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질소 플라즈마처리에 의한 a-C 박막의 전계방출특성 변화에 관한 연구
Ryu, Jeong-Tak,Lee, K.Y.,Honda, S.,Katayama M.,Oura, K. 한국전기전자재료학회 2004 전기전자재료학회논문지 Vol.17 No.12
Amorphous carbon (a-C) films have been deposited on Si(100) substrate using RF magnetron system in order to investigate the electron field emission properties. The a-C films were treated by $N_2$ gas plasma at room temperature. Surface morphologices and structural properties of the a-C films before and after $N_2$ plasma treatment were observed by scanning electron microscopy and Raman spectroscope, respectively. Structural properties and surface morphology of the a-C films were changed by $N_2$ plasma treatment. The emission properties can be improved by the plasma treatment according to the contents of nitrogen on the a-C films which is varied by plasma treatment time. Before the plasma treatment, the a-C films are found to have a threshold field of 14 V/$\mu$m, but the a-C film treated by $N_2$ plasma for 30 min exhibit threshold field as low as 6.5 V/$\mu$m.
Ryu, Jeong-Tak,Ikuno, T,Honda, S.,Katayama, M.,Oura, K. 한국산업정보학회 2006 한국산업정보학회논문지 Vol.11 No.4
본 논문에서는 DC 플라즈마와 금속유기물을 사용하여 CNF의 저온 합성에 성공하였다. 합성된 CNTs는 기판의 위치에 따라 매우 다른 특성 차이가 보였다. CNT는 일반적으로 직경 100 nm, 길이 $10{\mu}m$의 특성을 가진다. CNT의 형태적 특성들은 전계전자방출특성에 큰 영향을 준다는 사실을 본 연구를 통해 알 수 있었다. 따라서 CNF의 합성에 의한 CNF 구조적 특성은 전자소자응용면에서 매우 중요한 역할을 한다. Carbon nanofibers have synthesized a low temperature using DC Ar plasma and Fe-Phthalocyanine, and a characteristic difference of the synthesized CNF according to the location of the substrate was investigated. The carbon nanofibers had about 100nm diameter and up to $10{\mu}m$ length. These were grown in random orientation. There are two shapes in the CNFs, screw and straight line shapes. Furthermore, we found the selective growth of nanofibers on the scratched substrates. The density of CNFs synthesized on the position (a) were higher than that synthesized on the position (b) [See the Fig. 2]. Also, the length of CNFs was different. In the shape, CNFs with screw and straight line shape were synthesized in the position (a), but. only CNFs with straight line shape were synthesized in the position (b). The difference have an important effect on the field emission characteristics.
Field electron emission from amorphous carbon thin films grown by RF magnetron sputtering
Jeong-Tak Ryu,Shin-Ichi Honda,Mitsuhiro Katayama,Kenjiro Oura 한국물리학회 2005 Current Applied Physics Vol.5 No.4
Using a RF magnetron sputtering, amorphous carbon (a-C) and N-doped a-C (a-C:N) thin lms were fabricated as eld electronemitter. These thin lms were deposited on Si(001) substrate at several temperatures. The eld emission property was improved fora-C thin lms grown at higher substrate temperatures. Furthermore, a-C:N lm exhibits eld emission property better than that ofundoped a-C lm. These results are explained in terms of the change in surface morphology and structural properties of a-C lm..