대면적 UV 임프린팅 공정에서 고무 롤러에 의한 압력분포

김남웅,김국원,이우영,Kim, Nam-Woong,Kim, Kug-Weon,Lee, Woo-Young 한국반도체디스플레이기술학회 2010 반도체디스플레이기술학회지 Vol.9 No.2

In recent years there have been considerable attentions on nanoimprint lithography (NIL) by the display device and semiconductor industry due to its potential abilities that enable cost-effective and high-throughput nanofabrication. Although one of the current major research trends of NIL is large-area patterning, the technical difficulties to keep the uniformity of the residual layer become severer as the imprinting area increases more and more. In this paper we consider the roll-to-plate type imprinting process. In the process a glass mold, which is placed upon the 2nd generation TFT-LCD glass sized substrate(370${\yen}$470 mm), is rolled by a rubber roller to achieve a uniform residual layer. The pressure distribution on the glass mold by rolling of the rubber roller is crucial information to analyze mold deformation, transferred pattern quality, uniformity of residual layer and so forth. In this paper the quantitative pressure distribution induced by rolling of the rubber roller was calculated with finite element analysis under the assumption of Neo-Hookean hyperelastic constitutive relation. Additionally the numerical results were verified by the experiments.

열-나노임프린트 공정의 점탄성 유한요소해석

김남웅,김국원,신효철,Kim, Nam-Woong,Kim, Kug-Weon,Sin, Hyo-Chol 한국마이크로전자및패키징학회 2007 마이크로전자 및 패키징학회지 Vol.14 No.4

최근 나노임프린트 리소그래피 공정이 마이크로/나노스케일의 소자 개발에 있어서 경제적으로 대량 생산할 수 있는 기술로 주목 받고 있다. 나노 스케일의 패턴을 성공적으로 전사하기 위해서는 폴리머의 기계적 거동에 대한 이해를 바탕으로, 적절한 공정 조건 즉, 압력, 온도, 시간 등의 선택이 필요하다. 본 연구에서는 열-나노임프린트 공정에서의 충전과정을 해석하기 위하여 비선형 유한요소법을 이용하였으며, 폴리머의 거동을 점탄성으로 가정하여 재료의 응력완화 효과를 고려하였다. 해석을 통하여 온도 및 몰드의 패턴형상이 열-나노임프린트 공정에 미치는 영향을 살펴보았다. Nanoimprint lithography (NIL) is an emerging technology enabling cost-effective and high-throughput nanofabrication. To successfully imprint a nano-sized pattern, the process conditions such as temperature, pressure, and time should be appropriately selected. This starts with a clear understanding of polymer material behavior during the NIL process. In this work, the squeezing of thin polymer films into nanocavities during the thermal NIL has been investigated based upon a two-dimensional viscoelastic finite element analysis in order to understand how the process conditions affect a pattern quality. The simulations have been performed within the viscoelastic plateau region and the stress relaxation effect has been taken into account.

동흡진기를 채용한 광 디스크 드라이브의 동적 해석

김남웅(Nam Woong Kim),김국원(Kug Weon Kim),황효균(Hyo-Kune Hwang),김동규(Dong Kyu Kim),이진우(Jin Woo Lee),김외열(Wae Yeul Kim) 한국정밀공학회 2002 한국정밀공학회 학술발표대회 논문집 Vol.2002 No.10월

Numerical Analysis of Natural Convection inside Spray Coating Room on Temperature Distributions

Nam Woong Kim(김남웅),Bo-Seon Kim(김보선),Kug Weon Kim(김국원) 한국산학기술학회 2019 한국산학기술학회논문지 Vol.20 No.8

아연말 코팅은 친환경성 및 고성능으로 인하여 널리 사용되고 있다. 일반적으로 코팅온도가 코팅층 두께 및 코팅품질을 결정하는 주요한 요소이며 아연말 코팅의 경우에도 코팅 룸 내 균일하며 적절한 코팅온도가 요구된다. 본 연구에서는 일반적으로 사용하는 자연대류 상태에서의 아연말 스프레이 코팅 룸의 온도 분포를 해석하기 위해 룸 내부의 공기유동을 포함하는 열 유동 전산 시뮬레이션을 수행하였다. 3차원 CAD 프로그램인 SolidWorks를 이용하여 스프레이 코팅 룸 전체와 예열실과 건조실을 모두 고려한 모델링을 수행하였으며 ANSYS의 FLUENT 프로그램을 이용하여 열 유동연성 해석을 수행하였다. 해석 결과 스프레이 코팅 룸에서의 온도 분포 특성을 파악할 수 있었으며, 현재의 상태로는 목표 온도 값인 25℃에 미달하고 있었음을 알 수 있었다. 이에 두 가지 다른 경계조건 (히터를 추가하는 방법과 현재 상태에서 Open 부분을 닫는 방법) 에 대해 열 유동 시뮬레이션을 수행하였으며, 시뮬레이션 결과 히터를 추가하기보다는 Open된 부분을 닫는 방법이 더 좋은 결과를 나타내었다. Zinc coatings are widely used because of their environmental friendliness and high performance. In general, the coating temperature is a major factor in determining the coating layer thickness and coating quality. In the case of a zinc coating, a uniform and appropriate coating temperature is required. In this study, a thermal flow simulation of the air flow was performed to analyze the temperature distribution of a zinc spray coating room in a natural convection state. Using SolidWorks, modeling was performed for two spray coating rooms, a preheating room, and a drying room, and a thermal flow coupled analysis was performed using ANSYS-FLUENT. As a result of the analysis, the temperature distribution characteristics in the spray coating rooms were determined. It was found that the present temperature was below the target temperature of 25℃. Simulations were conducted for two different boundary conditions (one with a heater added and another with the open part closed). The simulation results show that the method of closing the open part is better than adding the heater.

