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      • KCI우수등재

        Cu 기판위에 성장한 MgO, MgAl₂O₄와 MgAl₂O₄/MgO 박막의 집속이온빔을 이용한 스퍼터링수율 측정과 이차전자방출계수 측정

        정강원(K. W. Jung), 이혜정(H. J. Lee), 정원희(W. H. Jung), 오현주(H. J. Oh), 박철우(C. W. Park), 최은하(E. H. Choi), 서윤호(Y. H. Seo), 강승언(S. O. Kang) 한국진공학회(ASCT) 2006 Applied Science and Convergence Technology Vol.15 No.4

        MgAl₂O₄ 막은 MgO 보호막 보다 단단하며 수분 흡착 오염문제에 상당히 강한 특성을 가진다. 본 연구에서 AC-PDP의 유전체보호막으로 사용되는 MgO 보호막의 특성을 개선하기 위해 MgAl₂O₄/MgO 이중층 보호막을 제작하여 특성을 조사하였다. 전자빔 증착기를 사용하여 Cu 기판에 MgO와 MgAl₂O₄을 각각 1000 Å 두께로 증착, MgAl₂O₄/MgO을 200/800 Å 두께로 적층 증착 후, 이온빔에 의한 충전현상을 제거하기 위해 Al을 1000 Å 두께로 증착하였다. 집속 이온빔(focused ion beam ; FIB)장치를 이용하여 10 ㎸에서 14 ㎸까지 이온빔 에너지에 따라 MgO는 0.364 ~ 0.449 값의 스퍼터링 수율에서 MgAl₂O₄/MgO을 적층함으로 24 ~ 30 % 낮아진 0.244 ~ 0.357 값의 스퍼터링 수율이 측정되었으며, MgAl₂O₄는 가장 낮은 0.088 ~ 0.109 값의 스퍼터링 수율이 측정되었다. g-집속이온빔(g-FIB)장치를 이용하여 Ne? 이온 에너지를 50 V에서 200 V까지 변화 시켜 MgAl₂O₄/MgO와 MgO는 0.09 ~ 0.12의 비슷한 이차전자방출 계수를 측정 하였다. AC-PDP셀의 72시간 열화실험 후 SEM 및 AFM으로 열화된 보호막의 표면을 관찰하여 기존의 단일 MgO 보호막과 MgAl₂O₄/MgO의 적층보호막의 열화특성을 살펴보았다. It is known that MgAl₂O₄ has higher resistance to moisture than MgO, in humid ambient MgO is chemically unstable. It reacts very easily with moisture in the air. In this study, the characteristic of MgAl₂O₄ and MgAl₂O₄/MgO layers as dielectric protection layers for AC-PDP (Plasma Display Panel) have been investigated and analysed in comparison for conventional MgO layers. MgO and MgAl₂O₄ films both with a thickness of 1000 Å and MgAl₂O₄/MgO film with a thickness of 200/800 Å were grown on the Cu substrates using the electron beam evaporation. 1000 Å thick aluminium layers were deposited on the protective layes in order to avoid the charging effect of Ga? ion beam while the focused ion beam(FIB)is being used. We obtained sputtering yieds for the MgO, MgAl₂O₄ and MgAl₂O₄/MgO films using the FIB system. MgAl₂O₄/MgO protective layers have been found th show 24 ~ 30% lower sputtering yield values from 0.244 up to 0.357 than MgO layers with the values from 0.364 up to 0.449 for irradiated Ga? ion beam with energies ranged from 10 ㎸ to 14 ㎸. And MgAl₂O₄ layers have been found to show lowest sputtering yield values from 0.88 up to 0.109. Secondary electron emission coefficient(g) using the γ-FIB. MgAl₂O₄/MgO and MgO have been found to have similar g values from 0.09 up to 0.12 for indicated Ne+ ion with energies ranged from 50 V to 200 V. Observed images for the surfaces of MgO and MgAl₂O₄/MgO protective layers, after discharge degradation process for 72 hours by SEM and AFM. It is found that MgAl₂O₄/MgO protective layer has superior hardness and degradation resistance properties to MgO protective layer.

