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- 저자 : KiByung Park (검색결과 3 건)
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Improvement of photoresist removal efficiency in ozonated water cleaning system
Jonghyuck Lee,Kibyung Park,임상우 한국공업화학회 2008 Journal of Industrial and Engineering Chemistry Vol.14 No.1
Ozonated water cleaning systems are used to remove photoresist and organic contaminants on silicon wafers and natural organic matter and bacteria in drinking water. In this paper, the effects of O3 concentration, the system of ozonated water vapor, and substrate temperature on the removal efficiency of photoresist were investigated. A 11.59 kcal/mol of activation energy was obtained for the reaction between aqueous O3 and I-line photoresist. Increasing the process temperature increases the reaction rate of aqueous O3 and photoresist, but reduces the solubility of O3 in water for O3-injected system. Therefore, it is important to deliver aqueous O3 to the wafer surface effectively. The removal rate of photoresist has been accelerated by controlling formation of a boundary layer as well as the temperature of the ozonated water and O3 solubility. When water vapor was generated with O3 and sprayed through a nozzle, the highest removal rate of photoresist, 221 nm/min, was obtained. From the results observed in this study, it is concluded that it is important to have a fast uniform boundary layer formation, a thin boundary layer, and production of high concentrations of O3 in the chamber in order to improve the removal efficiency of photoresist in the ozonated water system. # 2007 The Korean Society of Industrial and Engineering Chemistry. Published by Elsevier B.V. All rights reserved.
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김세익,이유미,임명철,주정남,KiByung Park,이동옥,박상윤 대한부인종양학회 2015 Journal of Gynecologic Oncology Vol.26 No.2
Objective: To compare quality of life (QoL) and sexual functioning between sexually active ovarian cancer survivors and healthywomen. Methods: A cross-sectional study was performed in 103 successfully treated ovarian cancer survivors and 220 healthy women. All women had engaged in sexual activity within the previous 3 months, and ovarian cancer survivors were under surveillanceafter primary treatment without evidence of disease. QoL and sexual functioning were assessed using three questionnaires; theEuropean Organization for Research and Treatment of Cancer Quality of Life Questionnaire-Core 30 (EORTC QLQ-C30), OvarianCancer Module (EORTC QLQ-OV28), and the Female Sexual Function Index (FSFI). Propensity score matching was used to adjustcovariates between the ovarian cancer survivor and healthy women groups. In total, 73 ovarian cancer survivors and 73 healthywomen were compared. Results: Poorer social functioning (mean, 82.4 vs. 90.9; p=0.010) and more financial difficulties (mean, 16.4 vs. 7.8; p=0.019) wereobserved among ovarian cancer survivors than among healthy women. Sexuality, both in terms of desire, arousal, lubrication,orgasm, satisfaction, and pain and in terms of interest in sex, sexual activity, and enjoyment of sex (EORTC QLQ-OV28) weresimilar between the groups. However, vaginal dryness was more problematic in ovarian cancer survivors, with borderlinestatistical significance (p=0.081). Conclusion: Sexuality was not impaired in ovarian cancer survivors who were without evidence of disease after primarytreatment and having sexual activities, compared with healthy women, whereas social functioning and financial status diddeteriorate. Prospective cohort studies are needed.
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