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증착 후 열처리 온도에 따른 In2O3 박막의 구조적, 전기적, 광학적 특성 변화
이영진 ( Y. J. Lee ),이학민 ( H. M. Lee ),허성보 ( S. B. Heo ),김유성 ( Y. S. Kim ),채주현 ( J. H. Chae ),공영민 ( Y. M. Kong ),김대일 ( Dae Il Kim ) 한국열처리공학회 2011 熱處理工學會誌 Vol.24 No.6
We have investigated the structural, electrical and optical properties of In2 O3 thin films deposited by RF magnetron sputtering and then annealed at 150℃ and 300℃ in vacuum. The structural and electrical properties are strongly related to annealing temperature. All the annealed In2O3 films are grown as a hexagonal wurtzite phase and the largest grain size is observed in the films annealed at 300℃. The sheet resistance decreases with a increase in annealing temperature and In2O3 film annealed at 300℃ shows the lowest sheet resistance of 174 Ω/□. The optical transmittance of In2O3 films in a visible wavelength region also depends on the annealing temperature. The films annealed at 300℃ show higher transmittance of 76% than those of the films prepared in this study. (Received September 27, 2011; Revised October 14, 2011; Accepted October 20, 2011)
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Effect of Intermediate Metal on the Methanol Gas Sensitivity of ITO Thin Films
H. M. Lee(이학민),S. B. Heo(허성보),Y. M. Kong(공영민),Daeil Kim(김대일) 한국진공학회(ASCT) 2011 Applied Science and Convergence Technology Vol.20 No.3
RF 마그네트론 스퍼터와 DC 마그네트론 스퍼터를 병행하여 ITO/Au/ITO, ITO/Cu/ITO, 그리고 ITO/Ni/ITO 박막을 유리기판 위에 증착하였다. 증착 후 진공열처리를 통하여 층간 금속 층이 ITO박막의 메탄올 검출 민감도에 미치는 영향을 분석하였다. 모든 박막센서의 두께는 100 ㎚로 동일하게 ITO 50 ㎚/metal 10 ㎚/ITO 40 ㎚로 제작되었고 메탄올 농도는 100에서 1,000 ppm까지 달리하였다. ITO/Au/ITO 박막센서가 가장 높은 민감도를 보임으로써 ITO/Au/ITO 다층박막이 기존의 ITO메탄올 센서를 대체할 수 있는 센서임을 확인하였다. ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 ㎚, IMI sensors have a sandwich structure of ITO 50 ㎚/metal 10 ㎚/ITO 40 ㎚. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 ㎚ film sensors hasthe potential to be used as improved methanol gas sensor.
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Effect of Intermediate Metal on the Methanol Gas Sensitivity of ITO Thin Films
이학민,허성보,공영민,김대일,Lee, H.M.,Heo, S.B.,Kong, Y.M.,Kim, Dae-Il The Korean Vacuum Society 2011 Applied Science and Convergence Technology Vol.20 No.3
RF 마그네트론 스퍼터와 DC 마그네트론 스퍼터를 병행하여 ITO/Au/ITO, ITO/Cu/ITO, 그리고 ITO/Ni/ITO 박막을 유리기판 위에 증착하였다. 증착 후 진공열처리를 통하여 층간 금속 층이 ITO박막의 메탄올 검출 민감도에 미치는 영향을 분석하였다. 모든 박막센서의 두께는 100 nm로 동일하게 ITO 50 nm/metal 10 nm/ITO 40 nm로 제작되었고 메탄올 농도는 100에서 1,000 ppm까지 달리하였다. ITO/Au/ITO 박막센서가 가장 높은 민감도를 보임으로써 ITO/Au/ITO 다층박막이 기존의 ITO메탄올 센서를 대체할 수 있는 센서임을 확인하였다. ITO thin films and gold (Au), copper (Cu) and nickel (Ni) intermediate ITO multilayer (ITO/Au/ITO, ITO/Cu/ITO, ITO/Ni/ITO) films were deposited on glass substrates with a reactive radio frequency and direct current magnetron sputtering system and then the effect of intermediate metal layer and annealing temperature on the methanol gas sensitivity of ITO films were investigated. Although both ITO and ITO/metal/ITO (IMI) film sensors have the same total thickness of 100 nm, IMI sensors have a sandwich structure of ITO 50 nm/metal 10 nm/ITO 40 nm. The change in the gas sensitivity of the film sensors caused by methanol gas ranging from 100 to 1000 ppm was measured at room temperature. The IAI film sensors showed the higher sensitivity than the other sensors. Finally, it is concluded that the ITO 50/Au 10/ITO 40 nm film sensors hasthe potential to be used as improved methanol gas sensor.
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오재성(J. S. Oh),공영민(Y. M. Kong),김병기(B. K. Kim),이기안(K. A. Lee) 한국소성가공학회 2012 한국소성가공학회 학술대회 논문집 Vol.2012 No.10
This study investigated the high temperature compressive deformation (25℃~800℃) behavior of Ni-22.4%Fe-22%Cr-6%Al porous metal that is manufactured via powder process. Two different porous metals - 580㎛ (cell size) and 800㎛ - were used. The relative densities were 8.51% for the 580㎛ and 6.19% for the 800㎛ material. Those materials were to consist of γ-Ni, γ’-Ni₃Al and β-NiAl phases. The compression results, regardless of temperature, revealed typical three stages of deformation behavior (elastic, plateau, and densification region). At all temperatures, 580㎛(a higher density) showed higher strengths than those of 800㎛. However, the difference of strength continuously decreased with increasing temperature. Fractography revealed that the fine cracks easily propagated along interphase boundary in the strut regardless of deformation temperature and porosity condition. Based on these results, the mechanism of high temperature deformation of porous metal was also discussed.
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