      • SCOPUSKCI등재

        조성변화에 따른 Fe-Sm-O계 박막의 연자기적 성질

        윤대식,조완식,고은수,이영,박종봉,김종오,Yoon,,T.S.,Cho,,W.S.,Koo,,E.S.,Li,,Ying,Park,,J.B.,Kim,,C.O. 한국재료학회 2001 한국재료학회지 Vol.11 No.1

        Nanocrystalline Fe-Sm-O thin films were prepared by RF magnetron reactive sputtering method in $Ar+O_2$mixed atmosphere with the $O_2$content of 5%. The compositions of the thin films were changed by changing the number of $Sm_2O_3$ chips. The best soft magnetic properties of the thin film with the composition of $Fe_{83.4}Sm_{3.4}O_{13.2}$ were saturation flux density of 18 kG, coercivity of 0.82 Oe and effective permeability about 2,600 at 0.5~100 MHz, respectively. The electrical resistivity of Fe-Sm-O thin films was increased with increasing the amount of Sm and O elements which combined each other, the electrical resistivity of$Fe_{83.4}Sm_{3.4}O_{13.2}$ thin film was $130{\mu}{\Omega}cm$. In case of the small amount of Sm and O elements, the microstructures of Fe-Sm-O thin films showed a precipitated phase of $Sm_2O_3$ on the ${\alpha}-Fe$ phase. With the increase of the amount of Sm and O elements, the microstructures of the Fe- Sm-O thin films were changed into a mixed structure of ${\alpha}-Fe$ crystal-phase and Sm-oxide amorphous phase. The Fe-Sm-O thin films with Fe content in the range of 72~94 at% exhibited the quality factor (Q = $\mu$′/$\mu$") of 7~75 up to 50 MHz.

      • KCI등재

        비정질 Spinel Ferrite의 제조와 그 자기적 특성

        김태옥(T. O. Kim), 김창곤(C. G. Kim) 한국자기학회 1992 韓國磁氣學會誌 Vol.2 No.1

        본 연구에서는 장래의 전자공업 및 정보산업의 기본소재로서 그 응용이 기대되고 있는 비정질산화물자성체를 개발하기 위한 기초연구를 수행하였다. 현재 연구보고 되어 있는 강자성 비정질 산화물은 같은 조성의 다결정 ferrite에 비하여 그 자성이 빈약하므로 자성이 좀더 강한 비정질 spinel ferrite의 개발이 요구된다. 자체 제작한 쌍 roller 초급냉 장치로써 CaO-B₂O₃ 계 amorphous ferrite 시료를 제조하고 얻어진 시편의 제특성을 조사하기 위해 XRD, DTA/TG, VSM, Mossbauer spectrum으로 측정한 결과 다음과 같은 결론을 얻었다. CaO-Bi₂O₃ 계 amorphous ferrite는 10-50 mole% CaO, 10-50 mole% Bi₂O₃ 40-70 mole% Fe₂O₃의 조성 영역에서 제조가 가능하고 BiFeO₃와 CaFe₄O_7의 혼합 조성부근에서 강력한 자화를 나타낸다. 특히 (CaO)_(20)-(Bi₂O₃)_(15)(Fe₂O₃)_(65)의 조성에 있어서는 자화가 약 21.84 emu/g(10kOe)이며 강자성적인 거동을 나타낸다. 이 비정질 ferrite는 반강자성상(α-상)과 강자성상(β-상)으로 되어 있다. 비정질 ferrite의 결정화는 550℃와 775℃에서 2단계로 일어나고, 그때 나타나는 결정상은 BiFeO₃의 perovskite 상과 α-Fe₂O₃ 상이다. The fundamental research about the amorphous ferrite, which is expected as the important material for electronic and information imdustry in future, was carried out in this work. Because the ferromagnetic amorphous ferrites reported recently are very inferior in magnetic properties than the crystalline ferrites, the development of the more ferromagnetic amorphous ferrites is required.<br/> In order to obtain the fundamental data for the preparation of amorphous ferrites, the hand-made twin-roller quenching apparatus was used for rapid quenching.<br/> Investigation on amorphous ferrite in the system CaO-Bi₂O₃-Fe₂O₃ has been carried out in the composition of 10-50 mole% CaO, 10-50 mole% Bi₂O₃, 40-70 mole% Fe₂O₃. Large magnetization values were obtained near the composition of the mixture of BiFeO₃ and CaFe₄O_7. Especially, an amorphous (CaO)_(20)(Bi₂O₃)_(15)(Fe₂O₃)_(65) specimen has a magmetization value of about 21.84 emu/g at 0K(10 kOe). Fe Mossbauer absorption spectrum indicates that this specimen is compsed of two amorphous phases, antiferromagnetic phase(α-phase) and ferromagnetic phase(β-phase). Crystallization of this amorphous ferrite was happened in steps-550℃ and 775℃, then observed crystal phases were perovskite phase of BiFeO₃ and Fe₂O₃ phase.

