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DC마그네트론 스퍼터 기술로 제조된 ITO/Cu/ITO 박막의 특성
김미정,채영안,박환열,김현숙,차덕준,채영안 한국물리학회 2014 새물리 Vol.64 No.11
We investigated the characteristics of ITO/Cu/ITO multilayer electrodes grown by DC magnetron sputtering for advanced organic devices. In spite of the low-temperature process, very good quality, transparent, conducting thin films (R{sh } = 5 Ω/□, T = 51.3%) were achieved in comparison with ITO single-layer films (R{sh} = 185 Ω/□, T = 81.3%). Several analytical tools, such as high-resolution X-ray diffraction (HR-XRD), ultraviolet-visible spectrophotometry (UV-Vis), and field-emission scanning electron microscopy (FE-SEM) were used to examine the changes in the electrical, optical, structural, and morphological properties. The electrical conductivity remarkably increased with increasing Cu-intermediated-layer thickness. However, the optical transmittance decreased somewhat due to increased optical absorption in the Cu layer. To evaluate the performance of the thin film, we calculated Haacke’s figure of merit from the sheet-resistance and the optical-transmittance data. The result indicates that an ITO/Cu/ITO multilayer electrode can be used as a promising anode for advanced organic devices. DC 마그네트론 스퍼터링 공정으로 고성능 유기소자에 이용하기 위해 ITO/Cu/ITO 다층박막을 제작하였다. 저온 공정이었음에도 불구하고, ITO 단층박막 (R{sh} = 185 Ω/□, T = 81.3%)에 비해 아주 우수한 특성의 다층의 투명전극박막 (R{sh} = 5 Ω/□, T = 51.3%)을 얻을 수 있었다. 고분해능 X-선 회절분석기 (HR-XRD), 자외선-가시광선 분광광도계 (UV-Vis spectrophotometer), 전계방사형 전자 현미경 (FE-SEM) 장비를 이용하여 투명전극 박막의 전기적, 광학적, 구조적, 그리고 형상학적 분석을 하였다. Cu 중간층 두께가 증가할수록 전기전도도가 두드러지게 올라갔지만, 광 투과율은 꽤 감소한 결과가 나왔다. 박막의 성능을 평가하기 위해 면 저항과 광 투과율 데이터를 통해 Haacke’s 성능 수치 (figure of merit)를 계산하여 분석하였다. 이러한 결과는 ITO/Cu/ITO 다층투명전극이 고성능 유기소자의 양극으로서 이용될 수 있음을 암시한다.
정원기,채영안 Natural Science Research Institute JEONJU UNIVERSI 1995 전주대학교 자연과학연구소 학술논문집 Vol.8 No.1
Several amorphous SiNx/TbFe thin films were prepared using dc magnetron sputtering system with pure Ar or Ar-O_2 gas mixture. We measured the perpendicular reflectance, Kerr angle, ellipticity of the coated SiNx/TbFe bilayer film at the range of 4000 - 7000Å and calculated the dielectric tensor elements of the TbFe film without SiNx layer using above measured values and ellisometry. Again we calculated the perpendicular reflectance, Kerr angle, ellipticity of the uncoated TbFe film from these dielectric tensor elements. And we calculated the contribution of Tb and Fe sublattice magnetization to the Kerr rotation of TbFe films. The results suggest that the contribution of Tb sublattice magnetization to the Kerr rotation is not negligible in the short wavelength range (4000 - 5000Å).
정원기,한태종,김정태,채영안 전주대학교 자연과학종합연구소 1999 전주대학교 자연과학연구소 학술논문집 Vol.12 No.-
Amorphous rare earth transition metal(RE-TM) film with a strong perpendicular magnetic anisotropy and exhibiting polar Kerr effect at appropriate composition was made using DC magnetron sputtering system with pure Ar gas. This film was overcoated in situ with a transparent SiNx layer to protect it from the oxidation and to enhance the Kerr magneto-optic effect. The reflectances of the double layered RE-TM film were measured as the function of incident angle for s and p polarized light, respectively. The complex index of refraction of the film was obtained by a conventional iteration method using the measured reflectances. We also measured the complex index of refraction of a slide glass plate, a acryl plate, a gold thin film and a aluminium plate. The measured reflectances of all the samples agree well, within the experimental error with the calculated values using our the complex indices of refraction.
열확산 증착기술에 의한 유기발광다이오드 제작과정의 Copper(II)-Phthalocyanine 특성 연구
김미정,강상백,김현숙,채영안,차덕준 한국물리학회 2011 새물리 Vol.61 No.12
By using thermal evaporation deposition techniques, we fabricated organic light emitting diodes (OLED) of (+)ITO/Cu-Pc/Alq3/Al(-) with sizes of 10×12 mm². The thickness of Cu-Pc and Alq3,respectively, were about 5 nm and 50 nm. For high-quality OLEDs fabricated under optimum conditions, the characteristics of copper(II)-phthalocyanine (Cu-Pc) thin films were measured by using X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM) and UV-VIS-NIR spectrometry. The Cu-Pc thin films were prepared with two kinds of samples, samples prepared at room temperature and these prepared using a pre-heating temperature of 100℃. The current-voltage (I-V) curves of the (+)ITO/Cu-Pc/Al(-) layers were measured for different thicknesses of the Cu-Pc films. 열확산 증착기술을 이용하여 ITO/glass 기판 위에 유기반도체인copper(II)-phthalocyanine (Cu-Pc)과 Alq3를 접합한 10×12mm² 크기의 박막형 ITO/Cu-Pc/Alq3/Al 유기발광다이오드 (organic light emitting diodes : OLED)를 제작하였다. ITO 전극 위에 적층된Cu-Pc와 Alq3의 두께는 각각 5 nm, 50 nm 이내로 약 10^(-6) Torr 이하의 진공 분위기에서 증착하였다. 이 때 Cu-Pc는 기판의 온도를상온과 100℃의 두 종류의 온도로 구분하여 각각 적층하였다. 적층한 박막의 최적 조건을 찾기 위해 특성의 측정은 X-선 회절분석장치(X-ray diffraction ; XRD), 전계방사주사식전자현미경 (field emission scanning electon microscopy ; FE-SEM), 광흡수도 측정장치 (UV-VIS-NIR spectrometer)를 이용하였다. Cu-Pc의 두께에 따른 ITO/Cu-Pc/Al의전류-전압 특성도 조사하였다.