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DLC 코팅된 가이드레일을 이용한 볼베어링 직선 이송 스테이지의 진공환경 제어 특성 분석
심종엽(Jongyoup Shim),김경호(Gyungho Khim),황주호(Jooho Hwang) 한국생산제조학회 2014 한국생산제조학회지 Vol.23 No.4
Recently, there is an increase in the need for precision linear stages with vacuum compatibility in such areas as lithography equipment for wafer or mask manufacturing, mask mastering equipment for optical data storage and electron beam equipment. A simple design, high stiffness and low cost can be achieved by using ball bearings. However, a ball bearing have friction and wear problems just as in ambient air. In order to decrease the friction, a special finish, a diamond-like carbon (DLC) film coating, is applied to the surface of a guide rail by sputtering deposition. This paper presents the result of an experimental investigation on the control performance of a ball bearing?guided linear motion stage under two environmental conditions: in air and vacuum. A comparison between the results with and without the DLC coating was also considered in the experimental investigation.
심종엽(Jongyoup Shim),황주호(Jooho Hwang),박천홍(Chun-Hong Park) Korean Society for Precision Engineering 2015 한국정밀공학회지 Vol.32 No.2
It is an important thing for a designer to simulate and predict the performance of a spindle and a rotary table. In addition to the general performance such as static stiffness, the error motion performance information is beneficial to the designer in many cases. However for an aerostatic bearing the fluid film physical status should be calculated in order to simulate those performances and the calculation time is another obstacle for a simple performance simulation. In this paper the investigation on experiment and simulation is performed in order to find a more effective simulation method for the rotational error motion.
대형 복합수직선반 가공기용 유정압베어링 회전테이블 성능 실험 및 분석
심종엽(Jongyoup Shim),오정석(Jeong-Seok Oh),박천홍(Chun-Hong Park),신흥철(Heung-Chul Shin),박우상(Woo-Sang Park),김민재(Min-Jae Kim),김민수(Min-Soo Kim) Korean Society for Precision Engineering 2014 한국정밀공학회지 Vol.31 No.7
The large volume multi-tasking vertical lathe was developed for machining the bearing parts for a wind power generator. Although the machined part is large in size high precision tolerances are required recently. One of the most important components to achieve this mission is the rotating table which holds and supports the part to be machined. The oil hydrostatic bearing is adopted for the thrust bearing and the rolling bearing for the radial bearing. In this article experimental performance evaluation and its analysis results are presented. The rotational accuracy of the table is assessed and the frequency domain analysis for the structural loop is performed. And in order to evaluate the structural characteristic of table the moment load experiment is performed. The rotational error motion is measured as below 10 μm for the radial and axial direction and 22,800 Nm/arcsec of moment stiffness is achieved for the rotary table.