      • SCOPUSKCI등재

        산소분압에 따른 Fe-Sm-O계 박막의 연자기적 성질

        윤대식,조완식,고은수,이영,박종봉,김종오,Yoon,,T.S.,Cho,,W.S.,Koo,,E.S.,Li,,Ying,Park,,J.B.,Kim,,C.O. 한국재료학회 2000 한국재료학회지 Vol.10 No.11

        RF magnetron sputtering법으로 초미세결정 Fe-Sm-O계의 박막을 상온에서 제작하여 산소분압에 따른 포화자화, 보자력, 고주파에서의 투자율(100MHz)을 조사하였다. 최적조건인 5%의 산소분압에서 제조한 초미세결정 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막은 포화자속밀도 18kG, 보자력 0.82 Oe, 실효투자율 (0.5~100MHz) 2,600 이상의 우수한 연자성을 나타내었다. 산소분압이 증가함에 따라 $\alpha$-Fe 결정립의 크기가 감소하여 10%이상의 산소분압에서는 FeO가 생성되어 연자기적 성질이 열화되었다. Fe-Sm-O계 박막의 전기비저항은 산소분압이 증가함에 따라 증가하는 경향을 나타내었으며 우수한 연자기적 성질을 가지는 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막의 경우, 전기비저항은 130 $\mu$$\Omega$cm이었다. 따라서 미세하게 형성된 $\alpha$-Fe 결정립과 높은 전기비저항 때문에 초미세결정 Fe(sub)83.4Sm(sub)3.4O(sub)13.2박막이 고주파에서 우수한 연자기적 성질을 가지는 것으로 판단된다. The influence of $O_2$partial presure on saturation magnetization, coercivity and effective permeability(0.5~100MHz) of as-deposited Fe-Sm-O thin films, which were fabricated by RF magnetron reactive sputtering method, were investigated. The nanocrystalline Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film fabricated at $O_2$partial pressure of 5% exhibits the best magnetic softness with saturation magnetization of 18kG, coercivity of 0.82 Oe and effective permeability about 2,600 at 0.5~100MHz. $\alpha$-Fe grain size is decreased with increasing $O_2$partial pressure. In case of $O_2$partial pressure of 10%, it is observed that FeO compound is formed and soft magnetic properties are decreased. The electrical resistivity of Fe-Sm-O thin films were increased with increasing $O_2$partial pressure, the electrical resistivity of Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film with the best soft magnetic properties was 130 $\mu$$\Omega$cm. Therefore, It is assumed that the good soft magnetic properties of Fe(sub)83.4Sm(sub)3.4O(sub)13.2 thin film results from high electrical resistivity and decreasing $\alpha$-Fe grain size due to precipitation of Sm-Oxide phase.

