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광섬유 Fabry - Perot 간섭형 센서 제조를 위한 TiO2 반사막의 형성 및 그 특성
박동수,김명규,김창원,이정희,강신원,손병기 ( Dong Soo Park,Myung Gyoo Kim,Chang Won Kim,Jung Hee Lee ) 한국센서학회 1995 센서학회지 Vol.4 No.3
For the fabrication of high sensitive intrinsic fiber optic Fabry-Perot interferometeric sensor, the deposition conditions of TiO₂ thin film used to the internal mirrors of the sensor were investigated. The TiO₂ film deposited by RF magnetron sputter had higher refractive index (2.36∼2.98) and better stoiciometry (O/Ti = 2) than that deposited by e-beam evaporator. In the case of forming TiO₂ internal mirror by using fusion splicing technique, the TiO₂ reflection mirror deposited by RF magnetron sputter in the condition of 120W RF power showed high reflectance and excellent controllability of reflection power. The fabricated intrinsic fiber optic Fabry-Perot interferometer with two TiO₂ internal mirrors deposited under the condition showed very stable fringe patterns. It is. therefore, expected that the interferometer will be applicable to various high precision sensors.
광학적 신호감지의 유전박막 다이아프레임을 이용하는 압력센서
김명규,유양욱,박동수,김진섭,이정희,손병기 ( Myung Gyoo Kim,Yang Woog Ryu,Dong Soo Park,Jin Sup Kim,Jung Hee Lee,Byung Ki Sohn ) 한국센서학회 1996 센서학회지 Vol.5 No.4
Optical intensity-type pressure sensor was fabricated by coupling optical fiber with a micromachined thin dielectric diaphragm, which consists of a 300 nm thick SiO₂ layer sandwiched between 150 nm thick top and bottom Si₃N₄ layers. At the wavelength of the sensor light source near 1.3 ㎛, the optical transmittance of the diaphragm was about 50 %, but it was decreased to a few percents by depositing 1,000 Å. thick gold(Au) layer on the diaphragm, which is sufficient enough to be used as a light reflection layer of the sensor. From the optical output power-pressure characteristics of the sensors, it was found that the output power linearly decreased with increasing applied pressure from 0 to 77 torr regardless of the diaphragm size. The respective sensitivities were 0.52, 0.65, and 0.77 nW/torr for the diaphragm sizes of 3 X 3, 4 x 4, and 5 X 5 ㎟, indicating that the sensitivity increases as diaphragm size decreases.
광섬유 Fabry-Perot 간섭형 전류 및 전압센서 시스템의 제작
박동수,김명규,김창원,이정희,손병기 경북대학교 센서기술연구소 1994 센서技術學術大會論文集 Vol.5 No.1
Although the conventional current transformers(CTs) and the potential transformers(PTs) have been used in the power system, new method is demanded which can measure with safty, EMI(electro-magnetic interference)-free. Over the last few years, variours kinds of optical measurement systems have been studied. The optical CTs and PTs systems, however, are very complicated and large, and hence the systems have a difficulty to maintain and repair. A new type fiber optic voltage and current transducers were fabricated by using fiber optic Fabry-Perot interferometer and PZT. A simple optical signal processing circuits and its PC interface circuits were also designed.
BIOFET 효소고정화막의 웨이퍼 규모공정을 위한 「lift-off」기법
남동현,박동수,손병기 경북대학교 센서기술연구소 1990 센서技術學術大會論文集 Vol.1 No.1
A wafer-scale formation technique of enzyme immobilized membrane for the ISFET biosensor has been developed by using the lift-off technique. The urea sensor fabricated by the lift-off technique showed a good linearity in the urea concentration range of 1X10^(-5)~2X10^(-3) g/ml and he thickness of its crease immobilized membrane has been about 10 μm. Therefore the results make a very good promising technique for mass production of ISFET urea-sensor
임상학적 적용을 위한 FET형 요소센서의 제조 및 그 특성
최성문,김응수,박동수,김의락,손병기 경북대학교 센서기술연구소 1991 센서技術學術大會論文集 Vol.2 No.1
A FET type micro urea sensor - very proper and promising shapes for in vivo, in situ measurements - had been examined on its compatibilities with clinical analysis. Investigations were performed on the interference of various amino acids, organic metabolites and waste products present in blood, which may cause interference with the sensor output. The results of the measurements of urea-nitrogen in blood plasma measurements was compared with those of conventional spectrophotometric method.