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Jooho Hwang,Chun-Hong Park,Seung-Woo Kim 한국정밀공학회 2007 International Journal of Precision Engineering and Vol.8 No.2
Aerostatic planar XY stages are frequently used as the main fames of precision positioning systems. The machining and assembly process of the rails and bed of the stage is one of first processes performed when the system is built. When the system is complete, the 2D position, motion, and stage flatness errors are measured in tests. If the stage errors exceed the application requirements, the stage must be remachined and the assembly process must be repeated. This is difficult and time-consuming work. In this paper. a method for estimating the errors of a planar XY stage is proposed that can be applied when the rails and bed of the stage are evaluated. Profile measurements, estimates of the motion error, and 2D position estimation models were considered. A comparison of experimental results and our estimates indicated that the estimated errors were within 1 ㎛ of their true values. Thus, the proposed estimation method for 2D position and flatness errors of an aerostatic planar XY stage is expected to be a useful tool during the assembly process of guideways.
황주호(Jooho Hwang),부이바친(Chinh B. Bui),이찬홍(Chan Hong Lee) 한국생산제조학회 2011 한국생산제조시스템학회 학술발표대회 논문집 Vol.2011 No.4
This paper describes a method, which is based on the 4 body diagonal (ISO 230-6) and additional shift diagonal measurements method (SDM), to determine the errors of 3D positioning errors of axes. Using MDM, twelve multi-axes errors including three linear position errors, six straightness errors and three perpendicular errors can be calculated. To confirm the proposed method, SDM was applied to measuring 3 axes of machine tools and compared with directly measurement of each errors.