      • SCOPUSKCI등재

        반응성 스퍼터링으로 제조한 ${Ta_2}{O_5}/{Al_2}{O_3}$ 다충박막의 유전특성

        최재훈,오태성,Choe,,Jae-Hun,O,,Tae-Seong 한국재료학회 2001 한국재료학회지 Vol.11 No.12

        Dielectric properties and leakage current characteristics of 100 nm-thick $Ta_2O_5/Al_2O_3$multilayer thin films, which were fabricated by reactive sputtering of$Al_2O_3$and$Ta_2O_5$ successively on top of each other for total 9 layers, have been investigated with variation of the$Al_2O_3$content$(i.e,\;Ta_2O_5/Al_2O_3 \;thickness\;ratio)$.$Ta_2O_5/Al_2O_3$films were amorphous regardless of the$Al_2O_3$content. With increasing the$Al_2O_3$content from 0% to 100%, refractive index of the $Ta_2O_5/Al_2O_3$films decreased linearly from 2.03 to 1.56 and dielectric constant was lowered from 23.9 to 7.7 Variation of the dielectric constant with the$Al_2O_3$content was in good agreement with the behavior that was obtained by assuming parallel capacitors of$Al_2O_3$and Ta_2O_5$. Leakage current characteristics of $Ta_2O_5/Al_2O_3$ multilayer films were superior to those of $Ta_2O_5$ and$Al_2O_3$films. $Ta_2O_5/Al_2O_3$ films of 5% and 10%$Al_2O_3$content exhibited excellent leakage current densities which were lower than $10^{-7} A/cm^2$ at 1MV/cm.

      • 열화학 사이클 H₂ 제조를 위한 NiFe₂O₄의 열적 거동

        한상범(S. B. Han), 강태범(T. B. Kang), 주오심(O. S. Joo), 정광덕(K. D. Jung) 한국에너지학회 2003 한국에너지공학회 학술발표회 Vol.2003 No.-

        고상법에 의해 제조된 NiFe₂O₄의 열적거동은 열화학 사이클에 의해 H₂제조를 위해서 연구되었다. NiFe₂O₄의 환원반응은 800℃부터 시작하였고 무게감소는 1000℃까지 0.2-0.3 wt% 감소하였다. 이 반응에서 NiFe₂O₄의 B위치의 Fe31 이온과 결합된 산소의 방출에 의해 NiFe₂O₄는 환원되어진다. 환원산화 반응을 위해 NiFe₂O₄의 구조는 스피넬 구조를 갖는다. 여기서 H₂O 분해반응은 환원된 NiFe₂O₄의 산화반응에 의해 H₂가 제조된다. 그러므로 NiFe₂O₄는 환원반응시 비교적 낮은 온도에서 산소를 방출하고, 환원산화 반응 중 결정구조의 변화 없이 매우 안정하게 H₂를 생산할 수 있기 때문에 열화학 사이클 반응에서 우수한 재료로 평가된다. The thermal behavior of NiFe₂O₄ prepared by a solid-state reaction was investigated for H₂ generation by the thermochemical cycle. The reduction of NiFe₂O₄ started from 800 ℃, and the weight loss was 0.2-0.3 wt% up to 1000 ℃. At this reaction, NiFe₂O₄ was reduced by release of oxygen bonded with the Fe3+ ion in the B site of NiFe₂O₄. In the H₂O decomposition reaction, H₂ was generated by oxidation of reduced NiFe₂O₄. The crystal structure of NiFe₂O₄ for redox reaction maintained spinel structure. Then, NiFe₂O₄ is excellent material in the thermochemical cyclic reaction due to release oxygen at low temperature for the reduction reaction and produce H₂maintaining crystal structure for redox reaction.

