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이호철(Hocheol Lee),이남영(Namyoung Lee),송창규(Changkyu Song),박천홍(Chunhong Park),이후상(Husang Lee) 대한기계학회 2005 대한기계학회 춘추학술대회 Vol.2005 No.5
In this paper, we suggest a polishing head with a mechanical gimbals-like structure for the optics fabrication. In the small tool polishing processes, several types of polishing mechanism have been tried to get more deterministic and high efficient optical fabrication. The conventional polishing processes to use the contacting pad material of polyurethane or pitch need the higher polishing rate to shorten the overall polishing time for large optics. Therefore, new polishing head mechanism is designed to use the air backpressure and gimbals-like hinge structure to increase polishing velocity. In the following experiment, mechanical adaptability was confirmed both on the flat glass and the convex aluminum surface.