$, PZT) 졸을 스크린인쇄된 PZT 후막 내부로 침투시켰다. 직접-패턴된 PZT막은 포토크롬마스크와 UV 조사에 의해서 일정한 간격으로 인쇄된 후막 위에 성공적으로 형성되었다. 스크린인쇄된 후막은 분말형태의 기공성 구조를 갖고 있어 조사된 UV빛이 산란되기 때문에, 감광성 졸-침투 공정을 할 때 PZT 후막의 특성을 증가시키기 위한 공정의 최적화가 필요하다. 침투된 감광성 PZT 졸의 농도, 조사된 UV 시간 및 용매 현상 시간을 최적화한 결과, 0.35 M의 PZT 농도, 4 분의 UV 조사시간과 15 초의 용매 현상시간으로 졸-침투된 PZT 후막은 $800^{\circ}C$ 소결 온도에서 입자들의 성장에 의해 치밀화 정도가 증가되었다. 또한 PZT후막의 강유전 특성(잔류분극 및 항복 전압)도 향상되었다. 특히 잔류분극값은 스크린인쇄된 후막보다 약 4배정도 증가되었다. 이렇게 제작된 후막은 어레이타입의 압전형 마이크로미터크기의 센서 및 액츄에이터 등에 응용 가능성을 제시할 수 있었다. In this paper, we propose a fabrication technique for enhanced electrical properties of piezoelectric thick films with excellent patterning property using sol-infiltration and a direct-patterning process. To achieve the needs of high-density and direct-patterning at a low sintering temperature (< $850^{\circ}C$), a photosensitive lead zirconate titanate (PZT) solution was infiltrated into a screen-printed thick film. The direct-patterned PZT films were clearly formed on a locally screen-printed thick film, using a photomask and UV light. Because UV light is scattered in the screen-printed thick film of a porous powder-based structure, there are needs to optimize the photosensitive PZT sol infiltration process for obtaining the enhanced properties of PZT thick film. By optimizing the concentration of the photosensitive PZT sol, UV irradiation time, and solvent developing time, the hybrid films prepared with 0.35 M of PZT sol, 4 min of UV irradiation and 15 sec solvent developing time, showed a very dense with a large grain size at a low sintering temperature of $800^{\circ}C$. It also illustrated enhanced electrical properties (remnant polarization, $P_r$, and coercive field, $E_c$). The $P_r$ value was over four times higher than those of the screen-printed films. These films integrated on silicon wafer substrate could give a potential of applications in micro-sensors and -actuators.
Membrane Pumping을 이용한 Nano Fountain-Pen의 수치적 연구
이진형(Jin-Hyoung Lee),이명관(Young-Kwan Lee),이석한(Suk-Han Lee),김훈모(Hun-Mo Kim),김윤제(Youn J. Kim) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.11
Nano fountain-pen is a novel device to make the constant patterning in micro process using new designed probe. Fountain-pen nanolithography (FPN) is applied for constant supply of liquid in conjunction with local correction of patterns and surface variation in the micro process. Many studies for FPN are going on. Type of traditional probes is the multi-tip which can pattern by sub-micro unit. In this study, nano fountain-pen is made up reservoir, micro channels, tip and secondary chamber. Instead of traditional method only using capillary force, liquid can definitely and exactly inject with membrane pumping by repulsive force of tip. It is difficult to perform experiments in the micro range so that we carried out a new analysis for internal flow of nano fountain-pen with the membrane pumping, Using a commercial code, FLUENT, velocity, pressure and flow rate are obtained under laminar, unsteady and no-slip condition.
이진형(J.H. Lee),김기호(K.H. Kim),서정철(J.C. Seo),현동훈(D.H. Hyun) 한국생산제조학회 2010 한국생산제조시스템학회 학술발표대회 논문집 Vol.2010 No.10
This study is about processing thermal infrared ray camera with a single lens using germanium, and AR coating. OSLO is used for optical design, structure is designed with Auto CAD, Solidworks and DTM is used to process the lens. It now is possible to have a smaller thermal infrared ray camera that have same performance with exciting thermal infrared ray cameras.
이진형(J.H. Lee),김기호(K.H. Kim),서정철(J.C. Seo),현동훈(D.H. Hyun) 한국생산제조학회 2010 한국공작기계학회 추계학술대회논문집 Vol.2010 No.-
This study is about processing thermal infrared ray camera with a single lens using germanium, and AR coating. OSLO is used for optical design, structure is designed with Auto CAD, Solidworks and DTM is used to process the lens. It now is possible to have a smaller thermal infrared ray camera that have same performance with exciting thermal infrared ray cameras.