      • SCIESCOPUSKCI등재

        Effects of Intraperitoneally Administered Lipoic Acid, Vitamin E, and Linalool on the Level of Total Lipid and Fatty Acids in Guinea Pig Brain with Oxidative Stress Induced by H_2O_2

        C,elik,,Salt,O¨zkaya,,Ahmet 한국생화학분자생물학회 2002 BMB Reports Vol.35 No.6

        The aim of our study to investigate the protective effects of intraperitoneally-administrated vitamin E, dlalpha lipoic acid, and linalool on the level of total lipid and fatty acid in guinea pig brains with oxidative stress that was induced by H_2O_2. The total brain lipid content in the H_2O_2 group decreased when compared to the H_2O_2 + vitamin E (p<0.05), H_2O_2 + linalool (p<0.05), ALA (p<0.05), control (p<0.01), linalool (p<0.01), and vitamin E (p<0.01) groups. While the proportion of total saturated fatty acid (∑SFA) in the H_2O_2 group significantly increased (p<0.005) when compared to the vitamin E group, it only slightly increased (p<0.01) when compared to the control and H_2O_2 vitamin E groups. The ratio of the total unsaturated fatty acid (∑USFA) in the H_2O_2 groups was lower (p<0.05) than the control, vitamin E, and H_2O_2 + vitamin E groups. The level of the total polyunsaturated fatty acid (∑PUFA) in the H_2O_2 group decreased in when compared to the control, vitamin E, and H_2O_2 + vitamin E groups. While the proportion of the total w3 (omega 3), w6 (omega 6), and PUFA were found to be lowest in the H_2O_2 group, they were slightly increased (p<0.05) in the lipoic acid group when compared to the control and H_2O_2 + lipoic acid groups. However, the level of ∑SFA in the H_2O_2 group was highest; the level of ∑USFA in same group was lowest. As the proportion of ∑USFA and ∑PUFA were found to be highest in the linalool group, they were decreased in the H_2O_2 group when compared to the control group. Our results show that linalool has antioxidant properties, much the same as vitamin E and lipoic acid, to prevent lipid peroxidation. Additionally, vitamin E, lipoic acid, and linalool could lead to therapeutic approaches for limiting damage from oxidation reaction in unsaturated fatty acids, as ell as for complementing existing therapy for the treatment of complications of oxidative damage.

      • KCI등재

        열화학 사이클 H<sub>2</sub> 제조를 위한 (Co<sub>0.5</sub> Mn<sub>0.5</sub>)Fe<sub>2</sub>O<sub>4</sub>의 열적 거동

        신현창,최승철,김철성,김종원,주오심,정광덕,Shin,,H.C.,Choi,,S.C.,Kim,,C.S.,Kim,,J.W.,Joo,,O.S.,Jung,,K.D. 한국수소및신에너지학회 2002 한국수소 및 신에너지학회논문집 Vol.13 No.2

        The thermal behavior of $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ prepared by a co-precipitation wasinvestigated for Hz generation by the thermochemical cycle. The reduction reaction of $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ started from $480^{\circ}C$, and the weight loss was 1.6 wt% up to $1100^{\circ}C$. At this reaction, $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ was reduced by release of oxygen bonded with the $Fe^{3+}$ ion in the B site of ($CO_{0.5}$ $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$. In the $H_2O$ decomposition reaction, $H_2$ was generated by oxidationof reduced $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$. The crystal structure of $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ for reduction reaction maintained spinel structure and the lattice constant of $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ ($8.41\AA$) was enlarged to $8.45\AA$. But the lattice constant of $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ after $H_2O$ decomposition reaction did not change to $8.45\AA$. Then, $(Co_{0.5}\;Mn_{0.5})Fe_2O_4$ is excellent material in the thermochemical cyclic reaction due to release oxygen at low temperature for the reduction reaction and produce $H_2$ maintaining crystal structure for redox reaction.

      • KCI등재

        LAMINAR BURNING VELOCITY OF STOICHIOMETRIC HYDROGEN - OXYGEN - STEAM MIXTURE UNDRE HIGH PRESSURE

        Takahashi,,S,Iki,,N,Furutani,,H,Hama,,J,Kurata,,O 한국수소에너지학회 1997 한국수소 및 신에너지학회논문집 Vol.8 No.3

