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디지털 패턴화된 저항형 마이크로 히터를 이용한 ZnO 나노와이어 마이크로 센서
권진형(J. Kwon),최준화(J. Choi),고승환(S.H. Ko) 대한기계학회 2018 대한기계학회 춘추학술대회 Vol.2018 No.12
The nanowire based sensor has extremely high sensitivity due to the high specific surface area. In this study, we utilized the resistive micro heater for localized and selective growth of the metal oxide nanowire. The micro heater is fabricated by selective laser sintering of silver nanoparticle which is a maskless and non-vacuum process. By selective Joule heating of the digitally patterned resistive micro heater, seeding spots of the ZnO hydrothermal synthesis is specified. This technique is applied to the ZnO nanowire based UV sensor.