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RISS 인기검색어
- 검색키워드
- 저자 : Zhuangde Jiang (검색결과 4 건)
- 무료
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An ultra-high pressure sensor based on SOI piezoresistive material
Yulong Zhao,Xudong Fang,Zhuangde Jiang,Libo Zhao 대한기계학회 2010 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.24 No.8
This paper describes an ultra-high pressure sensor which is in urgent need and widely used in defense industry and petroleum industry. It is designed on the combination of micro Silicon on Insulator (SOI) solid piezoresistive chip based on Micro Electro Mechanical Systems (MEMS) technique and cylindrical elastic body that could successfully convert dynamic ultra-high pressure measurement in explosion to strain measurement. Performances of the sensor including size, sensitivity, and linearity are investigated with experiment data. It’s proved that the dynamic ultra-high sensor in the range of 2GPa in this paper is successful in pressure measurement in explosion. The research of ultra-high pressure sensor in this paper could not only provide a reference for the improvement of explosive property, but also lay a foundation for research of pressure sensor in the range of 10GPa of the next step.
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A monolithic silicon multi-sensor for measuring three-axis acceleration, pressure and temperature
Xu Jingbo,Zhao Yulong,Jiang Zhuangde,Sun Jian 대한기계학회 2008 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.22 No.4
A monolithic multi-sensor for small unmanned aerial vehicles is presented in the paper; it consists of a three-axis piezoresistive accelerometer, a piezoresistive absolute pressure sensor and a silicon thermistor temperature sensor. The accelerometer is designed with four silicon beams supporting the seismic mass and appropriate piezoresistors arrangement to detect three-axis acceleration and greatly reduce cross-axis sensitivities. For minimizing the effect of stress on the temperature sensor, the thermistor is designed along [100] and [010] crystal orientation. The multi-sensor is fabricated on SOI wafers by using MEMS bulk-micromachining technology. Some effective micromachining steps are applied in the fabrication. The two-step wet anisotropic etching process on the backside of the wafers can form the whole backside shape of the multi-sensor. The metal electrode sputtered on the Pyrex glass can avoid sticking between the Pyrex glass and the seismic mass in the process of anodic bonding. The die size of the multi-sensor is 4×6×0.9mm3. The measured results show that the multi-sensor is appropriate for its application field.
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Design, fabrication and experiment of a MEMS piezoresistive high-g accelerometer
Yulong Zhao,Xiaobo Li,Jing Liang,Zhuangde Jiang 대한기계학회 2013 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.27 No.3
High-g accelerometers are widely used in explosion and shock measurement. This paper describes a MEMS piezoresistive high-g accelerometer whose range is more than 50000g. It is designed on the basis of silicon on insulator (SOI) solid piezoresistive chip. The chip has a structure where both ends of the beam are fixed. Through the stress analysis and mode analysis of the accelerometer, the detailed parameters of the structure are established. The experimental results obtained from the drop hammer shock machine test and live-fire test show good properties of the accelerometer such as good output characteristic, repeatability and fast response speed. Therefore, the accelerometer in this paper meets the requirement of explosion and shock measurement basically.
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An ultra-high pressure sensor with cylinder structure
Libo Zhao,Xin Guo,Xiawei Meng,Rahman Hebibul,Yulong Zhao,Jianzhu Wang,Zhuangde Jiang 대한기계학회 2013 JOURNAL OF MECHANICAL SCIENCE AND TECHNOLOGY Vol.27 No.8
Based on strain-resistance effect, an ultra-high pressure sensor has been developed with the range of 0-500 MPa. It is mainly composed of the elastic element and sensitive element. This sensor’s range is determined by the elastic element’s structure and material. In order to endure the ultra-high pressure, the elastic element’s material is selected as spring steel, and its structures are analyzed and simulated. After that, the metal strain gauge as the sensitive element is packaged on the elastic element. Then the sensor is developed after some compensation processes are carried out. In the end, the sensor is calibrated. The results show that the sensor has good performance,such as the accuracy of 0.35%FS, which meets the requirements of aerospace, weapons and other fields.
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