http://chineseinput.net/에서 pinyin(병음)방식으로 중국어를 변환할 수 있습니다.
변환된 중국어를 복사하여 사용하시면 됩니다.
나노결정구조 Fe - Nb - B - N 박막의 미세구조 및 자기적 특성
박진영(J. Y. Park),서수정(S. J. Suh),노태환(T. H. Noh),김광윤(K. Y. Kim),김종열(J. Y. Kim),김희중(H. J. Kim) 한국자기학회 1997 韓國磁氣學會誌 Vol.7 No.5
The microstructure and magnetic properties of Fe-Nb-B-N thin film alloys, which produced by rf magnetron sputtering method in Ar + N₂ mixed gas atmosphere, were investigated. The Fe_(70)Nb₁₄B₁₁N_5 films, annealed at 590℃, exhibit soft magnetic properties: 4 πMs = 16.5 kG, Hc = 0.13 Oe and μ_(eff) (1~10 ㎒) =5,000. The frequency stability of the Fe-Nb-B-N films has also been found to be good up to 10 ㎒.<br/> The Fe-Nb-B-N thin film alloys annealed at 590℃ consist of three phase; fine crystalline α-Fe phase with grain size of about 5~10 ㎚, Nb-B rich amorphous phase and Nb-nitride precipitates with the size of less than 3 ㎚. Annealed Fe-Nb-B films have two phases; α-Fe grains with the size of about 10 ㎚ and NbB rich amorphous phase. The addition of N decreased α-Fe grain size due to the precipitation of NbN. The good magnetic properties of the Fe-Nb-B-N film alloys are due to fine α-Fe grains resulting from the precipitation of NbN.