        The basic technology for a future clean electric power plant with a hydrogen combustion turbine is researched and developed as one of the WE-NET project. The condition required for H₂-O₂-H₂O combustion in the combustor of this power plant is that the inlet gas temperature is over 800K and the pressure reaches to 4-5㎫. Authors calculated laminar burning velocities of H₂-O₂-H₂O mixture as basic data nccessary to develop the model combustor. The calculation results of stoichiometric H₂-O₂-H₂O mixture and H₂-O₂-other dilution gas mixtures at atmosphcric pressure agree with the experimental data. Laminar burning velocity of H₂-O₂-H₂O mixtures are smaller than those of H₂-O₂-Ar mixtures. Laminar burning velocities at high pressure and high temperature were estimated with examination of the effects of pressure, elementary reaction etc. Those of stoichiometric H₂-O₂-H₂O mixtures monotonously, significantly decrease even under high temperature circumstance with increasing pressure. Thereby the pressure dependence of the burning belocities of stoichiometric H₂-O₂-H₂O mixtures is quite different with that of H₂-O₂-Ar mixtures, and the combustion characteristics in the model combustor under 2㎫ of pressure or over are necessary to represent the combustion characteristics in the actual system.

      • SCOPUSKCI등재

        질화규소의 기계적 특성에 미치는 미세구조 및 소결조제의 영향

        박혜련,이오상,박희동,이재도,Park,,Hye-Ryeon,Lee,,O-Sang,Park,,Hui-Dong,Lee,,Jae-Do 한국재료학회 1992 한국재료학회지 Vol.2 No.5

        Four distinctive hot pressed and heat treated S${i_3}{N_4}$ceramics, S${i_3}{N_4}$-8%${Y_2}{O_3}$, S${i_3}{N_4}$-6% ${Y_2}{O_3}$-2% $A{l_2}{O_3}$, S${i_3}{N_4}$-4% ${Y_2}{O_3}$-3% $A{l_2}{O_3}$, 그리고 S${i_3}{N_4}$-1% MgO-1% Si$O_2$(in wt%), were prepared and characterized by X-ray diffraction, scanning electron microscopy, image analysis and mechanical tests. The fracture toughness of S${i_3}{N_4}$-8% ${Y_2}{O_3}$specimens containing large elongated grains showed the highest value of about 9.8MPa$m^{1/2}$. Two out of four S${i_3}{N_4}$, ceramics(S${i_3}{N_4}$-6% ${Y_2}{O_3}$-2% $A{l_2}{O_3}$and S${i_3}{N_4}$-4% ${Y_2}{O_3}$-3% $A{l_2}{O_3}$) heat treated at 200 $0^{\circ}C$retained the fracture strength of over 900MPa and fracture toughness of over 8.0MPa$m^{1/2}$. Large ${\beta}$-S${i_3}{N_4}$grains having a diameter larger than 1${\mu}$m appeared to contribute to increase in fracture toughness. 질화규소 소재로 S${i_3}{N_4}$-8%${Y_2}{O_3}$, S${i_3}{N_4}$-6% ${Y_2}{O_3}$-2% $A{l_2}{O_3}$, S${i_3}{N_4}$-4% ${Y_2}{O_3}$-3% $A{l_2}{O_3}$, 그리고 S${i_3}{N_4}$-1% MgO-1% Si$O_2$의 4가지 조성을 선정하여 주상모양의 ${\beta}$-S${i_3}{N_4}$결정상을 성장시켰으며, XRD, SEM, 입도분석과 기계적 특성을 조사하였다. S${i_3}{N_4}$-8% ${Y_2}{O_3}$에서는 파괴인성값을 9.8MPa$m^{1/2}$까지 얻었으며 200$0^{\circ}C$에서 열처리한 후에도 파괴강도(>900MPa)의 감소없이 파괴인성이 8.0MPa$m^{1/2}$이상인 S${i_3}{N_4}$-6% ${Y_2}{O_3}$-2% ${l_2}{O_3}$, 와 S${i_3}{N_4}$-4% ${Y_2}{O_3}$-3% $A{A_2}{O_3}$를 얻었다. 질화규소의 파괴인성이 ${\beta}$-S${i_3}{N_4}$-결정상 크기의 증가에 따라 직선적으로 증가하는 관계를 갖는 파괴인성에 대한 미세구조의 영향을 고찰하였다.

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