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마이크로 팩토리 장착형 Vision/Inspection 시스템 개발
이득우(D. W. Lee),김형원(H. W. Kim),김은영(E. Y. Kim),이채문(C. M. Lee),박정우(J. W. Park) 한국생산제조학회 2005 한국공작기계학회 추계학술대회논문집 Vol.2005 No.-
This paper demonstrates the vision/inspection system mounted in micro-factory system. To insure the topographical data of micro parts produced by micro-factory system, it is necessary to scan precisely with miniatured CMM (Coordinate Measuring Machine) system. Miniaturized CMM essentially consists of metrology frame, nano stage for x, y, z movement, nano probe for scanning and scratching, and inchworm actuator for operating nano stage. Nano stage with piezo-actuated inchworm system enables micro parts to travel wide range in nanometer range.