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An ERD-TOF System for the Depth Profiling of Light Elements
김영석,우형주,김준곤,김덕경,최한우,홍완,Kim, Y. S.,Woo, H. J.,Kim, J. K.,Kim, D. K.,Choi, H. W.,Hong, W. The Korean Vacuum Society 1996 Applied Science and Convergence Technology Vol.5 No.1
An ERD-TOF system is constructed for the nondestructive depth profiling of light elements in thin films in the range of several thousand angstroms. The particles, recoiled by 10 $MeV^{35}Cl$ projectiles, were detected by a Time-Of-Flight spectrometer composed of a MCP (Micro Channel Plate) and a SSB (Silicon Surface Barrier) detector. A two parameter data acquisition system composed of two PC's was constructed for registering simultaneous time and energy signals. A $Si_3N_4$/poly-Si/$SiO_2$/Si sample was anlayzed and the result is compared with RBS. The detection limit, maximum probable depth and depth resolution for light elements in silicon are about $4\times10^{14}atoms/\textrm{cm}^2$, 5, 000$\AA$ and 100$\AA$, respectively.
김영석,김준곤,홍완,김덕경,조수영,우형주,김낙배,Kim, Y. S.,Kim, J. M.,Hong, W.,Kim, D. K.,Cho, S. Y.,Woo, H. J.,Kim, N. B. 한국진공학회 1993 Applied Science and Convergence Technology Vol.2 No.4
Hydrogen depth profiling was performed by H(19F, $\alpha$${\gamma}$) nuclear resonance reactin . A cesium sputtering ion sorce and 1.7MV Tandem Van de Graaff accelerator was used for the production of 6.5MeV 19F ion. The ${\gamma}$ rays produced by the reaction were measure dby 3" $\times$3" and 6" $\times$8" Nal detectors . A test measurement was done for hydrogen contaminatin layer of a bare silicon wafer, Si3N4(H) and Zr(O)a-Si/Si for the purpose of verifying the applicability , detection limit and the reliability of the method.ility of the method.
김영석,김낙배,정기형,박혜일,Kim, Y.S.,Kim, N.B.,Chung, K.H.,Bak, H.I. Korean Nuclear Society 1986 Nuclear Engineering and Technology Vol.18 No.2
The $^{93}Nb(n,n\alpha)^{89m}Y$, $^{93}Nb(n,{\alpha})^{90m}Y$ and $^{93}Nb(n,2n)^{92m}Nb$ cross sections at a neutron energy of 14.6 MeV have been measured relative to the $^{27}Al(n,p)^{27}Mg$ and $^{27}Al(n,{\alpha})^{24}Na$ cross sections. A small accelerator utilizing $T(D,n)^4He$ reaction was used as a neutron source and the neutron energy spread is about 0.4MeV at the sample. All induced activities were measured with a 70cc HPGe detector in the same geometry.
위상차(PDOA)를 이용한 열차 위치검지의 H/W 설계
정락교(R.G.Jeong),윤용기(Y.K.Yoon),조홍식(H.S.Cho),이병송(B.S.Lee),정상기(S.K.Chung),김영석(Y.S.Kim) 전력전자학회 2003 전력전자학술대회 논문집 Vol.2003 No.7(1)
TOA(Time of Arrival) 및 TDOA(Time Difference of Arrival) 경우 무선국의 시간동기화를 위해서 고도의 기술을 요구하고 있으며, 시간동기오차에 따른 위치검지의 정밀도가 낮아지는 문제가 있어 이를 극복하기 위하여 위상차(PDOA)를 이용한 새로운 열차검지기법의 제안에 따른 구현을 위하여 H/W의 설계에 대하여 기술하고자 한다. 본 시스템은 전파의 전달 속도(λ)를 응용하여 기준 주파수인 15MHz를 송신 시스템과 수신 시스템의 기준 주파수와 비교하여 그 위상의 차이를 비교하여 지연 된 시간을 구한 후 이를 거리로 환산하는 시스템으로서 H/W와 S/W로 구분하여 구현.설계 되는데 본 논문에서는 H/W설계에 대하여 기술하였다.