스프레이 코팅 룸의 온도분포 해석

김남웅(Kim, Nam-Woong),김성용(Kim, Seong-Yong),김국원(Kim Kug Weon) 한국산학기술학회 2015 한국산학기술학회논문지 Vol.16 No.11

아연말 코팅은 친환경성 및 고성능으로 인하여 널리 사용되고 있다. 일반적으로 코팅온도가 코팅층 두께 및 코팅품질 을 결정하는 주요한 요소이므로 아연말 코팅의 경우에도 최적의 코팅온도가 요구되고 있다. 본 연구에서는 아연말 스프레이 코팅 룸의 온도분포를 해석하기 위해 룸 내부의 공기유동을 포함하는 열 유동 전산 시뮬레이션을 수행하였다. 3차원 CAD 프로그램인 SolidWorks를 이용하여 스프레이 코팅 룸 전체와 예열실과 건조실을 모두 고려한 모델링을 수행하였으며 Flow Simulation 프로그램을 이용하여 열 유동 해석을 수행하였다. 해석된 결과는 열화상카메라를 이용한 실험으로 검증하였다. 해석결과 제1스프레이실과 제2스프레이실의 온도분포 특성을 파악할 수 있었으며, 현재의 상태로는 목표 온도 값인 25 oC에 미달하고 있었음을 알 수 있었다. 단순히 히터를 추가하는 방법 대신, 현재 조건에서 스프레이실의 온도를 높이는 방안으로 배기팬을 사용하지 않는 경우에 대해 시뮬레이션을 수행하였으며, 그 결과 제1스프레이실의 온도가 6.2 oC, 제2스프레이실의 온도가 5.8 oC 상승하였다. 본 연구 내용은 향후 스프레이 코팅 룸의 성능향상을 위한 설계에 이용될 수 있다. Recently, Zinc coating is often used with environment friendly features and high performance. Generally The coating temperature is one of main factors for determining coating thickness and coating ability, so the optimal coating temperature is strongly required. In this paper, the thermo-flow simulation considering the air flow inside the coating rooms for analyzing the temperature distributions of Zinc spray coating room was performed. Two spray coating rooms, preheating room and drying room were all modeled by SolidWorks program and the temperature distributions were analyzed by Flow simulation program. The analysis results were verified with the measured data by thermal image camera. The characteristics of temperature distributions of the first spray room and the second spray room were understood and the results showed that the temperatures of two spray coating room were low compared with the target temperature 25 oC. To the exclusion of heater addition, the simulation with all the same conditions exclusive the exhaust fan was performed, which showed that the temperatures of the first and the second spray rooms increased by 6.2 oC and 5.8 oC. This analysis can be applicable for designing a new spray coating room for improving performance.

동흡진기를 사용한 광 디스크 드라이브의 진동저감

김남웅(Kim, Nam-Woong),신효철(Sin, Hyo-Chol),김국원(Kim, Kug-Weon) 한국소음진동공학회 2006 한국소음진동공학회 논문집 Vol.16 No.5

In high-speed optical disk drive, the excitation caused by rotation of a mass-unbalanced disk is a major source of vibration. The vibration can be a disturbance to the servo system, which is sufficient to cause severe failures in the reading and writing process. The vibration also causes users to feel unpleasantness. The vibration reduction is therefore essential for the reliable operation of optical disk drive. One of the approaches to reduce the vibration is a dynamic vibration absorber(DVA). In this paper, we analyze the dynamic behavior of $DVD{\pm}RW$ combo drive system with DVA through 12-dof rigid multi-body dynamic model. The effective location and the optimal frequency ratio for the DVA are obtained from the analysis. The DVA are fabricated based on the analysis and its usefulness is confirmed.

