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Decoupled Type의 초정밀 이중 서보의 제어에 관한 연구
남병욱(Byoung Uk Nam),김기현(Kihyun Kim),최영만(Young Man Choi),김정재(Jung Jae Kim),이석원(Suk Won Lee),권대갑(Dae Gab Gweon) Korean Society for Precision Engineering 2006 한국정밀공학회지 Vol.23 No.2
Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a XYθ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.
남병욱(Byong-uk Nam),서동현(Dong-hyeon Seo),최재호(Jae-ho Choi),손주혜(Ju-hye Son),오병우(Byoung-Woo Oh) 한국정보기술학회 2022 Proceedings of KIIT Conference Vol.2022 No.6
사회적으로 자신을 표현하는 것이 중요시된다. 그러나 자신을 표현하기 위한 대표적인 방법들 중 하나인 발표에 부담감과 불안함을 느끼는 사람들이 다수 존재한다. 이를 극복하기 위해 사람들은 사전에 연습을 진행한다. 그렇지만 실제 발표 상황과 같은 환경을 구성한 후 연습을 진행하기 위해서는 다수의 제약사항들이 존재한다. 본 논문에서는 이러한 제약사항들을 해결하고 현실과 같은 공간에서 연습을 수행하기 위한 방법으로 3D 가상 환경을 이용하는 시스템을 제안한다. 이를 통해 사용자들이 발표 중 느끼는 부담감과 불안감이 완화되는 것을 느끼고 발표에 익숙해질 수 있는 경험을 제공하고자 한다. It is important to express oneself socially. However, there are many people who feel burdened and anxious about presentation, one of the representative ways to express themselves. To overcome this, people practice beforehand. However, there are a number of restrictions in order to proceed with the practice after constructing an environment such as an actual presentation situation. In this paper, we propose a system using a 3D virtual environment as a method to solve these limitations and perform exercises in a space like reality. Through this, it is intended to provide an experience that allows users to feel the burden and anxiety they feel during the presentation is relieved and get used to the presentation.
광학거울 시스템의 지지구조 설계를 위한 라그랑지 방정식과 최적화 기법 적용에 의한 효과분석
김학인,남병욱,김광태,김병운,Gimm, Hak In,Nam, Byoung Uk,Kim, Gwang Tae,Kim, Byung Un 한국군사과학기술학회 2018 한국군사과학기술학회지 Vol.21 No.3
The support structure of an optical mirror system is the one of the important design elements because the one affects the optical aberrations of the mirror surface. In this paper, Lagrange equation of the moving body of the fast steering mirror system(FSM) has been formulated to use with optimization design. Major goals for optimization are to assign the reasonably flexible stiffness to the structure and to enhance the first natural frequency of the mirror and support system in aid of more affordable control bandwidth for the FSM. Pursuing these purposes with the proposed method, the finite element analysis(FEA), optimization technique and the Zernike polynomial estimation are used for the design effects. It is concluded that the proposed approach for design well guides toward the desired design goals with regards to both structural and optical performances.
VCM을 이용한 나노 정밀도 스캐닝 용 초정밀 이중 스테이지
김기현(Ki-Hyun Kim),권대갑(Dae-Gab Gweon),최영만(Young-Man Choi),김동민(Dong-Min Kim),남병욱(Byoung-Uk Nam),이석원(Suk-Won Lee),이문구(Moon-Gu Lee) Korean Society for Precision Engineering 2005 한국정밀공학회지 Vol.22 No.5
This paper presents one-axis high precision scanning system and illustrates the design of modified X-Y-θ stage as a tracker using VCM and commercialized air bearings for it. The scanning system for 100㎚ resolution is composed of the 3-axis stage and one axis long stroke linear motor stage as a follower. In this study a previous proposed and presented structure of VCM for the fine stage is modified. The tracker has 3 DOF(X-Y-θ) motions by four VCM actuators which are located on the same plane. So 4 actuating forces are suggested and designed to create least pitch and roll motions. This article will show about the design especially about optimal design. The design focus of this fine stage is to have high acceleration to accomplish high throughput. The optimal design of maximizing acceleration is performed in restrained size. The most sensitive constraint of this optimal design is heat dissipation of coil. There are 5 design variables. Because the relationship between design variables and system parameters are quite complicated, it is very difficult to set design variables manually. Due to it, computer based optimal design procedure using MATLAB is used. Then, this paper also describes the procedures of selecting design variables for the optimal design and a mathematical formulation of the optimization problem. Based on the solution of the optimization problem, the final design of the stage is also presented. The results can be verified by MAXWELL. The designed stage has the acceleration of about 5 ㎨ with 40㎏ total mass including wafer chuck and interferometer mirror. And the temperature of coil is increased 50°C. In addition, the tracker is controlled by high precision controller system with HP interferometer for it and linear scaler for the follower. At that time, the scanning system has high precision resolution about 5㎚ and scanning resolution about 40㎚ in 25㎜/s constant speed.