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The fabrication of a patterned ZnO nanorod array for high brightness LEDs
Park, Hyoungwon,Byeon, Kyeong-Jae,Yang, Ki-Yeon,Cho, Joong-Yeon,Lee, Heon IOP Pub 2010 Nanotechnology Vol.21 No.35
<P>In this study, a patterned ZnO nanorod array was formed on the ITO layer of GaN-based light-emitting diodes (LEDs), to increase the light extraction efficiency of the LED. The bi-layer imprinted resin pattern was used for selective growth of the ZnO nanorod array on the ITO layer. Compared to conventional LEDs grown on patterned sapphire substrate (PSS), the deposition of the blanket ZnO layer on the ITO layer increased the light extraction efficiency of the LED by about 10%. Further growth of the ZnO nanorod layer on the blanket ZnO layer increased the light extraction efficiency of the LED by about 23%. In the case that a patterned ZnO nanorod layer was formed on a blanket ZnO layer, the light extraction efficiency increased by about 34%. These enhancements of the device were caused by modulation of the refractive-index in ZnO layers and the surface roughening effects because of the unique design of the pattern, which was nanostructure-in-nanopattern, resulting in the formation of many escape cones on the LED surface.</P>
Byeon, Kyeong-Jae,Cho, Joong-Yeon,Kim, Jinseung,Park, Hyoungwon,Lee, Heon Optical Society of America 2012 Optics express Vol.20 No.10
<P>SiNx-based photonic crystal (PhC) patterns were fabricated on the ITO electrode layer of a GaN-based light-emitting diode (LED) device on a patterned sapphire substrate (PSS) by a UV nanoimprint lithography process in order to improve the light extraction of the device. A three-dimensional finite-difference time-domain simulation confirmed that the light extraction of a GaN LED structure on a PSS is enhanced when SiNx PhC patterns are formed on the ITO top layer. From the I-V characteristics, the electrical properties of patterned LED devices with SiNx-based PhC were not degraded compared to the unpatterned LED device, since plasma etching of the p-GaN or the ITO layers was not involved in the patterning process. Additionally, the patterned LED devices with SiNx-based PhCs showed 19%-increased electroluminescence intensity compared with the unpatterned LED device at 445 nm wavelength when a 20 mA current is driven.</P>
Structural and Microstructural Properties TiO₂ Nano-Patterns Using PDMS Replica
Yin Maung Maung,Joong-Yeon Cho,Sang-Chul Oh,Hyoungwon Park,Heon Lee 한국표면공학회 2010 한국표면공학회 학술발표회 초록집 Vol.2010 No.5
TiO₂ sol solution was prepared and deposited on to SiO2 buffered Si substrate. After spin coating, annealing was performed at 400℃, 500℃ and 700℃ for 1h, respectively. X-ray diffraction (XRD) investigation was carried out to examine the structural properties of TiO₂ thin films. Nanoimprint process was followed after spin coating of TiO₂ sol solution in order to form the nano-patterned TiO₂ layer. PDMS replica was fabricated from the Si based master template using nano-moulding technique. Scanning Electron Microscopy (SEM) was used to investigate the microstructural properties of TiO₂ nano-patterned layer of as-imprinted and annealed at 600℃. The phase formation of TiO₂ nano-pattern (600℃) was also measured by XRD.