4각 보행 로봇의 정적 걸음새 생성

김남웅(Nam Woong Kim),김국원(Kug Weon Kim),신효철(Hyo-Chol Sin) 한국생산제조학회 2007 한국생산제조학회지 Vol.16 No.6

This paper describes a static gait generation process and a mechanical design process of leg mechanisms for quadruped robots. Actually robot walking is realized with the joint motion of leg mechanisms. In order to calculate the time-angle trajectories for each joint of leg mechanisms, we generate end-tip trajectories with tim e for each leg in the global inertial coordinate system intuitively, followed by coordinate transformations of the trajectories into the local coordinates system fixed in each leg, finally the angle-time trajectories of each joint of leg mechanisms are obtained with inverse kinematics. The stability of the gait generated in this paper was verified by a multi-body dynamic analysis using the commercial software ADAMS<SUP>®</SUP> . Additionally the mechanical specifications such as gear reduction ratio, electrical specifications of motor and electrical power consumption during walking have been confirmed by the multi-body dynamic analysis. Finally we constructed a small quadruped robot and confirmed the gait.

저온 나노임프린트 공정에서 압력과 폴리머 레지스트 초기 두께의 영향

김남웅(Nam Woong Kim),김국원(Kug Weon Kim),신효철(Hyo-Chol Sin) 한국생산제조학회 2009 한국생산제조학회지 Vol.18 No.1

A major disadvantage of thermal nanoimprint lithography(NIL) is the thermal cycle, that is, heating over glass transition temperature and then cooling below it, which requires a significant amount of processing time and limits the throughput. One of the methods to overcome this disadvantage is to make the processing temperature lower. Accordingly, it is necessary to determine the effects on the processing parameters for thermal NIL at reduced temperatures and to optimize the parameters. This starts with a clear understanding of polymer material behavior during the NIL process. In this work, the squeezing and filling of thin polymer films into nanocavities during the low temperature thermal NIL have been investigated based upon a two-dimensional viscoelastic finite element analysis in order to understand how the process conditions affect a pattern quality; Pressure and initial polymer resist thickness dependency of cavity filling behaviors has been investigated.

UV 나노 임프린트 공정에서 스탬프 균일 변형을 위한 더미 블록 설계

김남웅(Nam Woong Kim),김국원(Kug Weon Kim),정태은(Tae Eun Chung),신효철(Hyo-Chol Sin) 한국생산제조학회 2008 한국생산제조학회지 Vol.17 No.5

Nanoimprint lithography(NIL) is an emerging technology enabling cost-effective and high-throughput nanofabrication. Among NILs, significant efforts from both academia and industry have been put in UV NIL research and development because of its ability to pattern at room temperature and at low pressure. In UV NIL, there may be in-line set-up error of the stamp and the substrate. To compensate this error, the dummy blocks are put on the stamp and pressurized uniformly. Contact problems between the stamp and the photoresist layer on the substrate are often happened, which results in the non-uniform residual layer. In this paper, the pressurization method on the dummy block is investigated by the finite element method. A new method is recommended and evaluated for the uniform stamp deformation.

잔류응력 부과에 의한 광디스크의 임계속도 증가

김남웅(Kim, Nam-Woong),나상식(Na, Sang Sik) 한국산학기술학회 2013 한국산학기술학회논문지 Vol.14 No.5

현재 광디스크 드라이브는 오랜 기간 지속된 산업계의 데이터 전송률 경쟁을 통하여 10,000 rpm 이상의 고 속으로 구동되고 있다. 고속 구동은 필연적으로 시스템의 진동을 유발하여 픽업의 데이터 읽기/쓰기 서보 제어에 외 란을 야기하는데, 통상 진동외란은 방진고무를 통한 진동의 절연 및 서보 제어의 강인성 개선을 통해 해결되고 있다. 본 연구에서는 산업계에서 일상으로 이루어지는 광디스크 드라이브 시스템의 동특성 개선에서 한걸음 더 나아가 광 디스크의 동특성을 개선하는데 주목하였다. 이를 위하여 사출성형 공정해석을 수행하여 공정 조건(유량, 사출온도)이 잔류응력에 미치는 영향을 조사하였고, 이 잔류응력의 변화가 광디스크의 진동 모드 및 임계속도 즉, 동특성에 미치 는 영향을 모달해석을 통해 살펴보았다. 이러한 일련의 과정을 통해 사출성형 시 발생하는 광디스크의 잔류응력을 제 어하여 광디스크의 임계속도를 잔류응력이 없는 경우 대비 약 14.4% 높일 수 있음을 확인하였다. Through the data transfer race in industry since 1990s, the operational speed of optical disk drive(ODD) becomes commonly over 10,000 rpm. Such high speed operation inevitably causes the vibration, which is also the disturbances in the read-write process of pick-up servo-controller. Generally the vibration disturbance problem can be solved by the vibration isolation using the rubber mount and the increase of robustness of the pick-up servo-controller. Optical disk itself has not been targeted for the vibration reduction, because it is manufactured under the standardized format. In this paper we focused on the increase of critical speed of optical disk, that is, the improvement of dynamic characteristics, with the control of residual stresses which are come from the injection molding process. To do this, first, the residual stresses induced from the injection molding process are calculated using finite element method. The major design parameters of the process conditions are flow rate and melt temperature, which control the residual stresses in optical disk. Second, the critical speed of optical disk is calculated with modal analysis considering residual stress distributions. It was found out that the critical speed can be improved by the control of operational parameters in the injection molding process.