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Diamond Conditioner Wear Characterizationfor a Copper CMP Process
L. Borucki,Y. Zhuang,R. Kikuma,N. Rikita,T. Yamashita,K. Nagasawa,H. Lee,T. Sun,D. Rosales-Yeomans,A. Philipossian,T. Stout 한국전기전자재료학회 2007 Transactions on Electrical and Electronic Material Vol.8 No.1
Conditioner wear, copper polish rates, pad temperature and coefficient of friction (COF) are measured for two novel Mitsubishi Materials Corporation designs during an extended wear and polishing test. Both designs are coated with a TeflonTM film to reduce substrate wear and chemical attack. Using optical interferometry, changes in the coating that result in gradual changes in diamond exposure are measured. Theories of the COF, conditioning, and polishing are applied to explain the observed performance differences between the designs.
Szabó,, R.,Kollá,th, Z.,Molná,r, L.,Kolenberg, K.,Kurtz, D. W.,Bryson, S. T.,Benkő,, J. M.,Christensen‐,Dalsgaard, J.,Kjeldsen, H.,Borucki, W. J.,Koch, D.,Twicken, J. D.,C Blackwell Publishing Ltd 2010 MONTHLY NOTICES- ROYAL ASTRONOMICAL SOCIETY Vol.409 No.3
<P><B>ABSTRACT</B></P><P>The first detection of the period doubling phenomenon is reported in the <I>Kepler</I> RR Lyrae stars RR Lyr, V808 Cyg and V355 Lyr. Interestingly, all these pulsating stars show Blazhko modulation. The period doubling manifests itself as alternating maxima and minima of the pulsational cycles in the light curve, as well as through the appearance of half‐integer frequencies located halfway between the main pulsation period and its harmonics in the frequency spectrum. The effect was found to be stronger during certain phases of the modulation cycle. We were able to reproduce the period‐doubling bifurcation in our non‐linear RR Lyrae models computed by the Florida–Budapest hydrocode. This enabled us to trace the origin of this instability in RR Lyrae stars to a resonance, namely a 9:2 resonance between the fundamental mode and a high‐order (ninth) radial overtone showing strange‐mode characteristics. We discuss the connection of this new type of variation to the mysterious Blazhko effect and argue that it may give us fresh insights into solving this century‐old enigma.</P>